Patent EP0637042A2 successfully refreshed from Google Patents.
EP0637042A2
Expired / Lapsed
EP
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Device for affecting an input signal
Assignee: Texas Instruments Inc
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Filing: 1994-07-27
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Granted: —
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Expires: 2014-07-27
Abstract
Abstract A microminiature, variable electrical device, such as a capacitor (40a) , comprises an elemental DMD SLM (40') , which includes a substrate (43) and a member (145) spaced therefrom and mounted for movement by appropriate facilities (42, 44) . A control signal (102) is applied to the movable member (145) to produce an electric field between it and either the substrate (43) or an associated control electrode (46a) . The field moves the member (145) toward or away from either the substrate (43) or an associated output electrode (46b) to selectively adjust the spacing therebetween. The field is produced by addressing circuitry (45) associated with the substrate (43) . The movable member (145) and either the substrate (43) or the output electrode (46b) function as capacitor plates, and the spacing determines the capacitance thereof. The capacitor (40a) may be placed in series (Fig. 4) or in parallel (Fig. 3) with an input signal (114) applied to the movable member (145) . The movable member (145) , substrate (43) , control electrode (46a) , output electrode (46b) , addressing circuitry (45) , and other elements of the capacitor (40a) comprise a monolithic structure resulting from the use of MOS, CMOS or similar fabrication techniques. Multiple capacitors may be included in transmission lines (Fig. 20) , antennae (Fig. 22) , couplers (Fig. 21) , waveguides Fig. 25) and other apparatus for digital or analog tuning or capacitance adjustment thereof by selective operation of the addressing circuitry (45) .
Inventors
- 👤 Bradley M. Kanack
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 17:27
CPC Classifications
H; H01; H01P; H01P9/00; H01G; H01G5/00; H01G5/16; H01G5/18; H01H; H01H59/00; H01H59/0009; H01P1/00; H01P1/10; H01P1/12; H01P1/127; H01P1/18; H01P1/184; H01P5/00; H01P5/04; H01H1/00; H01H1/12; H01H1/14; H01H1/20; H01H1/0036; H01H2001/0042; H01H2001/0084; H01H2059/0018; H01H2059/0036; H01H67/00; H01H67/22
Claims Analysis
Total Claims: 63
Claim 1
Independent Claim
121 words
A device for affecting an input signal, the device comprising: a substrate, a member formed with and spaced from the substrate, a region of the substrate and a portion of the member acting as the respective plates of a capacitor, means for mounting the member for deflection of the portion thereof towards and away from the substrate region and for storing energy when the portion of the member deflects out of a normal position, the stored energy tending to return the deflected portion of the member to the normal position, means for selectively deflecting the portion of the member out of its normal position to vary the capacitance of the capacitor, and means for applying the input signal to the capacitor.
Claim 2
Dependent Claim
48 words
A device as in claim 1, wherein: the selective deflecting means includes means for producing an electric field bounded in part by the portion of the member, the electric field deflecting the portion of the member relative to the substrate by an amount proportional to the magnitude thereof.
Claim 3
Dependent Claim
30 words
A device as in claim 2, wherein: the electric field is produced by a voltage having a frequency such that the portion of the member deflects substantially in synchronism therewith.
Claim 4
Dependent Claim
12 words
A capacitor as in claim 3, wherein: the voltage is substantially non-time-varying.
Claim 5
Independent Claim
28 words
A device as in any of claims 2 to 4, wherein: the deflection field produced by the field-producing means is bounded in part by the region of substrate.
Claim 6
Independent Claim
21 words
A device as in any of claims 3 to 5, wherein: the voltage is applied between the substrate and the member
Claim 7
Independent Claim
44 words
A device as in any preceding claim, wherein: the input signal is a voltage having a frequency which is sufficiently high with respect to the resonant frequency of the member such that the portion of the member is incapable of deflecting in response thereto.
Claim 8
Dependent Claim
24 words
A device as in claim 6 or claim 7 when dependant on claim 6, wherein: the input voltage is superimposed on the deflection voltage.
Claim 9
Dependent Claim
54 words
A device as in claim 2 or any of claim 3 to 8 when dependant on claim 2, wherein: the field-producing means includes a control electrode associated with the substrate region, which electrode in part bounds the electric field which deflects the portion of the member by an amount determined by the magnitude thereof.
Claim 10
Independent Claim
23 words
A device as in any preceding claim, wherein: the control electrode, the mounting means and the member are monolithically formed with the substrate.
Claim 11
Dependent Claim
17 words
A device as in claim 9, wherein: the mounting means comprises a compliant facility supporting the member.
Claim 12
Dependent Claim
13 words
A device as in claim 11, wherein: the compliant facility is a membrane.
Claim 13
Dependent Claim
12 words
A device as in claim 12, wherein: the membrane is an elastomer.
Claim 14
Dependent Claim
13 words
A device as in claim 12, wherein: the membrane is a conductive metal.
Claim 15
Dependent Claim
13 words
A device as in claim 11, wherein the compliant facility is a spring.
Claim 16
Independent Claim
21 words
A device as in any preceding claim, wherein: the mounting means is integrally formed with the member and the input-signal-applying means.
Claim 17
Independent Claim
33 words
A device as in any preceding claim, wherein: the member comprises a low compliance, generally rigid element residing on the mounting means, portions of the mounting means surrounding the member having high compliance.
Claim 18
Independent Claim
29 words
A device as in any preceding claim, wherein: the member and the mounting means are electrically conductive and integral and the member is substantially thicker than the mounting means.
Claim 19
Independent Claim
28 words
A device as in any preceding claim, wherein the mounting means further comprises a support in the form of a conductive post on and insulated from the substrate.
Claim 20
Dependent Claim
38 words
A device as in claim 19, wherein: the post defines a portion of a boundary of a well into and out of which the portion of the member moves as it deflects toward and away from the substrate.
Claim 21
Dependent Claim
40 words
A device as in claim 19 or claim 20, wherein: the member and the mounting member are electrically conductive, the post being electrically continuous with the member via the mounting member, and the post is electrically insulated from the substrate.
Claim 22
Dependent Claim
19 words
A device as in claim 21, wherein: the post is electrically insulated by an insulative spacer on the substrate.
Claim 23
Dependent Claim
39 words
A device as in claim 22, wherein: the insulative spacer defines a portion of a boundary of a well into and out of which the portion of the member moves as it deflects toward and away from the substrate.
Claim 24
Dependent Claim
15 words
A device as in claim 22 or claim 23, wherein: the spacer is a photoresist.
Claim 25
Independent Claim
36 words
A device as in any preceding claim, wherein: the selective deflecting means deflects the portion of the member with respect to time, the frequency of such deflection being independent of the frequency of the input signal.
Claim 26
Dependent Claim
21 words
A device as in claim 25, wherein: the frequency of the deflection is smaller than the frequency of the input signal.
Claim 27
Independent Claim
42 words
A device as set in any of claims 1 to 24, wherein: the selective deflecting means deflects the portion of the member with respect to time, the frequency of such deflection being substantially the same as the frequency of the input signal.
Claim 28
Dependent Claim
16 words
A device as in claim 27, wherein: the selective deflecting means is the input signal-applying means.
Claim 29
Independent Claim
49 words
A device of any preceding claim, wherein the portion of the member acting as the plates of the capacitor comprise: an electrically conductive region spaced from a portion of the member, the region and the portion of the member acting as the respective plates of a parallel plate capacitor,
Claim 30
Dependent Claim
34 words
A device as in claim 29, wherein: the control electrode and the electrically conductive region include: respective interdigitated segments all of which are generally aligned with the portion of the member as it deflects.
Claim 31
Dependent Claim
18 words
A device as in claim 30, wherein: the segments are insulated from each other and from the substrate.
Claim 32
Independent Claim
23 words
A device as in any preceding claim, wherein: deflection of the portion of the member comprises rotation of the member about an axis.
Claim 33
Dependent Claim
15 words
A device as in claim 32, wherein: the axis is symmetric relative to the member.
Claim 34
Independent Claim
27 words
A device as in any preceding claim, wherein: the member moves in a piston-like fashion as the portion thereof is deflected toward and away from the substrate.
Claim 35
Independent Claim
55 words
A device as in any preceding claim, which further comprises: means for applying a control signal between the substrate region and the member, and the input-signal-applying means includes a conductive input path and a conductive output path both electrically continuous with the member so that the input signal passes through the portion of the member.
Claim 36
Dependent Claim
25 words
A device as in claim 35, wherein: the control-signal-applying means comprises the substrate region, and one of the conductive paths electrically continuous with the member.
Claim 37
Dependent Claim
12 words
A device as in claim 36, wherein: the substrate region is grounded.
Claim 38
Dependent Claim
41 words
A device as in claim 9 or any of claims 10 to 37, when dependant on claim 9, which further comprises: an electrically insulative dielectric layer on the substrate for supporting the control electrode on, and insulating it from, the substrate.
Claim 39
Dependent Claim
99 words
A device as in claim 38, which further comprises: means for applying the control signal between the control electrode and the member, and the input-signal-applying means includes a conductive input path electrically continuous with the member and a conductive output path spaced from the member along the direction of deflection of the portion of the member, the output path being supported on and insulated from the substrate so that the input signal is applied by the portion of the member, acting as one plate of the capacitor, to the output path acting as the other plate of the capacitor.
Claim 40
Independent Claim
25 words
A device as in any preceding claim, wherein: the substrate comprises a material selected from the group consisting of semiconductors, ceramics, aluminas, diamond and quartz.
Claim 41
Dependent Claim
39 words
A device as in claim 38 or claim 39, wherein: the substrate is a semiconductor, and the dielectric layer is made of a material selected from the group consisting of an insulative oxide, an insulative nitride and a polymer.
Claim 42
Dependent Claim
30 words
A device as in claim 41, wherein: the insulative oxide is a silicon oxide, the insulative nitride is a silicon nitride, and the polymer is an epoxy or an acrylate.
Claim 43
Dependent Claim
14 words
A device as in claim 40, wherein the semiconductor is silicon or gallium arsenide.
Claim 44
Independent Claim
52 words
A device as in any preceding claim, wherein: selected characteristics of the mounting member are alterable so that the movement of the portion of the member and, hence, the capacitance of the capacitor, both of which are effected by the application of a selected control signal to the control electrode, are adjustable.
Claim 45
Dependent Claim
24 words
A device as in claim 44, wherein: characteristic-alteration of the mounting member is achievable by selective removal of a portion of the mounting member.
Claim 46
Dependent Claim
23 words
A device as in claim 45, wherein: selective material removal is achievable by selective application of concentrated radiant energy to the mounting member.
Claim 47
Dependent Claim
28 words
A device as in claim 9 or any of claims 10 to 46, when dependant on claim 9, wherein: the control electrode is a section of the substrate.
Claim 48
Dependent Claim
19 words
A transmission line which includes one or more devices according to any preceding claim for varying the impedance thereof.
Claim 49
Dependent Claim
13 words
A transmission line as in claim 48 of the variable impedance, microstrip type.
Claim 50
Dependent Claim
20 words
An impedance matching network which includes one or more devices according to any preceding claim for varying the impedance thereof.
Claim 51
Dependent Claim
19 words
A filter network which includes one or more devices according to any preceding claim for varying the impedance thereof.
Claim 52
Dependent Claim
22 words
An antenna which includes one or more devices according to any preceding claim for varying the impedance and the frequency characteristics thereof.
Claim 53
Dependent Claim
20 words
A coupler which includes one or more of the device according to any preceding claim for varying the impedance thereof
Claim 54
Dependent Claim
25 words
A waveguide having at least one surface which comprises one or more of the devcies according to any preceding claim for varying the impedance thereof.
Claim 55
Dependent Claim
20 words
A FIN line including one or more of the devices according to any preceding claim for varying the impedance thereof.
Claim 56
Dependent Claim
148 words
A microminiature, monolithic device for affecting an electrical input signal in response to a control signal, which comprises: a substrate, a movable member which in a first normal position affects the input signal in a first mode and which affects the input signal in a second mode when not in the first position, means for mounting the member at a location spaced from the substrate for movement of the member toward and away from the substrate and for storing energy when the member moves out of the first position, the stored energy biasing the member toward the first position, means for applying the input signal to the device, means for selectively applying a control signal to the member, and means responsive to the control signal for selectively moving the member out of the normal position to selectively alter the mode in which the member affects the input signal.
Claim 57
Dependent Claim
39 words
A device as in claim 56, wherein: the member is electrically conductive and the application of the control signal thereto produces an electrostatic field acting thereon which moves the member out of the first position relative to the substrate.
Claim 58
Dependent Claim
49 words
A variable electrical capacitor which includes a device as in claim 57, wherein: the member is one plate of the capacitor, movement of the member by the electrostatic field altering the capacitance of the capacitor, and the input signal and the control signal are both applied to the member.
Claim 59
Dependent Claim
24 words
A capacitor as in claim 58, wherein: the path taken by the input signal is in parallel with the alterable capacitance of the capacitor.
Claim 60
Dependent Claim
23 words
A capacitor as in claim 58, wherein: the path taken by the input signal in series with the alterable capacitance of the capacitor.
Claim 61
Independent Claim
20 words
A device as in any of claims 57 to 60, wherein: the electrostatic field moves the member toward the substrate.
Claim 62
Dependent Claim
63 words
A waveguide which includes the device of claim 56, wherein: the movable member forms a coplanar portion of the interior surface of the waveguide in the first position, movement of the member out of the first position being away from the wall to effectively decrease the cross-section of the waveguide along a line generally parallel to the line of movement of the member.
Claim 63
Dependent Claim
34 words
A variable capacitor which includes a device as in any of claims 56 to 61, wherein: the member is one plate of the capacitor, movement of the member altering the capacitance of the capacitor.
References Cited (Backward Citations)
No citation records indexed.
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