Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
26 words
A gripper for holding semiconductor or other wafers, including: a finger (40); and characterised in that: the finger (40) is mounted within a flexible supporting diaphragm.
Claim 2
Dependent Claim
24 words
A gripper according to claim 1, and further characterised by an actuator means (50, 51) for selectively moving the finger (40) by angular deflection.
Claim 3
Dependent Claim
30 words
A gripper according to claim 2, and further characterised in that the actuator means comprises: an annular ring (50) and at least one actuator (51) for moving the annular ring
Claim 4
Dependent Claim
19 words
A gripper according to claim 1, and further characterised by a seal (43) which seals the flexible supporting diaphragm.
Claim 5
Dependent Claim
18 words
A gripper according to claim 1, and further characterised by a ring (44) used in mounting the gripper.
Claim 6
Dependent Claim
18 words
A gripper according to claim 1, and further characterised by a flange (43) used in mounting the gripper.
Claim 7
Dependent Claim
13 words
Wafer processing apparatus including at least one gripper according to any preceding claim.
Claim 8
Dependent Claim
38 words
Wafer processing apparatus comprising a stationary frame, at least one processing base and a complementary processing head mounted to the frame for movement relative to one another, and gripper means for selectively engaging the edges of a wafer.
Claim 9
Dependent Claim
53 words
Wafer processing apparatus including at least one gripper according to claim 1, characterised in that the gripper is coupled to actuator means for moving the gripper between engaged and disengaged positions, the actuator means comprising an annular ring coaxially positioned about the reference axis engageable with lever means connected to the gripper finger.
Claim 10
Dependent Claim
24 words
Apparatus according to claim 9, characterised by yieldable biasing means operably connected to the finger for normally urging the finger to its closed position.
Claim 11
Dependent Claim
32 words
Wafer processing apparatus having a plurality of grippers according to claim 1, characterised in that the grippers are movable between open and closed positions in response to movement of common actuator means.