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EP0599388B1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Semiconductor device provided with a programmable element

Assignee: Koninklijke Philips NV
•
Filing: 1993-11-16
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Granted: 2000-08-02
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Expires: 2013-11-16
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Abstract

No abstract record available.

Inventors

  • 👤 Jan Willem Slotboom
  • 👤 Pierre Hermanus Woerlee
  • 👤 Reinout Woltjer

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-09 09:51
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/491; G; G11; G11C; G11C17/00; G11C17/14; G11C17/16

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 180 words
A semiconductor device with a programmable element comprising a doped semiconductor region (4) and a conductor region (6) which are separated from one another by at least a portion of an insulating layer (5), said insulating layer having a thickness such that, during programming, breakdown may occur in the insulating layer upon applying a voltage between the conductor region (6) and the semiconductor region (4), the conductor region (6) comprising a material which is suitable for forming a rectifying junction with the material of the semiconductor region (4), the programmable element further comprising a contact region (3) which forms an ohmic contact with the semiconductor region (4) and which has a comparatively low electrical resistivity compared therewith, characterized in that the contact region (3) is provided at a side of the semiconductor region (4) remote from the insulating layer (5) and is separated from the insulating layer (5) by the semiconductor region (4), and in that both the semiconductor region (4) and the contact region (3) are together laterally bounded by a dielectric isolation region (7) at mutually opposing sides.
Claim 2
Dependent Claim 37 words
A semiconductor device as claimed in Claim 1, characterized in that the isolation region comprises a groove which bounds the semiconductor region and the contact region laterally and which is coated with at least an insulating layer.
Claim 3
Dependent Claim 20 words
A semiconductor device as claimed in Claim 2, characterized in that the groove is filled up with a suitable filler.
Claim 4
Dependent Claim 66 words
A semiconductor device as claimed in any one of the Claims 1 to 3, characterized in that both the semiconductor region and the contact region form part of a first strip-shaped conductor track which is laterally bounded by the isolation region and in that the conductor region forms part of a second strip-shaped conductor track which extends transverse to the direction of the first conductor track.
Claim 5
Dependent Claim 46 words
A semiconductor device as claimed in Claim 4, characterized in that the first conductor track is formed by a first semiconductor track of a first conductivity type, and in that the contact region comprises a comparatively heavily doped buried semiconductor zone of the first conductivity type.
Claim 6
Dependent Claim 34 words
A semiconductor device as claimed in Claim 5, characterized in that the second conductor track comprises a second semiconductor track of a second, opposite conductivity type which is provided over the first semiconductor track.
Claim 7
Dependent Claim 32 words
A semiconductor device as claimed in Claim 5, characterized in that the second conductor track comprises a material which is suitable for forming a rectifying Schottky junction with the first conductor track.
Claim 8
Dependent Claim 73 words
A semiconductor device as claimed in Claim 5, 6 or 7, characterized in that the first semiconductor track is situated on a semiconductor substrate, in that the first conductor track forms a pn junction at least with a surface region of the semiconductor substrate, which pn junction is reverse biased during operation, and in that the isolating region which laterally bounds the first semiconductor track extends at least up to the surface region.
Claim 9
Dependent Claim 59 words
A semiconductor device as claimed in any one of the Claims 4 to 7, characterized in that the first conductor track is provided on a dielectric intermediate layer which separates the first conductor track from a subjacent semiconductor substrate, and in that the isolating region which laterally bounds the first conductor track extends down to the dielectric intermediate layer.
Claim 10
Dependent Claim 66 words
A semiconductor device as claimed in Claim 9, characterized in that the first conductor track is formed by a composite layer comprising a bottom layer containing metal which bottom layer adjoins the dielectric intermediate layer and of which the contact region forms part, and comprising a top layer of semiconductor material which top layer adjoins the insulating layer and of which the semiconductor region forms part.
Claim 11
Dependent Claim 102 words
A semiconductor device provided with a matrix of memory cells which each comprise a programmable element as claimed in any one of the preceding Claims, characterized in that the matrix is composed of a number (n) of parallel first conductor tracks which extend in a first direction and by a number (m) of parallel second conductor tracks which extend in a second direction transverse to the first direction, in that the first conductor tracks are laterally bounded by strip-shaped isolating regions, and in that the first conductor tracks and the second conductor tracks are separated from one another by the insulating layer.
Claim 12
Dependent Claim 43 words
A semiconductor device as claimed in Claim 11, characterized in that the matrix is separated from a subjacent semiconductor body by a dielectric intermediate layer, and in that at least a semiconductor switching element is provided below the matrix in the semiconductor body.
Claim 13
Dependent Claim 45 words
A semiconductor device as claimed in Claim 12, characterized in that the dielectric intermediate layer is locally provided with an opening and in that a main electrode of the semiconductor switching element and a conductor track of the matrix are electrically interconnected through said opening.

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