EP0596537A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Micro-environment load lock and method for coupling a micro-environment container to a process chamber
Assignee: Applied Materials Inc
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Filing: 1993-11-08
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Granted: —
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Expires: 2013-11-08
Abstract
Abstract A micro-environment load lock for coupling a container (10) containing a stack of semiconductor wafers directly to a wafer processing chamber (26) includes a load lock chamber (25) in communication with at least one wafer processing tool. The load lock also includes a seal operable to accept and sealably couple the container (10) to the load lock chamber (26) such that the container (10) becomes an extension of the load lock chamber (26), and provides a base that is selectably operable to open and close the container (10) and to selectably draw a cassette (18) of wafers from the container (10) through a port (27) in communication with the load lock chamber (25) and into the load lock chamber (25). The container (10) is preferably a standard mechanical interface (SMIF) box. The base is also operable to seal the port (27) in the absence of a container (10). A single robot (30) is provided in conjunction with the load lock chamber (25) for moving one wafer at a time between the cassette (18) of wafers and the process chamber (26).
Inventors
- 👤 Gordon P. Krueger
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-03 19:30
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3408; H10P72/3406
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
150 words
A micro-environment load lock for coupling a micro-environment container (10) directly to a process chamber (26), comprising a load lock chamber (25) in direct communication with at least one process chamber (26); a port (27) in communication with said load lock chamber (25); a seal operable to accept and sealably couple said micro-environment container (10) to said load lock chamber (25) such that said micro-environment container (10), when opened, has an interior volume which is a sealed extension of said load lock chamber (25), and has an exterior surface which remains exposed to the ambient; and a base (29) selectably operable to open and close said micro-environment container (10) and to selectably draw a cassette (18) of wafers (15) from said micro-environment container (10) through said port (27) and into said load lock chamber (25), and operable to seal said port (27) in the absence of said micro-environment container (10).
Claim 2
Dependent Claim
150 words
A micro-environment load lock for coupling a micro-environment container (10) directly to a process chamber (26), comprising a load lock chamber (25) in direct communication with at least one process chamber (26); a port (27) in communication with said load lock chamber (25); a seal operable to accept and sealably couple said micro-environment container (10) to said load lock chamber (25) such that said micro-environment container (10), when opened, has an interior volume which is a sealed extension of said load lock chamber (25), and has an exterior surface which remains exposed to the ambient; and a base (29) selectably operable to open and close said micro-environment container (10) and to selectably draw a cassette (18) of wafers (15) from said micro-environment container (10) through said port (27) and into said load lock chamber (25), and operable to seal said port (27) in the absence of said micro-environment container (10).
Claim 3
Dependent Claim
32 words
The load lock of claim 1, further comprising; a single robot (30) for moving one wafer (15) at a time between said cassette (18) of wafers (15) and said process chamber (26).
Claim 4
Dependent Claim
47 words
The load lock of claim 1 or 2, further comprising: a lift indexer for coordinating operation of said base (29) and said robot (30) to effect transfer of said one wafer (15) at a time between said cassette (18) of wafers (15) and said process chamber (26).
Claim 5
Dependent Claim
18 words
The load lock of one of the preceding claims, wherein said micro-environment container (10) is a SMIF-type box.
Claim 6
Dependent Claim
39 words
The load lock of one of the preceding claims, wherein said base (29) is operable to apply a pressure differential to said micro-environment container (10) for drawing said cassette (18) of wafers (15) into said load lock chamber (25).
Claim 7
Dependent Claim
47 words
The load lock of one of the preceding claims, wherein said container (10) and said load lock chamber (25) comprise a single variable volume equal to a minimum volume necessary to accommodate that portion of said wafer cassette (18) corresponding to a wafer location currently being processed.
Claim 8
Dependent Claim
60 words
A process for coupling a micro-environment container directly to a process chamber, comprising the steps of accepting and sealably coupling said micro-environment container to a load lock chamber such that an interior volume of said micro-environment container becomes an extension of said load lock chamber, and such that an exterior surface of said micro-environment chamber remains exposed to the ambient.
Claim 9
Dependent Claim
60 words
A process for coupling a micro-environment container directly to a process chamber, comprising the steps of accepting and sealably coupling said micro-environment container to a load lock chamber such that an interior volume of said micro-environment container becomes an extension of said load lock chamber, and such that an exterior surface of said micro-environment chamber remains exposed to the ambient.
Claim 10
Dependent Claim
17 words
The process of claim 7, further comprising the step of selectably opening and closing said micro-environment container.
Claim 11
Dependent Claim
33 words
The process of one of claims 7 or 8, further comprising the step of selectably drawing a cassette of wafers from said micro-environment container through a port and into said load lock chamber.
Claim 12
Dependent Claim
36 words
The process of one of claims 7 to 9, further comprising the step of moving one wafer at a time, through the action of a single robot, between said cassette of wafers and said process chamber.
Claim 13
Dependent Claim
25 words
The process of one of claims 7 to 10, further comprising the step of alternatively sealing said port in the absence of said micro-environment container.
Claim 14
Dependent Claim
43 words
The process of one of claims 10 or 11, further comprising the step of coordinating said wafer drawing step with said wafer moving step to effect transfer of said one wafer at a time between said cassette of wafers and said process chamber.
Claim 15
Dependent Claim
17 words
The process of one of claims 7 to 12, wherein said micro-environment container is a SMIF-type box.
Claim 16
Dependent Claim
36 words
The process of one of claims 9 to 13, wherein drawing said cassette of wafers into said load lock chamber further comprises the step of applying a pressure differential at a base of said micro-environment container.
Claim 17
Dependent Claim
55 words
The process of one of claims 9 to 14, wherein, by drawing said cassette of wafers into said load lock chamber, said carrier and said load lock chamber comprise a single variable volume equal to a minimum volume necessary to accommodate that portion of said wafer cassette corresponding to a wafer location currently being processed.
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