Device for the supply of CVD-deposition-equipment

Claim 1

A device for the supply of at least one CVD coating device with coating gas, with at least one storage tank for the coating material and a pipeline system between storage tank and coating device, mass flow regulators and/or valves and an intermediate tank being arranged in the pipeline system, which tank serves for receiving the gaseous coating material, characterised in that the intermediate tank is an intermediate reservoir (9), the volume of which is adapted to a predetermined maximum pressure change in the intermediate reservoir (9) when the gaseous mass needed for a coating is drawn off, the intermediate reservoir (9) having a volume V z with 0.1V < V z < 10V, where V = M/P z . (Δp/p) z *) M = total mass flow of the coating gas in mbar . l/sec (Δp/p) z * = predetermined relative pressure change per sec in the intermediate reservoir p z = pressure in the intermediate reservoir in mbar with p z > process pressure in the coating device.

Claim 4

A device as claimed in claims 1 to 3, characterised in that the intermediate reservoir (9) has a level gauge (17), which is electrically connected by way of the control device (16) to a valve or mass flow regulator (8) arranged in the pipeline (7) between storage tanks (1, 2) and intermediate reservoir (9).

Claim 5

A device as claimed in claims 2 or 3, characterised in that the pressure gauge (14) and the temperature sensor (15) are electrically connected to a control device (20), which is connected to the coating device (12, 13) and which controls the duration of coating or the mass flow of the coating gases.

Claim 6

A device as claimed in one of claims 1 to 5 characterised in that at least two storage tanks (1, 2) for a coating material are connected to the intermediate reservoir (9).

Claim 7

A device as claimed in claims 1 to 6, characterised in that each storage tank (1, 2) is connected by way of a valve (5, 6) to a main line (7) leading to the intermediate reservoir (9), in which line the mass flow regulator (8) is arranged.

Claim 8

A device as claimed in one of claims 1 to 7, characterised in that each storage tank (1, 2) has level sensors (22, 23) for the liquid level and temperature sensors (24, 25), which are connected to a control device (26), which controls a temperature control device (18).

Claim 9

A device as claimed in one of claims 1 to 8, characterised in that the intermediate reservoir (9) is connected to a gas recovery station (30).

Claim 11

A device as claimed in one of claims 1 to 8, characterised in that the pipeline (3, 4, 7) arranged between storage tanks (1, 2) and intermediate reservoir (9) is connected by way of a valve (33) to a gas recovery station (30).