EP0591675A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Device for avoiding arcing in vacuum sputtering apparatuses
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1993-08-27
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Granted: —
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Expires: 2013-08-27
Abstract
Abstract The invention relates to a device for preventing arcing in vacuum sputtering apparatuses. This device contains a pulse generator (12) which moves the cathode (5) of the sputtering apparatus to predetermined distances away from positive potential, as a result of which a discharge takes place from layers on a target (7). This discharge prevents high voltages building up, which can lead to arcing.
Inventors
- 👤 Johann Stürmer
- 👤 Michael Dr. Lübbehusen
- 👤 Gernot Dipl.-Ing. Thorn
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 14:17
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J2237/00; H01J2237/02; H01J2237/0203; H01J2237/0206
Claims Analysis
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References Cited (Backward Citations)
US5015493A
Cited
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