Patent EP0570855A2 successfully refreshed from Google Patents.
EP0570855A2
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EP
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Method for producing multilayered ceramic substrate
Assignee: Panasonic Holdings Corp
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Filing: 1993-05-14
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Granted: —
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Expires: 2013-05-14
Abstract
Abstract There is provided a method for producing a multilayered ceramic substrate comprising steps of: forming at least two green sheets each comprising a low-temperature firing glass-ceramic substrate material, forming an electrode pattern and a via hole electrode on and through each green sheet with a conductor paste, laminating said green sheets to obtain a laminate, forming a pair of green sheet which comprises an inorganic material which is not sintered at a firing temperature of the green sheet of the low-temperature firing glass-ceramic substrate material or lower, and then forming a hole through the inorganic material green sheet, laminating the inorganic material green sheet on the outermost green sheet of the laminate to obtain a resultant laminate in which the hole is positioned over a portion of the electrode pattern of an outermost low-temperature firing glass-ceramic green sheets of the laminate, firing said resultant laminate at the firing temperature, and removing the unsintered inorganic material.
Inventors
- 👤 Yasuhiko Hakotani
- 👤 Seiichi Nakatani
- 👤 Tsuneharu Katada
- 👤 Satoru Yuhaku
- 👤 Kazuhiro Miura
- 👤 Yoshifumi Nakamura
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 13:15
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/67; H10W70/68; H10W70/685; H10W70/01; H10W70/05; H10W70/62; H10W70/66; H10W70/666
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
232 words
A method for producing a multilayered ceramic substrate comprising steps of: forming at least two green sheets each of which comprises a low-temperature firing glass-ceramic substrate material, an organic binder and a plasticizer, forming at least one of an electrode pattern and a via electrode on and through each of said green sheets with a conductor paste composition, laminating said green sheets to obtain a laminate to have a predetermined wiring structure of the substrate, forming at least one green sheet which comprises an inorganic material which is not sintered at a firing temperature of the green sheet of the low-temperature firing glass-ceramic substrate material or lower, and then forming at least one hole through the green sheet comprising the inorganic material so that the hole is positioned over a portion of at least one of the electrode pattern and the via electrode of one of outermost low-temperature firing glass-ceramic green sheets of the laminate when the inorganic material green sheet is to be laminated on the laminate, laminating said inorganic material green sheet having the hole on one of the outermost low-temperature firing glass-ceramic green sheets to obtain a resultant laminate comprising the inorganic material green sheet with the hole, firing said resultant laminate comprising the inorganic material green sheet with the hole at the firing temperature of the glass-ceramic material, and removing the unsintered inorganic material from the fired laminate.
Claim 2
Dependent Claim
54 words
The method according to claim 1 wherein a pair of the green sheets each comprising the inorganic material and having the hole are laminated on both of the outermost low-temperature firing glass-ceramic green sheets of the laminate so that the laminate is sandwiched by the pair of the green sheets comprising the inorganic material.
Claim 3
Dependent Claim
25 words
The method according to claim 1 wherein the hole in the green sheet comprising the inorganic material has a diameter of 0.1 to 5 mm.
Claim 4
Dependent Claim
19 words
The method according to claim 1 wherein the firing temperature is in a range of 800 to 1000 °C.
Claim 5
Dependent Claim
39 words
The method according to claim 1 wherein the green sheet comprising the inorganic material which is not sintered at the firing temperature comprises at least one selected from a group consisting of Al₂O₃, MgO, ZrO₂, TiO₂, BeO and BN.
Claim 6
Dependent Claim
28 words
The method according to claim 1 wherein the conductor paste composition comprises, as a main component, one selected from a group consisting of Ag, Ag/Pd, Ag/Pt and Cu.
Claim 7
Independent Claim
269 words
A method for producing a low-temperature firing multilayered glass-ceramic substrate comprising steps of: forming at least two green sheets each of which comprises a low-temperature firing glass-ceramic substrate material, an organic binder and a plasticizer, forming at least one of an electrode pattern and a via electrode with a conductor paste composition comprising cupric oxide as a main component on and through each of said green sheets, laminating said green sheets to obtain a laminate to have a predetermined wiring structure of the substrate, forming at least one green sheet which comprises an inorganic material which is not sintered at a firing temperature of the green sheet of the low-temperature firing glass-ceramic substrate material or lower, and then forming at least one hole through the green sheet comprising the inorganic material so that the hole is positioned over a portion of at least one of the electrode pattern and the via electrode of one of outermost low-temperature firing glass-ceramic green sheets of the laminate when the inorganic material green sheet is to be laminated on the laminate, laminating said inorganic material green sheet having the hole on one of the outermost low-temperature firing glass-ceramic green sheets of the laminate to have a resultant laminate, heating the resultant laminate in an oxidizing atmosphere at a temperature at which the organic binder of the laminate and an organic component of the conductor paste composition are decomposed and burnt off, and then the heated laminate is subject to a reduction treatment under a reducing atmosphere, firing the laminate under an inert atmosphere, and removing the unsintered inorganic material from the fired laminate.
Claim 8
Dependent Claim
25 words
The method according to claim 7 wherein the hole in the green sheet comprising the inorganic material has a diameter of 0.1 to 5 mm.
Claim 9
Dependent Claim
39 words
The method according to claim 7 wherein a top layer wiring pattern is formed on the substrate with a Cu paste composition after the firing step and the obtained substrate is fired in an atmosphere essentially consisting of nitrogen.
Claim 10
Dependent Claim
19 words
The method according to claim 7 wherein the firing temperature is in a range of 800 to 1000 °C.
Claim 11
Dependent Claim
39 words
The method according to claim 7 wherein the green sheet comprising the inorganic material which is not sintered at the firing temperature comprises at least one selected from a group consisting of Al₂O₃, MgO, ZrO₂, TiO₂, BeO and BN.
Claim 12
Independent Claim
201 words
A method for producing a multilayered ceramic substrate comprising steps of: forming at least two green sheets each of which comprises a low-temperature firing glass-ceramic substrate material, an organic binder and a plasticizer, forming at least one of an electrode pattern and a via electrode with a conductor paste composition on and through each of said green sheets, laminating said green sheets to obtain a laminate having a predetermined wiring structure of the substrate, forming at least one organic resin layer over at least a portion of at least one of the electrode pattern and the via electrode of one of outermost low-temperature firing glass-ceramic green sheets of the substrate which layer is decomposed and burnt off during a subsequent firing step of the laminate, forming at least one green sheet which comprises an inorganic material which is not sintered at a firing temperature of the green sheet of the low-temperature firing glass-ceramic substrate material or lower, laminating the green sheet comprising the inorganic material on the laminate having the organic resin layer to obtain a resultant laminate, firing the said resultant laminate having the green sheet comprising the inorganic material, and removing the unsintered inorganic material from the fired laminate.
Claim 13
Dependent Claim
55 words
The method according to claim 12 wherein a pair of the green sheets each comprising the inorganic material are laminated on both of the outermost low-temperature firing glass-ceramic green sheets each of which has the organic resin layer so that the laminate is sandwiched by the pair of the green sheets comprising the inorganic material.
Claim 14
Dependent Claim
19 words
The method according to claim 12 wherein the firing temperature is in a range of 800 to 1000 °C.
Claim 15
Dependent Claim
39 words
The method according to claim 12 wherein the green sheet comprising the inorganic material which is not sintered at the firing temperature comprises at least one selected from a group consisting of Al₂O₃, MgO, ZrO₂, TiO₂, BeO and BN.
Claim 16
Dependent Claim
28 words
The method according to claim 12 wherein the conductor paste composition comprises, as a main component, one selected from a group consisting of Ag, Ag/Pd, Ag/Pt and Cu.
Claim 17
Independent Claim
244 words
A method for producing a multilayered ceramic substrate comprising steps of: forming at least two green sheets each of which comprises a low-temperature firing glass-ceramic substrate material, an organic binder and a plasticizer, forming at least one of an electrode pattern and a via electrode with a conductor paste composition comprising cupric oxide as a main component on and through each of said green sheets, laminating said green sheets to obtain a laminate having a predetermined wiring structure of the substrate, forming at least one organic resin layer over at least a portion of at least one of the electrode pattern and the via electrode of one of outermost green sheet comprising the inorganic material of the substrate which layer is decomposed and burnt off during a subsequent heating step of the laminate, forming at least one green sheet which comprises an inorganic material which is not sintered at a firing temperature of the green sheet of the low-temperature firing glass-ceramic substrate material or lower, laminating the green sheet comprising the inorganic material on the laminate having the organic resin layer to obtain a resultant laminate, heating the resultant laminate in an oxidizing atmosphere at a temperature at which the organic binder of the laminate is also decomposed and burnt off, and then the heated laminate is subject to a reduction treatment under a reducing atmosphere, firing the reduced laminate under an inert atmosphere, and removing the unsintered inorganic material from the fired laminate.
Claim 18
Dependent Claim
39 words
The method according to claim 17 wherein a top layer wiring pattern is formed on the substrate with a Cu paste composition after the firing step and the obtained substrate is fired in an atmosphere essentially consisting of nitrogen.
Claim 19
Dependent Claim
19 words
The method according to claim 17 wherein the firing temperature is in a range of 800 to 1000 °C.
Claim 20
Dependent Claim
39 words
The method according to claim 17 wherein the green sheet comprising the inorganic material which is not sintered at the firing temperature comprises at least one selected from a group consisting of Al₂O₃, MgO, ZrO₂, TiO₂, BeO and BN.
Claim 21
Dependent Claim
22 words
The method according to claim 17 wherein the removal of the unsintered inorganic material is carried out using a ultrasonic cleaning method.
Claim 22
Dependent Claim
15 words
The method according to claim 17 wherein the substrate is fired while it is pressed.
References Cited (Backward Citations)
No citation records indexed.
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