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EP0567939A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Method of removing small particles from a surface

Assignee: Texas Instruments Inc
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Filing: 1993-04-22
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Granted: —
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Expires: 2013-04-22
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Abstract

Abstract A method of removing particles from a surface, comprising the steps of providing a surface 5 having particles thereon, placing the surface in a flowing polar solution 3 and causing light rays having a wavelength of from about 170 to about 2000 nanometers to impinge upon the particles. The surface of the polar solution and the light rays an be disposed in an inert ambient. The surface and the particles in the polar solution can be agitated. An electrode 7 can be provided external to the polar solution to provide a positive charge on the particles in the polar solution. There is also provided a method of removing particles from a surface, comprising the steps of providing a vessel 1 having a polar composition 3 flowing therein, placing a surface 5 having particles thereon in the flowing polar composition, providing an electrode 7 electrically insulated from the surface and providing a positive charge on the electrode. The electrode 7 can be disposed external to the vessel 1. The polar composition 3 is preferably clean water.

Inventors

  • 👤 Monte A. Douglas

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-09 02:39
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/15

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 46 words
A method of removing particles from a surface, comprising the steps of: (a) taking a surface having particles thereon; (b) placing said surface in a liquid; and (c) causing radiation having a wavelength of from about 170 to about 2000 nanometers to impinge upon said particles.
Claim 2
Dependent Claim 14 words
The method of claim 1, further comprising providing said liquid as a polar solution.
Claim 3
Dependent Claim 16 words
The method of claim 2, further comprising causing said polar solution to flow over said surface.
Claim 4
Dependent Claim 16 words
The method of claim 2 or claim 3, further comprising providing said polar solution as water.
Claim 5
Independent Claim 25 words
The method of any of claims 2 to 4, further including disposing the surface of said polar solution and said radiation in an inert ambient.
Claim 6
Independent Claim 24 words
The method of any of claims 2 to 5, further including the step of agitating said surface and said particles in said polar solution.
Claim 7
Independent Claim 34 words
The method of any of claims 2 to 6, further including the step of providing an electrode external to said polar solution to provide a positive charge on said particles in said polar solution.
Claim 8
Independent Claim 27 words
The method of any preceding claim, further comprising the step of: providing a vessel having the liquid flowing therein, into which the surface is placed in use.
Claim 9
Dependent Claim 15 words
The method of claim 8, further comprising providing said electrode disposed external to said vessel.

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