Patent EP0550058A2 successfully refreshed from Google Patents.
EP0550058A2
Expired / Lapsed
EP
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A programmable multizone gas injector for single-wafer semiconductor processing equipment
Assignee: Texas Instruments Inc
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Filing: 1992-12-29
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Granted: —
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Expires: 2012-12-29
Abstract
Abstract A programmable multizone fluids injector (10) for use in single-wafer semiconductor processing equipment including an injector having a plurality of orifices (22,26,30) therein which are divided into a number of separate zones or areas (34,38,42). These zones or areas are connected by means of appropriate passageways and conduits (36,40,44) to a source of process fluids. Each of the separate conduits has at least one flow control device located therein for independently controlling the amounts and ratios of process fluids flowing into each zone. The fluid control devices are responsive to input signals so that the fluid flow rates from the orifices can maintain a desired flow pattern within the process chamber to suit the individual needs of a particular fabrication process.
Inventors
- 👤 Mehrdad M. Moslehi
- 👤 Robert T. Matthews
- 👤 Cecil J. Davis
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 03:11
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45574; C23C16/45561; C23C16/45565; C23C16/52; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
82 words
A multi-zone gas injector for use in a semiconductor processing equipment comprising: a body member having a showerhead plate arranged to be located adjacent to said wafer, a plurality of orifices extending through said showerhead plate, and a plurality of passageways in said body member connected with orifices and having an inlet for each said passageway; and an inlet conduit connected with said body member for each said inlet and arranged to be connected to at least one source of process fluids.
Claim 2
Dependent Claim
34 words
The injector of claim 1 and also including adjustable flow control apparatus located in each said conduit for controlling the amount and distribution of said process fluids through said orifices and onto said wafer.
Claim 3
Dependent Claim
28 words
The injector of claim 1 wherein a first portion of said orifices is located in a generally annular pattern adjacent to an outer periphery of said showerhead plate.
Claim 4
Dependent Claim
24 words
The injector of claim 3 wherein a second portion of said orifices is located in a generally annular pattern adjacent to said first portion.
Claim 5
Dependent Claim
23 words
The injector of claim 4, wherein a third portion of said orifices is located in a generally circular pattern within said second portion.
Claim 6
Dependent Claim
101 words
The injector of claim 1 wherein the source of process fluids includes: at least one fluid mixing manifold; pressure control apparatus connected with said mixing manifold for maintaining a desired manifold pressure therein; at least one process fluid conduit connected to said mixing manifold for supplying a process fluid to said mixing manifold; a flow control device located in each process fluid conduit for controlling the mass flow of said process fluids into said mixing manifold; and an outlet conduit connected to said mixing manifold for delivering said process fluids to said plurality of inlet conduits connected to said body member.
Claim 7
Dependent Claim
101 words
The injector of claim 2 wherein the source of process fluids includes: at least one fluids mixing manifold; pressure control apparatus connected with said mixing manifold for maintaining a desired manifold pressure therein; at least one process fluids conduit connected to said mixing manifold for supplying a process fluids to said mixing manifold; a flow control device located in each process fluid conduit for controlling the mass flow of said process fluids into said mixing manifold; and an outlet conduit connected to said mixing manifold for delivering said process fluids to said plurality of inlet conduits connected to said body member.
Claim 8
Dependent Claim
45 words
The injector of claim 7 and also including: a gas manifold mixing manifold for each said inlet conduit; at least one process fluid conduit for each mixing manifold; and an outlet conduit for each mixing manifold for delivering said process fluids to said injector body.
Claim 9
Dependent Claim
96 words
The injector of claim 5 wherein the source of process fluids includes: a gas mixing manifold; pressure control apparatus connected with said mixing manifold for maintaining a desired manifold pressure therein; at least one process fluids conduit connected to said mixing manifold for supplying process fluids to said mixing manifold; a control device located in each process fluid conduit for controlling the mass flow of said process fluids into said mixing manifold; and an outlet conduit connected to said mixing manifold for delivering said process fluids to said plurality of conduits connected to said body member.
Claim 10
Dependent Claim
44 words
The injector of claim 9 and also including: a fluid mixing manifold for each said inlet conduit; at least one process fluid conduit for each mixing manifold; and an outlet conduit for each mixing manifold for delivering said process fluids to said injector body.
Claim 11
Dependent Claim
93 words
The injector of claim 9 wherein said pressure control apparatus includes: a pressure sensor in said mixing manifold for generating a signal indicative of the pressure in the mixing manifold; a controller for receiving said signal and comparing said signal to a desired pressure and transmitting an output control signal indicative of the desired pressure; pressure controlling apparatus connected with said mixing manifold; and a control valve located between said mixing manifold and pressure controlling apparatus, said valve being responsive to said output control signal to regulate the pressure in said mixing manifold.
Claim 12
Dependent Claim
150 words
A multizone fluids injector for use in single-wafer semiconductor processing equipment comprising: a body member having a showerhead plate arranged to be located adjacent to said wafer, a plurality of radially and circumferentially spaced orifices extending through said showerhead plate, a first passageway in said body member connected with a first portion of said orifices and having a first inlet, a second portion of said orifices and having a second inlet, and a third passageway in said body member connected with a third portion of said orifices and having a third inlet; a first conduit connected to said first inlet and arranged to be connected to a source of process fluids; a second conduit connected to said second inlet and arranged to be connected to said source of process fluids; and a third conduit connected to said third inlet and arranged to be connected to said source of process fluids.
Claim 13
Dependent Claim
42 words
The injector of claim 12 and also including first, second, and third adjustable flow control devices located in said first, second and third conduits, respectively for controlling the amounts and distribution of said process fluids through said orifices and onto said wafer.
Claim 14
Dependent Claim
28 words
The injector of claim 12 wherein the first portion of said orifices is located in a generally annular pattern adjacent to an outer periphery of said showerhead plate.
Claim 15
Dependent Claim
24 words
The injector of claim 14 wherein the second portion of said orifices is located in a generally annular pattern adjacent to said first portion.
Claim 16
Dependent Claim
23 words
The injector of claim 15 wherein the third portion of said orifices is located in a generally circular pattern within said second portion.
Claim 17
Dependent Claim
86 words
The injector of claim 12 wherein said source of process fluids includes: a fluid mixing manifold; pressure control apparatus connected with said mixing manifold for maintaining a desired pressure therein; a plurality of conduits connected to said mixing manifold for supplying process fluids to said mixing manifold; control valves for controlling the mass flow of said process fluids into said mixing manifold; and, an outlet conduit connected to said mixing manifold for delivering said process fluids to said plurality of conduits connected to said body member.
Claim 18
Dependent Claim
99 words
The injector of claim 13 wherein the source of process fluids includes: a fluid mixing manifold; pressure control apparatus connected with said mixing manifold for maintaining a desired pressure therein; at least one process fluids conduit connected to said mixing manifold for supplying process fluids to said mixing manifold; at least one flow control device located in each process fluid conduit for controlling the mass flow of said process fluids into said mixing manifold; and, an outlet conduit connected to said mixing manifold for delivering said process fluids to said plurality of inlet conduits connected to said body member.
Claim 19
Dependent Claim
44 words
The injector of claim 18 and also including: a fluid mixing manifold for each said inlet conduit; at least one process fluid conduit for each mixing manifold; and an outlet conduit for each mixing manifold for delivering said process fluids to said injector body.
Claim 20
Dependent Claim
98 words
The injector of claim 16 wherein said source of process fluids includes: a fluid mixing manifold; pressure control apparatus connected with said mixing manifold for maintaining a desired pressure therein; a plurality of process fluid conduits connected to said manifold mixing manifold for supplying process fluids to said mixing manifold; a control device for each said process fluid conduit for controlling the mass flow of said process fluids into said mixing manifold; and, an outlet conduit connected to said mixing manifold for delivering one of said process fluids to said plurality of conduits connected to said body member.
Claim 21
Dependent Claim
93 words
The injector of claim 17 wherein said pressure control apparatus includes: a pressure sensor in said mixing manifold for generating a signal indicative of the pressure in the mixing manifold; a controller for receiving said signal and comparing said signal to a desired pressure and transmitting an output control signal indicative of the desired pressure; pressure controlling apparatus connected with said mixing manifold; and a control valve located between said mixing manifold and pressure controlling apparatus, said valve being responsive to said output control signal to regulate the pressure in said mixing manifold.
References Cited (Backward Citations)
No citation records indexed.
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