Method for manufacturing polyimide multilayer wiring substrate

Claim 1

A method for manufacturing a polyimide multilayer wiring substrate, including the steps of: (1) forming a first layered structure consisting of one or more wiring layers and one or more polyimide layers as an interlayer insulating material on a first board, the surface of said first board being divided into an outer peripheral surface and an inner surface surrounded by the outer peripheral surface, wherein adhesiveness to polyimide of the former surface is made high, whereas that of the latter is made nearly zero, (2) forming on a second board a second layered structure consisting of one or more wiring layers and one or more polyimide layers as an interlayer insulating material, (3) aligning metal bumps, which are formed on the surface of the first layered structure and electrically connected to the wirings in the first layered structure, with metal bumps, which are formed on the surface of the second layered structure and electrically connected to the wirings in the second layered structure, pressing an adhesive layer formed on the surface of the first layered structure against an adhesive layer formed on the surface of the second layered structure and heating both the adhesive layers to bond said layers to each other, thereby establishing electric connection between the metal bumps on the first and second layered structures, (4) cutting off the outer peripheral portion of the first layered structure to remove the first board, and (5) forming viaholes in the polyimide layer having been exposed in the fourth step.

Claim 5

A method for manufacturing a polyimide multilayer wiring substrate, including the steps of: (1) forming a first layered structure, wherein an uppermost layer of polyimide multilayer wiring layers formed by stacking at least one wiring layer and at least one polyimide layer, as interlayer insulating material, on a board is made of polyimide resin, and a plurality of first metal electrodes are provided in said uppermost layer so as to make electric contact with said wiring layers, (2) forming a plurality of second layered structures, wherein an uppermost layer of polyimide multilayer wiring layers formed by stacking at least one wiring layer and at least one polyimide layer, as interlayer insulating material, on a flat hard board is an adhesive-agent layer, and a plurality of second metal electrodes are provided in said uppermost layer so as to make electric contact with said wiring layer, (3) superposing the uppermost layer of the first layered structure on the uppermost layer of one of said second layered structures, the first metal electrodes and the second metal electrodes being aligned with each other, thereafter pressing and heating both the structures to bond both the uppermost layers to each other, thereby joining said first and second metal electrodes to electrically connect said first and second layered structures, (4) partially removing said flat hard board of said second layered structure so as to leave behind a thin board on said structure, dissolving and removing said thin board with etching liquid to expose a polyimide layer, forming viaholes and metal electrodes in contact with internal wiring layer in said polyimide layer, and further superposing another second layered structure on said exposed layer in succession.