Patent US2770407A successfully refreshed from Google Patents.
Patent EP0542008A1 successfully refreshed from Google Patents.
EP0542008A1
Expired / Lapsed
EP
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Antihalation compositions
Assignee: Shipley Co Inc
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Filing: 1992-10-22
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Granted: —
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Expires: 2012-10-22
Abstract
Abstract Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
Inventors
- 👤 James W. Thackeray
- 👤 George W. Orsula
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 22:24
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091; G03F7/038; G03F7/26; G03F7/38
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
42 words
An antihalation composition capable of forming a coating layer wherein the coating layer is crosslinked with an overcoated photoresist layer, the antihalation composition comprising: a resin binder, and a crosslinker compound capable of causing a thermally-activated crosslinking reaction with the resin binder.
Claim 2
Dependent Claim
13 words
The composition of claim 1 wherein the resin binder is a phenolic binder.
Claim 3
Dependent Claim
13 words
The composition of claim 1 where the crosslinker compound is an amine-based material.
Claim 4
Dependent Claim
22 words
The composition of claim 1 further comprising a compound selected from the group consisting of an acid and an acid generator compound.
Claim 5
Dependent Claim
9 words
The composition of claim 1 comprising a silicon-containing material.
Claim 6
Dependent Claim
11 words
The composition of claim 1 further comprising a radiation absorbent dye.
Claim 7
Dependent Claim
12 words
The composition of claim 1 where the antihalation composition is essentially non-photoimageable.
Claim 8
Dependent Claim
63 words
A coated substrate, comprising: a substrate having thereon a coating layer of an antihalation composition, and a coating layer of a photoresist over the antihalation composition coating layer, the antireflective composition coating layer comprising a resin binder and a crosslinker compound capable of causing a thermal crosslinking reaction with the resin binder, the photoresist comprising a resin binder and a radiation sensitive component.
Claim 9
Dependent Claim
17 words
The substrate of claim 8 where the antihalation composition coating layer is at least partially thermally cured.
Claim 10
Dependent Claim
29 words
The substrate of claim 8 where at least a portion of the antihalation composition organic coating layer is crosslinked to at least a portion of the photoresist coating layer.
Claim 11
Independent Claim
85 words
A method for treating a substrate, comprising: (a) applying a layer of an antihalation composition on the substrate, the antihalation composition comprising a resin binder and a crosslinker compound capable of causing a thermally-activated crosslinking reaction with the resin binder; (b) at least partially curing the antihalation composition layer; (c) applying a layer of a photoresist composition over the antihalation composition, the photoresist composition comprising a resin binder and a radiation sensitive component; (d) exposing the photoresist composition; and (e) developing the exposed photoresist layer.
Claim 12
Dependent Claim
18 words
The method of claim 11 further comprising baking the exposed, resist coated substrate prior to said developing step.
Claim 13
Dependent Claim
41 words
The method of claim 11 where the antihalation composition layer is at least partially cured by heating the antihalation composition layer to a temperature sufficient to induce a crosslinking reaction between the resin binder and crosslinker compound of the antihalation composition.
Claim 14
Dependent Claim
21 words
The method of claim 12 where said baking crosslinks portions of the antihalation composition layer to portions of the photoresist layer.
Claim 15
Dependent Claim
26 words
The method of claim 11 where the antihalation composition further comprises a compound selected from the group consisting of an acid and an acid generator compound.
Claim 16
Dependent Claim
15 words
The method of claim 11 where the antihalation composition further comprisies a thermal acid generator.
Claim 17
Dependent Claim
30 words
The method of claim 11 where the crosslinker compound of the antihalation composition is an amine-based material selected from the group consisting of a benzoguanamine-based resin and a melamine-based resin.
References Cited (Backward Citations)
No citation records indexed.
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