Patent EP0535711A2 successfully refreshed from Google Patents.
EP0535711A2
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Method for producing multilayered ceramic substrate
Assignee: Panasonic Holdings Corp
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Filing: 1992-10-05
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Granted: —
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Expires: 2012-10-05
Abstract
Abstract A multilayered ceramic substrate which shrinks only in a thickness direction but does not shrink in a plane direction is produced by forming at least two green sheets each of which comprises a glass-ceramic low-temperature firing substrate material, an organic binder and a plasticizer, forming an electrode pattern with a conductor paste composition on each of the green sheets, laminating the green sheets having the electrode pattern to obtain a laminate, laminating a pair of green sheets each comprising an inorganic material which is not sintered at a sintering temperature of the green sheets of the low-temperature firing substrate material or lower on both surfaces of the laminate, sintering the laminate sandwiched by the green sheets comprising the inorganic material, and removing the unsintered inorganic material or impregnating the inorganic material layers with a resin and forming a top layer wiring pattern thereon.
Inventors
- 👤 Seiichi Nakatani
- 👤 Satoru Yuhaku
- 👤 Mikinari Shimada
- 👤 Yoshifumi Nakamura
- 👤 Kazuhiro Miura
- 👤 Hidenobu Nishikawa
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 04:45
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H05; H05K; H05K3/00; H05K3/46; H05K3/4611; H05K3/4626; H05K3/4629; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K1/09; H05K1/092; H05K2201/00; H05K2201/01; H05K2201/0104; H05K2201/0116; H05K2203/00; H05K2203/11; H05K2203/1147; H05K2203/30; H05K2203/308; H05K3/4688
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
115 words
A method for producing a multilayered ceramic substrate comprising steps of: forming at least two green sheets each of which comprises a glass-ceramic low-temperature firing substrate material, an organic binder and a plasticizer, forming an electrode pattern with a conductor paste composition on each of said green sheets laminating said green sheets having the electrode pattern to obtain a laminate, laminating a pair of green sheets each comprising an inorganic material which is not sintered at a sintering temperature of the green sheets of the low-temperature firing substrate material or lower on both surfaces of said laminate, sintering said laminate sandwiched by the green sheets comprising the inorganic material, and removing the unsintered inorganic material.
Claim 2
Independent Claim
115 words
A method for producing a multilayered ceramic substrate comprising steps of: forming at least two green sheets each of which comprises a glass-ceramic low-temperature firing substrate material, an organic binder and a plasticizer, forming an electrode pattern with a conductor paste composition on each of said green sheets laminating said green sheets having the electrode pattern to obtain a laminate, laminating a pair of green sheets each comprising an inorganic material which is not sintered at a sintering temperature of the green sheets of the low-temperature firing substrate material or lower on both surfaces of said laminate, sintering said laminate sandwiched by the green sheets comprising the inorganic material, and removing the unsintered inorganic material.
Claim 3
Dependent Claim
18 words
The method according to claim 1, wherein said laminated is sintered at a temperature of 800 to 1000°C.
Claim 4
Dependent Claim
36 words
The method according to claim 1, wherein said inorganic material is at least one compound selected from the group consisting of A1 2 0 3 , MgO, Zr0 2 , Ti0 2 , BeO and BN.
Claim 5
Dependent Claim
16 words
The method according to claim 1, wherein said unsintered inorganic material is removed by ultrasonic cleaning.
Claim 6
Dependent Claim
24 words
The method according to claim 1, wherein said conductor paste comprises a component selected from the group consisting of silver, silver-palladium, silver-platinum and copper.
Claim 7
Independent Claim
144 words
A method for producing a multilayered ceramic substrate comprising steps of: forming at least two green sheets each of which comprises a glass-ceramic low-temperature firing substrate material, an organic binder and a plasticizer, forming an electrode pattern with a conductor paste composition comprising cupric oxide on each of said green sheets, laminating said green sheets having the electrode pattern to obtain a laminate, laminating a pair of green sheets each comprising an inorganic material which is not sintered at a sintering temperature of the green sheets of the low-temperature firing substrate material or lower on both surfaces of said laminate, heating said laminate at a temperature at which said organic binder is decomposed and removed, reducing cupric oxide in an atmosphere of hydrogen or a mixture of hydrogen and nitrogen, sintering said reduced laminate in a nitrogen atmosphere, and removing the unsintered inorganic material.
Claim 8
Independent Claim
144 words
A method for producing a multilayered ceramic substrate comprising steps of: forming at least two green sheets each of which comprises a glass-ceramic low-temperature firing substrate material, an organic binder and a plasticizer, forming an electrode pattern with a conductor paste composition comprising cupric oxide on each of said green sheets, laminating said green sheets having the electrode pattern to obtain a laminate, laminating a pair of green sheets each comprising an inorganic material which is not sintered at a sintering temperature of the green sheets of the low-temperature firing substrate material or lower on both surfaces of said laminate, heating said laminate at a temperature at which said organic binder is decomposed and removed, reducing cupric oxide in an atmosphere of hydrogen or a mixture of hydrogen and nitrogen, sintering said reduced laminate in a nitrogen atmosphere, and removing the unsintered inorganic material.
Claim 9
Dependent Claim
35 words
The method according to claim 6, which further comprises, after the removal of said unsintered inorganic material, forming a top layer wiring pattern with a copper paste and sintering the laminate in a nitrogen atmosphere.
Claim 10
Dependent Claim
18 words
The method according to claim 6, wherein said laminated is sintered at a temperature of 800 to 1000°C.
Claim 11
Dependent Claim
36 words
The method according to claim 6, wherein said inorganic material is at least one compound selected from the group consisting of A1 2 0 3 , MgO, Zr0 2 , Ti0 2 , BeO and BN.
Claim 12
Dependent Claim
16 words
The method according to claim 6, wherein said unsintered inorganic material is removed by ultrasonic cleaning.
Claim 13
Independent Claim
140 words
A method for producing a multilayered ceramic substrate comprising steps of: forming at least two green sheets each of which comprises a glass-ceramic low-temperature firing substrate material, an organic binder and a plasticizer, forming an electrode pattern with a conductor paste composition on each of said green sheets laminating said green sheets having the electrode pattern to obtain a laminate, filling via holes with a conductor paste composition, laminating a pair of green sheets each comprising an inorganic material which is not sintered at a sintering temperature of the green sheets of the low-temperature firing substrate material or lower on both surfaces of said laminate, sintering said laminate sandwiched by the green sheets comprising the inorganic material, impregnating the inorganic material layers with a resin and forming a top layer wiring pattern on at least one surface of the laminate.
Claim 14
Independent Claim
140 words
A method for producing a multilayered ceramic substrate comprising steps of: forming at least two green sheets each of which comprises a glass-ceramic low-temperature firing substrate material, an organic binder and a plasticizer, forming an electrode pattern with a conductor paste composition on each of said green sheets laminating said green sheets having the electrode pattern to obtain a laminate, filling via holes with a conductor paste composition, laminating a pair of green sheets each comprising an inorganic material which is not sintered at a sintering temperature of the green sheets of the low-temperature firing substrate material or lower on both surfaces of said laminate, sintering said laminate sandwiched by the green sheets comprising the inorganic material, impregnating the inorganic material layers with a resin and forming a top layer wiring pattern on at least one surface of the laminate.
Claim 15
Dependent Claim
18 words
The method according to claim 11, wherein said laminated is sintered at a temperature of 800 to 1000°C.
Claim 16
Dependent Claim
36 words
The method according to claim 11, wherein said inorganic material is at least one compound selected from the group consisting of A1 2 0 3 , MgO, Zr0 2 , Ti0 2 , BeO and BN.
Claim 17
Dependent Claim
45 words
The method according to claim 11, wherein said resin for impregnating the inorganic material layers is at least one resin selected from the group consisting of an epoxy resin, a polyimide resin, a silicone resin, an acryl resin, a phenolic resin and a urethane resin.
Claim 18
Dependent Claim
24 words
The method according to claim 11, wherein said conductor paste comprises a component selected from the group consisting of silver, silver-palladium, silver-platinum and copper.
Claim 19
Dependent Claim
28 words
The method according to claim 11, wherein said top layer wiring pattern is formed by laminating a copper foil on the resin-impregnated layer and etching the copper foil.
Claim 20
Dependent Claim
28 words
The method according to claim 11, wherein said top layer wiring pattern is formed by plating the resin impregnated surface with copper and etching the plated copper layer.
Claim 21
Independent Claim
153 words
A method for producing a multilayered ceramic substrate comprising steps of: forming at least two green sheets each of which comprises a glass-ceramic low-temperature firing substrate material, an organic binder and a plasticizer, forming an electrode pattern with a conductor paste composition on each of said green sheets laminating said green sheets having the electrode pattern to obtain a laminate, filling cavities present on at least one surface of said laminate with an inorganic material powder which is not sintered at a sintering temperature of the green sheets of the low-temperature firing substrate material or lower under pressure, laminating a pair of green sheets each comprising an inorganic material which is not sintered at a sintering temperature of the green sheets of the low-temperature firing substrate material or lower on both surfaces of said laminate, sintering said laminate sandwiched by the green sheets comprising the inorganic material, and removing the unsintered inorganic material.
Claim 22
Independent Claim
153 words
A method for producing a multilayered ceramic substrate comprising steps of: forming at least two green sheets each of which comprises a glass-ceramic low-temperature firing substrate material, an organic binder and a plasticizer, forming an electrode pattern with a conductor paste composition on each of said green sheets laminating said green sheets having the electrode pattern to obtain a laminate, filling cavities present on at least one surface of said laminate with an inorganic material powder which is not sintered at a sintering temperature of the green sheets of the low-temperature firing substrate material or lower under pressure, laminating a pair of green sheets each comprising an inorganic material which is not sintered at a sintering temperature of the green sheets of the low-temperature firing substrate material or lower on both surfaces of said laminate, sintering said laminate sandwiched by the green sheets comprising the inorganic material, and removing the unsintered inorganic material.
Claim 23
Dependent Claim
18 words
The method according to claim 18, wherein said laminated is sintered at a temperature of 800 to 1000°C.
Claim 24
Dependent Claim
36 words
The method according to claim 18, wherein said inorganic material is at least one compound selected from the group consisting of A1 2 0 3 , MgO, Zr0 2 , Ti0 2 , BeO and BN.
Claim 25
Dependent Claim
16 words
The method according to claim 18, wherein said unsintered inorganic material is removed by ultrasonic cleaning.
Claim 26
Dependent Claim
24 words
The method according to claim 18, wherein said conductor paste comprises a component selected from the group consisting of silver, silver-palladium, silver-platinum and copper.
Claim 27
Dependent Claim
25 words
The method according to claim 18, wherein said cavities are filled with said inorganic material powder under pressure of 50 to 500 kg/cm 2 .
Claim 28
Independent Claim
49 words
A method for producing a multilayered ceramic substrate comprising steps of: forming layers of an inorganic material powder which is not sintered at a sintering temperature on both surfaces of a glass-ceramic laminate having cavities on its surfaces under pressure, sintering said laminate, and removing the unsintered inorganic material.
Claim 29
Independent Claim
49 words
A method for producing a multilayered ceramic substrate comprising steps of: forming layers of an inorganic material powder which is not sintered at a sintering temperature on both surfaces of a glass-ceramic laminate having cavities on its surfaces under pressure, sintering said laminate, and removing the unsintered inorganic material.
Claim 30
Dependent Claim
18 words
The method according to claim 24, wherein said laminated is sintered at a temperature of 800 to 1000°C.
Claim 31
Dependent Claim
36 words
The method according to claim 24, wherein said inorganic material is at least one compound selected from the group consisting of A1 2 0 3 , MgO, Zr0 2 , Ti0 2 , BeO and BN.
Claim 32
Dependent Claim
16 words
The method according to claim 24, wherein said unsintered inorganic material is removed by ultrasonic cleaning.
Claim 33
Dependent Claim
24 words
The method according to claim 24, wherein said conductor paste comprises a component selected from the group consisting of silver, silver-palladium, silver-platinum and copper.
Claim 34
Dependent Claim
25 words
The method according to claim 24, wherein said cavities are filled with said inorganic material powder under pressure of 50 to 500 kg/cm 2 .
References Cited (Backward Citations)
No citation records indexed.
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