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EP0534733A1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Multilayer ceramic structure and method of fabrication

Assignee: International Business Machines Corp
•
Filing: 1992-09-23
•
Granted: —
•
Expires: 2012-09-23
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Abstract

Abstract The present invention relates to a ceramic structure (2) and is characterised in that one of the layers (6) within the structure is formed from porous silicon dioxide. According to a preferred embodiment of the invention at least one electrical conductor (12, 26) extends adjacent to the surface of the silicon dioxide layer. The invention also relates to a method of fabricating a multilayer ceramic structure comprising the steps of providing a first layer of a first green precursor to a first dielectric material, forming a cavity in the first layer, disposing a body of selected material within the cavity, sealing the cavity with a second layer of a second green precursor to a second dielectric material, and sintering the multilayer structure to form a dense structure having the selected material in sintered form sealed therein. According to the invention the method is characterised in that the selected material is a precursor to porous silicon dioxide. According to a preferred embodiment the method of the invention includes the step of forming at least one electrical conductor adjacent to the body of selected material.

Inventors

  • 👤 Dudley Augustus Chance
  • 👤 David Brian Goland
  • 👤 Timothy Rea Dinger
  • 👤 Subhash Laxman Shinde

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-07 18:00
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/67; H10W70/69; H10W70/692; H10W72/00; H10W72/071; H10W72/072; H10W72/07251; H10W72/20; H10W90/00; H10W90/701; H10W90/721; H10W90/724

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 22 words
A multilayer ceramic structure (2) characterised in that one of the layers (6) within said structure is formed from porous silicon dioxide.
Claim 2
Dependent Claim 30 words
A ceramic structure as claimed in Claim 1 characterised in that at least one electrical conductor (12, 26) extends adjacent to the surface of said porous silicon dioxide layer (6).
Claim 3
Dependent Claim 28 words
A ceramic structure as claimed in either of the preceding claims characterised in that at least one electrical conductor (28) extends through said porous silicon dioxide layer (6).
Claim 4
Dependent Claim 38 words
A ceramic structure as claimed in any one of the preceding claims characterised in that at least one of said layers (80, 82, 84) is formed from a dielectric material which is an aggregate of randomly oriented crystallites.
Claim 5
Dependent Claim 19 words
A ceramic structure as claimed in Claim 4 characterised in that the interstices between said crystallites contain uncrystallised material.
Claim 6
Independent Claim 95 words
A method of fabricating a multilayer ceramic structure comprising the steps of providing a first layer (84) of a first green precursor to a first dielectric material, forming a cavity in said first layer, disposing a body (86) of selected material within said cavity, sealing said cavity with a second layer (80, 82) of a second green precursor to a second dielectric material, and sintering said multilayer structure to form a dense structure having said selected material in sintered form sealed therein, characterised in that said selected material is a precursor to porous silicon dioxide.
Claim 7
Dependent Claim 27 words
A method of fabricating a multilayer ceramic structure as claimed in Claim 6 characterised in that said first green precursor is an aggregate of randomly oriented crystallites.
Claim 8
Dependent Claim 30 words
A method of fabricating a multilayer ceramic structure as claimed in Claim 6 or Claim 7 characterised in that said second green precursor is an aggregate of randomly oriented crystallites.
Claim 9
Dependent Claim 23 words
A method as claimed in Claim 7 or Claim 8 characterised in that the interstices of said random oriented crystallites contain uncrystallised material.
Claim 10
Independent Claim 34 words
A method as claimed in any one of Claims 6, 7, 8 or 9 characterised by the step of forming at least one electrical conductor (12, 26) adjacent to said body of selected material.

References Cited (Backward Citations)

EP0196865A2 Cited
EP0202858A2 Cited
WO1989007834A1 Cited
EP0411639A2 Cited

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