Vibration eliminating apparatus for eliminating vibration of installation floor

Assignee: Ebara Corp

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Filing: 1992-05-20

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Granted: —

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Expires: 2012-05-20

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Abstract

Abstract A vibration eliminating apparatus for eliminating vibration by suspending a floor board from an installation floor. A supporting electromagnet is provided to the installation floor in order to suspend a magnetic member fixed to the floor board by a magnetic force. The magnetic member is provided with a thin magnetic pole through a non-magnetic member and a control electromagnet having a yoke located in the proximity to the thin magnetic pole is provided to control a horizontal position of the floor board. A vibration detector is provided to detect vibration of the floor board and a vibration monitor is used to decide whether vibration detected by the vibration detector is within an allowable range of a machine mounted on the floor board or not and output an operation enable signal only when vibration is within the allowable range.

Inventors

👤 Katsuhide C/O Ebara Research Co. Ltd. Watanabe
👤 Yoichi C/O Ebara Research Co. Ltd. Kanemitu
👤 Yukio C/O Ebara Corporation Ikeda

Bibliographic Details

Application Number —

Jurisdiction EP

Data Source google_patents

Last Synchronized 2026-10-31 13:04

CPC Classifications

F; F16; F16F; F16F15/00; F16F15/02; F16F15/03; G; G12; G12B; G12B5/00

Claims Analysis

Total Claims: 7

Claim 1

Independent Claim 59 words

A vibration eliminating apparatus comprising a magnetic member fixed to a first floor means, a supporting electromagnet fixed to a second floor means to suspend said magnetic member with a magnetic force, a magnetic pole disposed around said magnetic member through a non-magnetic member and a control electromagnet having a yoke located in the proximity to said magnetic member.

Claim 2

Dependent Claim 18 words

A vibration eliminating apparatus according to claim 1, wherein a machine is mounted on said first floor means.

Claim 3

Dependent Claim 43 words

A vibration eliminating apparatus according to claim 2, wherein said first floor means includes an acceleration sensor and said control electromagnet exerts a magnetic attracting force to said magnetic pole to cancel detected vibration in response to the output of said acceleration sensor.

Claim 4

Dependent Claim 18 words

A vibration eliminating apparatus according to claim 1, wherein a machine is mounted on said second floor means.

Claim 5

Dependent Claim 43 words

A vibration eliminating apparatus according to claim 4, wherein said second floor means includes an acceleration sensor and said control electromagnet exerts a magnetic attracting force to said magnetic pole to cancel detected vibration in response to the output of said acceleration sensor.

Claim 6

Dependent Claim 30 words

A vibration eliminating apparatus according to claim 1, wherein the yoke of said control electromagnet has a tapered end portion and is located in the proximity to said magnetic pole.

Claim 7

Dependent Claim 92 words

A vibration eliminating apparatus for suspending a floor board to eliminate vibration from an installation floor or a vibration generating force from a machine mounted on the floor board, comprising vibration detector means for detecting vibration of the floor board and a vibration monitor means for monitoring vibration detected by said vibration detector means to decide whether vibration is within an allowable range for the machine mounted on the floor board or not so as to output a machine operation enable signal only when the monitored vibration is within the allowable range.

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