Multigas excimer laser

Abstract

Abstract A multigas excimer laser having a discharge volume inside the supply vessel (9), which has a high efficiency for medium to high powers, prevents impurities and ensures a long life, in which, provided on the opposing electrode (5), there are a flow baffle sheet (4), a second metal sheet (11) and/or a strip (2) for guiding the gas flow over the electrodes (5, 6) through a cooler (10), a fan (1) and, if necessary, a laminator (3), so that the gas circulation is guided virtually in a circle. The flow baffle sheet (4) is a low-inductance connection to the capacitors (8). A pre-ionisation metal sheet (14) enables, with pre-ionisation pins (16) in the vicinity of the electrode (6), effective UV pre-ionisation and shading of the high-voltage insulator (15) against direct UV light, with a minimum distance between the electrode (6) and the flow baffle sheet (4). Special protection of the laser windows against impurities is achieved by means of electro-acoustic filters (12). <IMAGE>

Inventors

• 👤 Rustem Dr. Osmanow
• 👤 Gerhard Dr. Winkelmann
• 👤 Eberhard Dr. Linke

Bibliographic Details