EP0501751A1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Method of producing optical integrated circuit

Assignee: NEC Corp

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Filing: 1992-02-25

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Granted: —

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Expires: 2012-02-25

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Abstract

Abstract There is provided a method of producing efficiently custom IC optical integrated circuits with convenient connections between the optical devices with less loss of light and with different connections but similar configuration. The optical integrated circuit comprises a plurality of ridge-type active optical devices formed of a variable wavelength laser section (1), a light modulator (2) and a ridge-type passive Y-branching optical waveguide (4) for connecting the ridge-type active optical devices with each other or with output waveguides. The ridge sections of the ridge-type active optical device and the ridge-type passive optical waveguide are formed by the selective crystal growth.

Inventors

👤 Keiro C/O Nec Corporation Komatsu
👤 Tatsuya C/O Nec Corporation Sasaki
👤 Tomoaki C/O Nec Corporation Kato
👤 Ikuo C/O Nec Corporation Mito

Bibliographic Details

Application Number —

Jurisdiction EP

Data Source google_patents

Last Synchronized 2026-11-05 04:28

CPC Classifications

G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/125; G02B6/124; G02B6/13; H; H01; H01S; H01S5/00; H01S5/02; H01S5/026; H01S5/06; H01S5/062; H01S5/0625; H01S5/06255; H01S5/06256; H01S5/40; H01S5/4025; H01S5/4031; H01S5/0265; H01S5/20; H01S5/22; H01S5/227; H01S5/2272; H01S5/4068

Claims Analysis

Total Claims: 3

Claim 1

Independent Claim 68 words

A method of producing an optical integrated circuit comprising providing on a semiconductor substrate (101) a plurality of ridge-type active optical devices (1,2) and a ridge-type passive optical waveguide (4) for connecting the ridge-type active optical devices with each other and/or with output waveguides, characterised in that ridge sections (5,6,7,8) of the ridge-type active optical devices and the ridge-type passive optical waveguide are formed by selective crystal growth.

Claim 2

Independent Claim 102 words

A method of producing an optical integrated circuit comprising forming a ridge-type active optical device (1,2) on a semiconductor substrate (101), covering a portion of the substrate (3,502) opposite to the ridge-type active optical device with a semiconductor layer including at least an optical guiding layer (109) and a cladding layer (110), forming a dielectric mask pattern on the semiconductor layer and providing a ridge-type passive optical waveguide (4) for connecting the ridge-type active optical devices with each other and/or with output waveguides by the selective growth of a semiconductor cladding layer only on a window (402) of the dielectric mask pattern.

Claim 3

Independent Claim 122 words

A method of producing an optical integrated circuit comprising covering a portion of a semiconductor substrate (101) opposite to ridge sections (5,6,7,8) of a plurality of ridge-type active optical devices (1,2) on a semiconductor substrate (101), with a semiconductor layer including at least an optical guiding layer (109) and a cladding layer (110), forming a dielectric mask pattern on the ridge-type active optical devices and the semiconductor layer and providing together the ridge sections of the ridge-type active optical devices and opposite ridge sections of a ridge-type passive optical waveguide for connecting the ridge-type active optical devices with each other and/or with output waveguides by selective growth of the semiconductor cladding layer only on a window (901) of the dielectric mask pattern.

References Cited (Backward Citations)

US4066482A Cited

EP0356190A2 Cited

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