Patent EP0486182A1 successfully refreshed from Google Patents.
EP0486182A1
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Zinc oxide sintered body, and production and application thereof
Assignee: Tosoh Corp
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Filing: 1991-10-30
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Granted: —
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Expires: 2011-10-30
Abstract
Abstract A sintered zinc oxide film having a good uniformity is formed by sputtering wherein a zinc oxide sintered body having a (002) crystal orientation larger than the (101) crystal orientation and a density of at least 4.5 g/cm 3 is used as a target. The zinc oxide sintered body preferably contains an element having a positive valency of at least 3 and has a resistivity of not larger than 1 ohm.cm. The zinc oxide sintered body is prepared by neutralizing an aqueous sulfuric acid solution of zinc with ammonia, calcining the thus-formed precipitate, and sintering the calcined precipitate at a temperature of at least 1,300°C. An oxide or aqueous sulfuric acid solution of the above element may be incorporated in the zinc solution ; or an oxide of the above element may be incorporated in the calcined precipitate.
Inventors
- 👤 Nobuhiro Ogawa
- 👤 Ryoji Yoshimura
- 👤 Takashi Mori
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 02:32
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/086; C01; C01G; C01G9/00; C01G9/02; C04; C04B; C04B35/00; C04B35/01; C04B35/453; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
27 words
A zinc oxide sintered body having a (002) crystal orientation larger than the (101) crystal orientation and a density of at least 4. 5 g/cm 3 .
Claim 2
Dependent Claim
27 words
A zinc oxide sintered body having a (002) crystal orientation larger than the (101) crystal orientation and a density of at least 4. 5 g/cm 3 .
Claim 3
Dependent Claim
37 words
A zinc oxide sintered body as claimed in Claim 1 characterised in that it has dispersed therein an element having a positive valency of at least 3 and has a resistivity of not larger than 1 ohm.cm.
Claim 4
Dependent Claim
42 words
A process for the preparation of a zinc oxide sintered body, characterised in that it comprises neutralizing an aqueous sulfuric acid solution of zinc with ammonia, calcining the thus-formed precipitate, and sintering the calcined precipitate at a temperature of at least 1,300°C.
Claim 5
Dependent Claim
42 words
A process for the preparation of a zinc oxide sintered body, characterised in that it comprises neutralizing an aqueous sulfuric acid solution of zinc with ammonia, calcining the thus-formed precipitate, and sintering the calcined precipitate at a temperature of at least 1,300°C.
Claim 6
Dependent Claim
65 words
A process for the preparation of a zinc oxide sintered body, characterised in that it comprises neutralizing a mixed solution comprising an oxide or aqueous sulfuric acid solution of an element having a positive valency of at least 3 and an aqueous sulfuric acid solution of zinc with ammonia, calcining the thus-formed precipitate, and sintering the calcined precipitate at a temperature of at least 1,300°C.
Claim 7
Dependent Claim
65 words
A process for the preparation of a zinc oxide sintered body, characterised in that it comprises neutralizing a mixed solution comprising an oxide or aqueous sulfuric acid solution of an element having a positive valency of at least 3 and an aqueous sulfuric acid solution of zinc with ammonia, calcining the thus-formed precipitate, and sintering the calcined precipitate at a temperature of at least 1,300°C.
Claim 8
Dependent Claim
63 words
A process for the preparation of a zinc oxide sintered body, characterised in that it comprises neutralizing an aqueous sulfuric acid solution of zinc with ammonia, calcining the thus-formed zinc hydroxide to produce zinc oxide, mixing the oxide with an oxide of an element having a positive valency of at least 3, and sintering the mixture at a temperature of at least 1,300°C.
Claim 9
Dependent Claim
63 words
A process for the preparation of a zinc oxide sintered body, characterised in that it comprises neutralizing an aqueous sulfuric acid solution of zinc with ammonia, calcining the thus-formed zinc hydroxide to produce zinc oxide, mixing the oxide with an oxide of an element having a positive valency of at least 3, and sintering the mixture at a temperature of at least 1,300°C.
Claim 10
Dependent Claim
30 words
A sputtering target comprising a zinc oxide sintered body having a (002) crystal orientation larger than the (101) crystal orientation and a density of at least 4.5 g/cm 3 .
Claim 11
Dependent Claim
30 words
A sputtering target comprising a zinc oxide sintered body having a (002) crystal orientation larger than the (101) crystal orientation and a density of at least 4.5 g/cm 3 .
Claim 12
Dependent Claim
22 words
A sputtering target as claimed in Claim 6, characterised in that it has a sputtering surface inclined relative to the substrate surface.
Claim 13
Dependent Claim
23 words
A sputtering target as claimed in Claim 6 or Claim 7, characterised in that it has a resistivity not larger than 1 ohm.cm.
Claim 14
Dependent Claim
25 words
A sputtering target comprising a zinc oxide body characterised in that it is made by a process as claimed in Claim 3, 4 or 5.
Claim 15
Dependent Claim
54 words
A process for making a zinc oxide film, which comprises carrying out film-forming sputtering on a substrate by using a sputtering target having a sputtering surface inclined relative to the substrate surface or parallel to the substrate surface characterised in that the sputtering target is as claimed in Claim 6, 7, 8 or 9.
References Cited (Backward Citations)
DE3639508A1
Cited
EP0354769A2
Cited
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