Patent EP0483855A1 successfully refreshed from Google Patents.
EP0483855A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method for cleaning closed spaces
Assignee: Ebara Research Co Ltd
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Filing: 1991-10-31
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Granted: —
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Expires: 2011-10-31
Abstract
Abstract Cleaning a closed space such as safety cabinets, clean boxes, safes and wafer storage spaces are performed by irradiating a photoelectron emitting member (13) with ultraviolet rays and/or other forms of radiation to emit photoelectrons (16) into the closed space, electrically charging the fine particles (15) in the closed space with the emitted photoelectrons (16), and removing the charged fine particles (17) from the closed space.
Inventors
- 👤 Toshiaki Fujii
- 👤 Hidetomo Suzuki
- 👤 Naoaki Ogure
- 👤 Kazuhiko Sakamoto
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 03:30
CPC Classifications
B; B03; B03C; B03C3/00; B03C3/02; B03C3/16
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
98 words
A method of cleaning a closed space comprising the steps of irradiating a photoelectron emitting member with ultraviolet rays and/or other forms of radiation with an amount of light exposure of from 10 µW/cm² to 10,000 µW/cm² in an electric field created by applying a voltage of from 0.1 V/cm to 2 kV/cm to emit photoelectrons into said closed space, electrically charging the fine particles in said closed space with said emitted photoelectrons, and trapping charged fine particles with dust collecting members, to thereby remove the charged fine particles from the space in which electric charging is performed.
Claim 2
Dependent Claim
36 words
A method according to Claim 1 wherein the dust collecting members comprise at least one member selected from among a dust collector, a dust collecting electrode, an electrostatic filter, an electret assembly and an ion-exchange filter.
Claim 3
Dependent Claim
30 words
A method according to Claim 1 wherein the electrode member for creating an electric field also serves as or is integral with the member for trapping the charged fine particles.
References Cited (Backward Citations)
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