Patent EP0472342A2 successfully refreshed from Google Patents.
EP0472342A2
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EP
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Micro-displacement type information detection probe device and microscope and information processing device by use thereof
Assignee: Canon Inc
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Filing: 1991-08-13
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Granted: —
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Expires: 2011-08-13
Abstract
Abstract A micro-displacement type information detection probe device capable of following all of the undulation on the µm order, etc. and the periodical surface unevenness on the nm order, etc. of the recording medium or the substrate in performing recording, reproduction, etc. by use of tunnel current, etc. is provided. By forming a cantilever 701 of the first stage by extending the insulation layer laminated on the substrate, providing a layer structure 708 - 710 having a piezoelectric material sandwiched between the electrode members on the cantilever of the first stage, forming further a cantilever 702 of the second stage on the extension from the tip end of the first cantilever having said layer structure and also forming an information detection probe 703 at the free end of the cantilever of said second stage, and utilizing the reverse piezoelectric effect formed by application of a voltage between the electrodes of said layer structure, the cantilever 701 of the above first stage is displaced.
Inventors
- 👤 Toshihiko Canon Kabushiki Kaisha Miyazaki
- 👤 Hiroyasu Canon Kabushiki Kaisha Nose
- 👤 Ryo Canon Kabushiki Kaisha Kuroda
- 👤 Toshimitsu Canon Kabushiki Kaisha Kawase
- 👤 Katsuhiko Canon Kabushiki Kaisha Shinjo
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 07:42
CPC Classifications
G; G01; G01Q; G01Q20/00; G01Q20/04; B; B82; B82Y; B82Y35/00; G01Q60/00; G01Q60/02; G01Q60/04; G01Q60/10; G01Q60/16; G01Q60/24; G01Q60/38; G01Q70/00; G01Q70/08; G01Q70/10; G01Q70/14; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1418; G11B9/1427; G11B9/1436; H; H10; H10N; H10N30/00; H10N30/20; H10N30/204; H10N30/2041; H10N30/2042; H10N30/2044; B82Y10/00; G01Q80/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/873
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
84 words
A micro-displacement type information detection device, comprising a first cantilever formed with an insulation layer laminated on a substrate, a layer structure having a piezoelectric material sandwiched between electrodes provided on said cantilever, a second cantilever within said first cantilever provided with said layer structure, and a probe provided at the free end of said second cantilever, said device displacing said first and(or second cantilever by utilizing the reverse piezoelectric effect created by application of a voltage between the electrodes of said layer structure.
Claim 2
Dependent Claim
17 words
A device according to Claim 1, wherein said first and second cantilevers are on the same plane.
Claim 3
Dependent Claim
22 words
A device according to Claim 1, wherein said first cantilever and said second cantilever have respectively free ends in the opposite directions.
Claim 4
Dependent Claim
15 words
A device according to Claim 1, wherein a plurality of said second cantilevers are juxtaposed.
Claim 5
Dependent Claim
87 words
A micro-displacement type information detection device, comprising a first cantilever formed with an insulation layer laminated on a substrate, a layer structure having a piezoelectric material sandwiched between electrodes provided on said cantilever, a second cantilever connected on the extension of the free end of said first cantilever, and a probe located at the free end of said second cantilever, said device displacing said first and second cantilevers by utilizing the reverse piezoelectric effect created by application of a voltage between the electrodes of said layer structure.
Claim 6
Dependent Claim
17 words
A device according to Claim 5, wherein said first and second cantilevers are on the same plane.
Claim 7
Dependent Claim
123 words
A micro-displacement type information detection device, comprising a first cantilever formed with an insulation layer laminated on a substrate, a layer structure having a piezoelectric material sandwiched between electrodes provided on said cantilever, a second cantilever sectionalized by a slit within said first cantilever having the structure with its free end being in the direction opposite to that of said first cantilever, a third cantilever sectionalized by a slit within said second cantilever with its free end being in the direction opposite to that of said second cantilever and a probe at its free end, said device displacing said first, second and third cantilevers by utilizing the reverse piezoelectric effect created by application of a voltage between the electrodes of said layer structure.
Claim 8
Dependent Claim
18 words
A device according to Claim 7, wherein said first, second and third cantilevers are on the same plane.
Claim 9
Dependent Claim
15 words
A device according to Claim 7, wherein a plurality of said third cantilevers are juxtaposed.
Claim 10
Dependent Claim
18 words
A device according to Claim 1, 5 or 7, further having a driving means for said layer structure.
Claim 11
Dependent Claim
21 words
A scanning tunneling microscope equipped with a micro-displacement type information detection device according to any one of Claims 1 to 9.
Claim 12
Dependent Claim
43 words
An atomic force microscope equipped with a micro-displacement type information detection device according to any of Claims 1 to 9 and a means for detecting the displacement amount in the flexed direction of the cantilever of said device having the probe located thereon.
Claim 13
Dependent Claim
41 words
An information processing device equipped with a micro-displacement type information detection device according to any one of Claims 1 to 9, a recording medium and a means for applying a pulse voltage between said probe and said medium of the device.
Claim 14
Dependent Claim
42 words
An information processing device equipped with a micro-displacement type information detection device according to any one of Claims 1 to 9, a medium having an information recorded thereon and a reproducing means which reads said information through said probe of the device.
Claim 15
Dependent Claim
58 words
An information processing device equipped with a micro-displacement type information detection device according to any one of Claims 1 to 9, a recording medium, a means for applying a pulse voltage between said medium and said probe of the device and a reproducing means which reads the information recorded on said medium through said probe of the device.
Claim 16
Dependent Claim
33 words
An information processing device according to Claim 14 or 15, being further equipped with a means for detecting the displacement amount in the flexed direction of the cantilever having the probe located thereon.
Claim 17
Dependent Claim
87 words
A micro-displacement type information detection device, comprising a first movable means formed with an insulation layer laminated on a substrate, a layer structure having a piezoelectric material sandwiched between electrodes provided on said first movable means, a second movable means within said first movable means provided with said layer structure, and a probe supported by said second movable means, said device displacing said first and(or second movable means by utilizing the reverse piezoelectric effect created by application of a voltage between the electrodes of said layer structure.
Claim 18
Dependent Claim
66 words
A micro-displacement type information detection device, comprising a first cantilever formed with an insulation layer laminated on a substrate, a piezoelectric and associated electrodes provided on said cantilever, a second cantilever within said first cantilever and a probe provided on said second cantilever, said device displacing said first and(or second cantilever by utilizing the reverse piezoelectric effect created by application of a voltage between said electrodes.
Claim 19
Dependent Claim
52 words
A micro-displacement the information detection device, comprising a first cantilever formed with an insulation layer laminated on a substrate, a second cantilever within said first cantilever and a probe provided on said second cantilever, said device including means for displacing said first and(or second cantilever by the application of an electrical signal.
References Cited (Backward Citations)
No citation records indexed.
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