EP0469293A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Multi-level deformable mirror device
Assignee: Texas Instruments Inc
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Filing: 1991-06-25
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Granted: —
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Expires: 2011-06-25
Abstract
Abstract A bistable deformable mirror device (DMD) pixel architecture is disclosed, wherein the torsion hinges are placed in a layer different from the torsion beam layer. This results in pixels which can be scaled to smaller dimensions while at the same time maintaining a large fractional active area, an important consideration for spatial light modulation and for bright, high-density displays such as are used in high-definition television applications.
Inventors
- 👤 Larry J. Hornbeck
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 22:00
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; H; H04; H04N; H04N9/00; H04N9/12; H04N9/31; H04N9/3141; G02B26/0816; G02B26/0833; G02B26/0841; G09; G09F; G09F9/00; G09F9/30; G09F9/37; G09F9/372; H04N9/3102; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
76 words
A spatial light modulation device having a defined controllably rotatable area, said device comprising a base layer; a separate layer defining said controllably rotatable area; and a hinge supported by said base layer and connected to said rotatable area for supporting said rotatable area and for allowing said rotatable area to move within a defined motion with respect to said base layer, said hinge laying in a plane separate from the plane of said rotatable layer.
Claim 2
Dependent Claim
76 words
A spatial light modulation device having a defined controllably rotatable area, said device comprising a base layer; a separate layer defining said controllably rotatable area; and a hinge supported by said base layer and connected to said rotatable area for supporting said rotatable area and for allowing said rotatable area to move within a defined motion with respect to said base layer, said hinge laying in a plane separate from the plane of said rotatable layer.
Claim 3
Dependent Claim
25 words
The device set forth in claim 1 wherein said base layer includes discrete areas for providing signals for controlling said rotation of said rotatable area.
Claim 4
Dependent Claim
14 words
The device set forth in claim 2 wherein said discrete areas include address electrodes.
Claim 5
Dependent Claim
15 words
The device set forth in claim 3 wherein said discrete areas further include address circuitry.
Claim 6
Dependent Claim
29 words
The device set forth in claim 2 further including a substrate layer containing control circuitry; and interconnection structure for communicating signals from said control circuitry to said discrete areas.
Claim 7
Dependent Claim
16 words
The device set forth in claim 5 wherein said control circuitry is constructed using CMOS technology.
Claim 8
Dependent Claim
86 words
An array of pixels, each pixel individually rotatable into at least two states, said array comprising: a base structure for supporting all of said pixels of said array, said array being maintained in a plane separate from the plane of said base; each said pixel defining a surface area and comprising an intermediate portion separate from both said base structure and from said pixel and positioned therebetween for connecting said base structure to said pixel for allowing said pixel to deform with respect to said base.
Claim 9
Dependent Claim
86 words
An array of pixels, each pixel individually rotatable into at least two states, said array comprising: a base structure for supporting all of said pixels of said array, said array being maintained in a plane separate from the plane of said base; each said pixel defining a surface area and comprising an intermediate portion separate from both said base structure and from said pixel and positioned therebetween for connecting said base structure to said pixel for allowing said pixel to deform with respect to said base.
Claim 10
Dependent Claim
26 words
The device set forth in claim 7 further comprising a HDTV system and wherein said array is the visual display of a high density television receiver.
Claim 11
Dependent Claim
24 words
The device set forth in claim 7 wherein said base structure includes discrete areas for providing signals for controlling said rotation of said pixels.
Claim 12
Dependent Claim
14 words
The device set forth in claim 9 wherein said discrete areas include address electrodes.
Claim 13
Dependent Claim
15 words
The device set forth in claim 10 wherein said discrete areas further include address circuitry.
Claim 14
Dependent Claim
29 words
The device set forth in claim 10 further including a substrate layer containing control circuitry; and interconnection structure for communicating signals from said control circuitry to said discrete areas.
Claim 15
Dependent Claim
16 words
The device set forth in claim 12 wherein said control circuitry is constructed using CMOS technology.
Claim 16
Independent Claim
92 words
The method of constructing an array of pixels, each pixel individually rotatable into at least two states, said method comprising the steps of: constructing a base structure for supporting all of said pixels of said array, maintaining said array in a plane separate from the plane of said base, said maintaining step including the step of; constructing an intermediate structure separate from both said base structure and from said pixel and positioned therebetween for connecting said base structure to said pixel for allowing said pixel to deform with respect to said base.
Claim 17
Independent Claim
92 words
The method of constructing an array of pixels, each pixel individually rotatable into at least two states, said method comprising the steps of: constructing a base structure for supporting all of said pixels of said array, maintaining said array in a plane separate from the plane of said base, said maintaining step including the step of; constructing an intermediate structure separate from both said base structure and from said pixel and positioned therebetween for connecting said base structure to said pixel for allowing said pixel to deform with respect to said base.
Claim 18
Dependent Claim
20 words
The method set forth in claim 14 wherein said array is the visual display of a high density television system.
Claim 19
Dependent Claim
30 words
The method set forth in claim 15 wherein said base structure constructing step includes the step of establishing discrete areas for providing signals for controlling said rotation of said pixels.
Claim 20
Dependent Claim
14 words
The method set forth in claim 16 wherein said discrete areas include address electrodes.
Claim 21
Dependent Claim
39 words
The method set forth in claim 16 further including the steps of establishing a substrate layer containing control circuitry; and interconnecting said discrete areas to said control circuitry for communicating signals from said control circuitry to said discrete areas.
Claim 22
Independent Claim
84 words
The method of fabricating a deformable mirror device, said method including the steps of: establishing a substrate having formed thereon address circuitry, and a patterned first spacer wherein said patterns define first support posts; establishing upon said first spacer address electrodes and deformable hinges connected to said first support posts; depositing a patterned second spacer wherein said patterns define second support posts over lying said deformable hinges; establishing a plurality of mirrors supported by said second posts; and removing said first and second spacers.
Claim 23
Independent Claim
84 words
The method of fabricating a deformable mirror device, said method including the steps of: establishing a substrate having formed thereon address circuitry, and a patterned first spacer wherein said patterns define first support posts; establishing upon said first spacer address electrodes and deformable hinges connected to said first support posts; depositing a patterned second spacer wherein said patterns define second support posts over lying said deformable hinges; establishing a plurality of mirrors supported by said second posts; and removing said first and second spacers.
References Cited (Backward Citations)
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