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EP0464432A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Asymmetrical virtual ground EPROM cell & fabrication method

Assignee: National Semiconductor Corp
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Filing: 1991-06-15
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Granted: —
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Expires: 2011-06-15
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Abstract

Abstract An array (250) of asymmetric electrically programmable, read only memory (EPROM) cells is formed in a P- semiconductor substrate (252). The EPROM cells (254) are virtual ground cells, in that there are no fixed connections in the array to ground potential. Parallel bit lines (BL), comprising N+ substrate regions (194), form the drain and source regions of parallel columns of MOS transistor devices. Each EPROM cell has a floating gate (256) formed on a first polysilicon layer, and a control gate (258) formed on a second polysilicon layer. Each bit line has two lateral edge regions. An N- implant region (280) overlaps one lateral edge region of each bit line, thereby forming a graduated PN junction between the drain and channel of each MOS transistor device. This substantially prevents hot electron generation by the drain and enables one cell to be programmed without programming of its nearest neighboring cell. A second P- implant region (282) overlaps the other lateral edge region of each bit line, forming a sharp PN junction between the source and channel of each adjacent MOS transistor device, thereby enhancing hot electron generation, which makes the programming of cells more efficient.

Inventors

  • 👤 George M. Sardo
  • 👤 Albert M. Bergemont

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-01 10:10
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/10; H10D62/13; H10D62/149; H10D62/151; H10B; H10B69/00; H10D30/00; H10D30/60; H10D30/601; H10D30/603; H10D30/68; H10D30/681; H10D30/684; H10D30/685; H10D62/17; H10D62/351; H10D62/357; H10D62/364; H10D62/371

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 94 words
An asymmetric electrically programmable, nonvolatile, floating gate semiconductor memory cell, comprising: an MOS transistor device formed in a semiconductor substrate of a first type and having a source and drain of the opposite type, a channel area between said source and drain, a floating gate overlying said channel area, a control gate overlying said floating gate, and an implant region of said opposite type located where said channel area meets said drain; wherein said implant region forms a graduated PN junction with said channel area, thereby substantially preventing hot electron generation by said drain.
Claim 2
Dependent Claim 50 words
An asymmetric memory cell as set forth in Claim 1, further including a second implant region of said first type located where said channel area meets said source; wherein said second implant region forms a sharp PN junction with said channel area, thereby enhancing hot electron generation by said source.
Claim 3
Dependent Claim 186 words
An array of asymmetric electrically programmable, nonvolatile, floating gate semiconductor memory cells comprising: a semiconductor substrate of a first type; a multiplicity of parallel bit lines, comprising substrate regions of the opposite type as said first type; an array of MOS transistor devices formed in said semiconductor substrate, each MOS transistor having a source comprising one of said bit lines, a drain comprising another one of said bit lines, a channel area between said source and drain, a floating gate overlying said channel area, and a control gate overlying said floating gate; each said bit line having two lateral edge regions, a first one of said lateral edge regions forming the drain of a column of said MOS transistor devices and the second one of said lateral edge regions forming the source of another column of said MOS transistor devices; each said bit line having an implant region of said opposite type overlapping said first one of said lateral edge regions; wherein said implant region forms a graduated PN junction with said channel area, thereby substantially preventing hot electron generation by said MOS transistor device drains.
Claim 4
Dependent Claim 65 words
An array of asymmetric memory cells as set forth in Claim 3, each said bit line having a second implant region of said first type overlapping said second one of said lateral edge regions; wherein said second implant region forms a sharp PN junction with said channel area of each adjacent MOS transistor device, thereby enhancing hot electron generation by said MOS transistor device sources.
Claim 5
Independent Claim 174 words
A method of forming an array of asymmetric, electrically programmable, nonvolatile, floating gate semiconductor memory cells, the steps of the method comprising: providing a semiconductor substrate of a first type; forming a thin gate oxide and overlying parallel lines of polysilicon floating gates on a first polysilicon layer; using said polysilicon floating gate as a mask, introducing dopants into said semiconductor substrate to form a multiplicity of parallel bit lines of a second type opposite to said first type; each said bit line having two lateral edge regions, a first one of said lateral edge regions comprising a source for one column of MOS transistor devices and the second one of said lateral edge regions comprising a drain for a neighboring column of MOS transistor devices; implanting a dopant of said second type in a region of said semiconductor substrate overlapping said first one of said lateral edge regions; wherein said implant region forms a graduated PN junction with said channel area, thereby substantially preventing hot electron generation by said MOS transistor device drains.
Claim 6
Dependent Claim 81 words
A method of forming an array of asymmetric, electrically programmable, nonvolatile, floating gate semiconductor memory cells, as set forth in Claim 5, further including the step of implanting a dopant of said first type in a region of said semiconductor substrate overlapping said second one of said lateral edge regions; wherein said second implant region forms a sharp PN junction with said channel area of each adjacent MOS transistor device, thereby enhancing hot electron generation by said MOS transistor device sources.

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