Cantilever stylus for use in an atomic force microscope and method of making same

Assignee: Panasonic Holdings Corp

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Filing: 1991-05-14

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Granted: —

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Expires: 2011-05-14

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Abstract

Abstract An atomic force microscope for observing a sample surface (7) is internally provided with a cantilever stylus (1, 14, 23) and makes use of atomic forces acting between the cantilever stylus (1, 14, 23) and the sample surface. The cantilever stylus (1, 14, 23) includes a cantilever (2, 15, 22) having a fixed end and a free end and having two principal surfaces. The cantilever stylus (1, 14, 23) further includes two tip portions formed in the principal surfaces of the free end, respectively. One of the two tip portions has a radius of curvature less than 0.1 µm and protrudes beyond the other tip portion so that the former may be used to observe the sample surface (7).

Inventors

👤 Hiroyuki Kado
👤 Takao Tohda

Bibliographic Details

Application Number —

Jurisdiction EP

Data Source google_patents

Last Synchronized 2026-11-08 16:28

CPC Classifications

G; G01; G01Q; G01Q60/00; G01Q60/24; G01Q60/38; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/875; Y10S977/878; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49007

Claims Analysis

Total Claims: 4

Claim 1

Independent Claim 112 words

A cantilever stylus (1, 14, 23) for use in an atomic force microscope for observing a sample surface (7) by making use of atomic forces acting between the cantilever stylus (1, 14, 23) and the sample surface, said cantilever stylus (1, 14, 23) comprising: a cantilever (2, 15, 22) having a fixed end and a free end and having two principal surfaces; and first and second tip portions formed in said principal surfaces of said free end, respectively, said first tip portion having a radius of curvature less than 0.1 µm and protruding beyond said second tip portion so that said first tip portion is used to observe the sample surface (7).

Claim 2

Dependent Claim 37 words

The cantilever stylus (1, 14, 23) according to claim 1, wherein said cantilever (15, 22) is bent at a location between said fixed end and said free end (4) in an angular range of 0° to 90°.

Claim 3

Independent Claim 166 words

A method of making a cantilever stylus (1, 14, 23) for use in an atomic force microscope, said method comprising the steps of: forming on a surface of a substrate (8, 16) a film (9, 19) consisting of a stylus material different from a material of said substrate (8, 16); forming on a surface of said stylus material a resist thin film (10) consisting of a material different from said stylus material and having a tip (11); etching said stylus material by making use of an isotropic etching technique so that a depth of etching is greater than a radius of curvature of said tip (11) of said resist thin film (10); forming said stylus material so that a tip of one principal surface thereof has a radius of curvature less than 0.1µm and protrudes beyond a tip of the other principal surface thereof; and removing at least said resist thin film (10) and said substrate (8, 16) adhering to said tips of said stylus material.

Claim 4

Dependent Claim 56 words

The method according to claim 3, wherein an inclined surface (17) is formed at one portion of said substrate (16) so that said inclined surface (17) forms an angle of 0° to 90° with the other portion of said substrate (17), and wherein said tips of said stylus material is formed on said inclined surface (17).

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