Technique for manufacturing interconnections for a semiconductor device

Abstract

Abstract Electrical connections to specified semiconductor or electrically conductive portions (18, 26, and 30) of a structure created from a semiconductive body (10) are created by a process in which a titanium contact layer (34) is deposited on the structure over the specified portions. An electrically conductive barrier material layer (36) which consists principally of non-titanium refractory material is formed over the contact layer. The resulting structure is then annealed at a temperature above 550°C in order to lower the contact resistance. The anneal is preferably done at 600°C or more for 10 - 120 seconds in a gas whose principal constituent is nitrogen. An electrically conductive primary interconnect layer is formed over the barrier material layer after which all three layers are patterned to create a composite interconnect layer.

Inventors

• 👤 Henry Wei-Ming Chung
• 👤 Tsui-Ying Yao

Bibliographic Details