Sensor array

Abstract

Abstract In a sensor matrix containing photosensitive and/or X-ray-sensitive sensors (1) produced by thin-film technology and comprising two electrodes (2, 6) and a semiconductor layer (5) between the latter, a single electrode is in each case provided as first electrode (2) in every sensor (1), the semiconductor layer (5) is continuously formed as a common layer for all the sensors (1) and covers all the first electrodes (2), and the second electrodes (6) are formed as a continuous layer (6) at least for groups of sensors (1), this layer always covering the semiconductor layer (5) in the region of all the first electrodes (2) of the sensors (1) of its group and operating as second electrode for all the sensors of its group. <IMAGE>

Inventors

• 👤 Norbert Conrads
• 👤 Ulrich Dr. Schiebel
• 👤 Herfried Dr. Wieczorek

Bibliographic Details