Patent EP0441270A2 successfully refreshed from Google Patents.
EP0441270A2
Expired / Lapsed
EP
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Wafer bonding using trapped oxidizing vapor
Assignee: Harris Corp
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Filing: 1991-02-02
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Granted: —
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Expires: 2011-02-02
Abstract
Abstract A bonding method including pressing a pair of slices together with a liquid oxidant therebetween and subjecting the pair of slices to a temperature to bond the slices together. Preferably a liquid oxidant is applied to one of the slices before they are pressed together and then dried. The heating step for bonding is carried out at a sufficiently high temperature of at least 1100°C to make the slices pliable so as to comply with each other during the bonding step.
Inventors
- 👤 John Preston Short
- 👤 Craig James Mclachlan
- 👤 George Vernon Rouse
- 👤 James Robert Zibrida
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 01:50
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/019; H10P; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10P90/1914; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10W10/10; H10W10/181; H10W10/061
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
38 words
A method of forming bonded wafers from two slices comprising: pressing a pair of slices together at bonding surfaces with a liquid oxidant of hydrogen peroxide therebetween; and heating said pair of slices to bond said slices together.
Claim 2
Independent Claim
65 words
A method of forming a bonded wafer from a pair of slices comprising: applying a liquid oxidant to a bonding surface of one of said slices; pressing said pair of slices together at said bonding surface with said oxidant therebetween; and heating said pair of slices at a temperature sufficient to make the slices pliable and for a sufficient time to bond the slices together.
Claim 3
Independent Claim
27 words
A method according to Claims 1 or 2 including treating said bonding surfaces of said slices with an acid to produce hydroxyl groups before applying said oxidant.
Claim 4
Dependent Claim
31 words
A method according to Claim 1 or 2 including applying between 0.8 to 8.0 microliters per square inch of oxidant to a bonding surface of one of said slices before pressing.
Claim 5
Dependent Claim
17 words
A method according to Claim 1 or 2 including drying said pressed pair of slices before heating.
Claim 6
Dependent Claim
14 words
A method according to Claim 5 wherein said drying is performed at room temperature.
Claim 7
Dependent Claim
23 words
A method according to Claim 5 wherein said drying is performed until the liquid oxidant has partially evaporated from between said bonding surface.
Claim 8
Dependent Claim
20 words
A method according to Claim 1 or 2 wherein said heating is performed at a temperature of at least 1100°C.
Claim 9
Dependent Claim
11 words
A method according to Claim 2, wherein said oxidant is water.
Claim 10
Dependent Claim
17 words
A method according to Claim 2, wherein said oxidant is a mixture of water and hydrogen peroxide.
References Cited (Backward Citations)
No citation records indexed.
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