Patent EP0436070A1 successfully refreshed from Google Patents.
EP0436070A1
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EP
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Chemical vapour deposition apparatus and method for forming thin film
Assignee: JFE Steel Corp
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Filing: 1990-08-21
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Granted: —
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Expires: 2010-08-21
Abstract
Abstract An apparatus for forming, by a chemical vapor deposition process, a thin film of crystals such as diamond on a surface of a heated substrate placed in a reaction vessel. The apparatus has a substrate supporting structure, a heater for heating the substrate by heat conduction or by electric current supplied directly to the substrate, and a cooling device for cooling the substrate. The heater is controlled in accordance with the measured temperature of the substrate so as to accurately maintain the substrate temperature at a constant level.
Inventors
- 👤 Tomohiro C/O Technical Research Division Ohta
- 👤 Eiichi C/O Technical Research Division Kondoh
- 👤 Tohru C/O Technical Research Division Mitomo
- 👤 Kenichi C/O Technical Research Division Otsuka
- 👤 Hiroshi C/O Technical Research Div. Sekihashi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 02:28
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/46; C23C16/463
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
97 words
An apparatus for forming, by chemical vapor deposition, a thin film on a surface of a heated substrate placed in a vessel, said apparatus comprising: gas supplying and exhausting means for supplying a source gas into said vessel and exhausting the resultant gas from said vessel; decomposing means for decomposing said source gas; substrate supporting means for supporting said substrate; substrate cooling means for cooling said substrate; substrate heating means for heating said substrate; substrate temperature measuring means for measuring a temperature of said substrate; and substrate temperature control means for controlling said temperature of said substrate.
Claim 2
Dependent Claim
94 words
An apparatus according to Claim 1, wherein said substrate heating means includes a heating electric power supply and power supply electrodes, and said substrate supporting means includes said power supply electrodes and said substrate cooling means, arranged such that said substrate is supported between said power supply electrodes and said substrate cooling means, with an insulating means for insulating said substrate cooling means from said substrate and said power supply electrodes, whereby said substrate is directly heated by the heat generated in said substrate by an electric current supplied through said power supply electrodes.
Claim 3
Dependent Claim
30 words
An apparatus according to Claim 1, wherein said substrate heating means includes a heating electric power supply and power supply electrodes, said power supply electrodes including said substrate cooling means.
Claim 4
Dependent Claim
38 words
An apparatus according to Claim 1, wherein said substrate temperature measuring means measures, in a non-contacting manner, the temperature of the surface of said substrate which is opposite to the substrate surface on which said film is formed.
Claim 5
Dependent Claim
15 words
An apparatus according to Claim 1, wherein said thin film is a film of diamond.
Claim 6
Dependent Claim
72 words
A process for forming a thin film, comprising the steps of: providing a substrate in a vessel; heating said substrate; supplying a source gas to said vessel, decomposing said source gas, and exhausting the resultant gas from said vessel; depositing a thin film on said substrate by chemical vapor deposition while simultaneously heating and cooling said substrate, measuring a temperature of said substrate and varying said heating in response to said temperature.
Claim 7
Dependent Claim
21 words
The process according to claim 6 wherein said heating is conducted by electric power and said cooling is conducted by water.
Claim 8
Dependent Claim
15 words
The process of claim 6, wherein during said deposition said temperature is maintained substantially constant.
References Cited (Backward Citations)
DE2808462A1
Cited
EP0276061A1
Cited
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