Patent EP0433503A1 successfully refreshed from Google Patents.
EP0433503A1
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EP
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Vacuum chuck
Assignee: MPL Precision Ltd
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Filing: 1989-12-20
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Granted: —
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Expires: 2009-12-20
Abstract
Abstract The invention provides a vacuum chuck for retaining a planar workpiece. The chuck comprises a support member (1) providing a planar surface (2) for supporting a workpiece (3). Passages (4a, 4b), extend through the support member (1) from said planar surface (2) thereof, said passages each being connected to a source of vacuum at a particular pressure. Valves (5, 5a), are provided for closing each said passage (4a, 4b), when the passage is subjected to both atmospheric pressure and said vacuum pressure simultaneously, said valves (5, 5a) remaining open when subjected to either atmospheric pressure or said vacuum pressure alone. By this arrangement the workpiece (3) can be cut or apertured without interfering with the vacuum pressure acting on the workpiece (3).
Inventors
- 👤 Leslie Ernest Mulliner
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 13:11
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/78; B; B25; B25B; B25B11/00; B25B11/005
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
70 words
A vacuum chuck for retaining a planar workpiece, the chuck comprising a support member providing a planar surface for supporting a said workpiece, passages extending through said support member from said planar surface thereof, said passages each being connected to a source of vacuum at a particular pressure, and valve means for closing each said passage when the passage is subjected to both atmospheric pressure and said vacuum pressure simultaneously.
Claim 2
Dependent Claim
70 words
A vacuum chuck for retaining a planar workpiece, the chuck comprising a support member providing a planar surface for supporting a said workpiece, passages extending through said support member from said planar surface thereof, said passages each being connected to a source of vacuum at a particular pressure, and valve means for closing each said passage when the passage is subjected to both atmospheric pressure and said vacuum pressure simultaneously.
Claim 3
Dependent Claim
56 words
A vacuum chuck according to claim 1, wherein said valve means comprises a normally open valve associated with each said passage, each said valve being adapted to open or remain open when subjected to either atmospheric pressure or said vacuum pressure alone and to close when subjected to both atmospheric pressure and said vacuum pressure simultaneously.
Claim 4
Dependent Claim
15 words
A vacuum chuck according to claim 2, wherein each said valve comprises a flap valve.
Claim 5
Dependent Claim
18 words
A vacuum chuck according to claim 2 or 3, wherein each said valve comprises a slit silicone disc.
Claim 6
Dependent Claim
20 words
A vacuum cbuck according to claim 2 or 3, wherein said valves are all formed in a sheet of silicone.
Claim 7
Dependent Claim
36 words
A vacuum chuck according to claim 5, wherein each said valve is formed in said sheet by forming an arcuate slot in said sheet to define a flap connected to the sheet by an integral hinge.
Claim 8
Dependent Claim
43 words
A vacuum chuck according to any one of the preceding claims, wherein each said passage is of larger diameter at that end thereof remote from said planar surface and wherein a said valve is provided in the larger diameter portion of each passage.
Claim 9
Dependent Claim
43 words
A vacuum chuck according to any one of claims 2 to 7, wherein at least some of said valves are mounted between said support member and a clamping plate secured to the support member and wherein said passages extend through the clamping plate.
Claim 10
Dependent Claim
30 words
A vacuum chuck according to claim 8, wherein that portion of each passage extending through said clamping plate is offset from the portion of the passage adjacent said planar surface.
Claim 11
Dependent Claim
21 words
A vacuum chuck according to any one of claims 2 to 9, wherein each said valve cooperates with a valve seat.
Claim 12
Dependent Claim
31 words
A vaccum chuck according to claim 8 or 9 and 10, wherein each said valve seat is provided by the surface of said clamping plate around a said passage extending therethrough.
Claim 13
Dependent Claim
33 words
A vacuum chuck according to claims 8 or 9 and 10, wherein each said valve seat is provided by an end surface of a peg or pin which projects into a said passage.
Claim 14
Dependent Claim
46 words
A vacuum chuck according to claims 8 to 12, wherein a planar member is spaced from said clamping plate, the space between said planar member and said clamping plate is connected to said vacuum source and at least some of said passages communicate with said space.
Claim 15
Dependent Claim
24 words
A vacuum chuck according to claims 12 and 13, wherein at least some of said pegs or pins are mounted on said planar member.
Claim 16
Dependent Claim
35 words
A vacuum chuck according to claim 13 or 14, wherein at least one of said passages extends through said planar member and through a spacer member provided between the planar member and said clamping plate.
Claim 17
Dependent Claim
46 words
A vacuum chuck according to claim 15, wherein the valve associated with the or each said at least one passage is mounted between said planar member and a planar clamping member secured thereto and wherein said at least one passage extends through said planar clamping member.
Claim 18
Dependent Claim
34 words
A vacuum chuck according to claim 16, wherein that portion of said at least one passage extending through said planar clamping member is offset from that part of the passage adjacent said planar surface.
Claim 19
Dependent Claim
50 words
A vacuum chuck according to claim 15, 16 or 17, wherein a base planar member is spaced from said planar clamping member, said space between said base planar member and said planar clamping member is connected to said vacuum source and said at least one passage opens into said space.
Claim 20
Dependent Claim
36 words
A vacuum chuck according to claim 10 and claims 16, 17 or 18, wherein the surface of said planar clamping member around that portion of said at least one passage extending therethrough provides said valve seat.
Claim 21
Dependent Claim
42 words
A vaccum chuck according to claim 10 and claim 16, 17 or 18, wherein said valve seat is provided by an end surface of a peg or pin mounted on said base planar member and extending into said at least one passage.
Claim 22
Dependent Claim
18 words
A maximum chuck according to any one of the preceding claims, wherein said valve means comprises bleed means.
Claim 23
Dependent Claim
45 words
A vacuum chuck according to claim 21, wherein the valve means comprises a flap valve and valve seat associated with each said passage and said bleed means comprises a bleed port in the flap of the valve or a bleed passage in the valve seat.
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