Patent US1045601A successfully refreshed from Google Patents.
Patent EP0421746A2 successfully refreshed from Google Patents.
EP0421746A2
Expired / Lapsed
EP
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Exposure apparatus
Assignee: Canon Inc
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Filing: 1990-10-03
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Granted: —
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Expires: 2010-10-03
Abstract
Abstract An exposure apparatus includes an exposure light source (13) for projecting a flux of light (14) to be used for exposure, having a non-uniform intensity distribution, toward a range including an exposure zone, set with respect to a main body (40) of the exposure apparatus; illuminance detectors (61) disposed at least at two points inside the exposure light flux (16) but outside the exposure zone; and a detecting device (62) for detecting a change in intensity of the exposure light and a change in relative position of the exposure zone and the exposure light flux, on the basis of detected illuminances at the two points.
Inventors
- 👤 Yutaka C/O Canon Kabushiki Kaisha Watanabe
- 👤 Ryuichi C/O Canon Kabushiki Kaisha Ebinuma
- 👤 Nobutoshi C/O Canon Kabushiki Kaisha Mizusawa
- 👤 Shunichi C/O Canon Kabushiki Kaisha Uzawa
- 👤 Takao C/O Canon Kabushiki Kaisha Kariya
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 14:19
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/708; G03F7/7085; G03F7/70058; G03F7/702
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
98 words
An exposure apparatus, comprising: an exposure light source for projecting a flux of light to be used for exposure, having a non-uniform intensity distribution, toward a range including an exposure zone, set with respect to a main body of said exposure apparatus; illuminance detectors disposed at least at two points inside the exposure light flux but outside the exposure zone; and detecting means for detecting a change in intensity of the exposure light and a change in relative position of the exposure zone and the exposure light flux, on the basis of detected illuminances at the two points.
Claim 2
Dependent Claim
98 words
An exposure apparatus, comprising: an exposure light source for projecting a flux of light to be used for exposure, having a non-uniform intensity distribution, toward a range including an exposure zone, set with respect to a main body of said exposure apparatus; illuminance detectors disposed at least at two points inside the exposure light flux but outside the exposure zone; and detecting means for detecting a change in intensity of the exposure light and a change in relative position of the exposure zone and the exposure light flux, on the basis of detected illuminances at the two points.
Claim 3
Dependent Claim
20 words
An apparatus according to Claim 1, further comprising exposure control means for controlling the exposure condition in the exposure zone.
Claim 4
Dependent Claim
118 words
An apparatus according to Claim 2, wherein said exposure control means comprises shutter means which includes a light blocking plate, a blocking plate drive table for storing the position or moving speed of said light blocking plate, shutter driving means for driving said light blocking plate on the basis of said table, and control means operable to shift said table on the basis of the detected change in the relative position from said detecting means, and wherein said shutter means operates to control the moving speed of said light blocking plate through the exposure zone in accordance with an intensity distribution of the exposure light flux, to thereby make uniform the amount of exposure in the exposure zone.
Claim 5
Dependent Claim
51 words
An apparatus according to Claim 2, wherein said exposure control means comprises attitude control means for adjusting the attitude of a shutter unit, selectively transmitting and blocking the exposure light, on the basis of the detected change in the relative position from said detecting means, to thereby correct the exposure condition.
Claim 6
Dependent Claim
48 words
An apparatus according to Claim 2, wherein said exposure control means comprises attitude control means for adjusting the attitude. of said main body of said exposure apparatus on the basis of the detected change in the relative position from said detecting means, to thereby correct the exposure condition.
Claim 7
Dependent Claim
68 words
An apparatus according to Claim 2, wherein said exposure light source includes an X-ray mirror for vertically expanding X-rays of a sheet beam shape elongated horizontally, as emitted by a SOR device, and wherein said exposure control means operates to adjust the attitude of said X-ray mirror on the basis of the detected change in the relative position from said detecting means, to thereby correct the exposure condition.
Claim 8
Dependent Claim
48 words
An apparatus according to Claim 2, wherein said exposure light source includes a SOR device and wherein said exposure control means operates to adjust an electron orbit of said SOR device on the basis of the detected change in the relative position as outputted from said detecting means.
Claim 9
Dependent Claim
23 words
An apparatus according to Claim 6, wherein said illuminance detectors comprise X-ray intensity detectors disposed at two points vertically outside the exposure zone.
Claim 10
Dependent Claim
68 words
An exposure apparatus, comprising: exposure amount controlling means adapted to set an exposure time distribution corresponding to non-uniformness of illumination light in a one-dimensional direction, so as to provide an uniform exposure amount over an exposure zone; and positional reference controlling means operable to shift a positional reference for said exposure amount controlling means, in the one- dimensional direction, with respect to a frame of said exposure apparatus.
Claim 11
Dependent Claim
68 words
An exposure apparatus, comprising: exposure amount controlling means adapted to set an exposure time distribution corresponding to non-uniformness of illumination light in a one-dimensional direction, so as to provide an uniform exposure amount over an exposure zone; and positional reference controlling means operable to shift a positional reference for said exposure amount controlling means, in the one- dimensional direction, with respect to a frame of said exposure apparatus.
Claim 12
Dependent Claim
58 words
An apparatus according to Claim 9, wherein said exposure amount controlling means includes shutter means having a light blocking plate, and driving means for driving said light blocking plate in accordance with a drive curve corresponding to the non-uniformness of intensity, and wherein said positional reference controlling means is operable to shift a reference of the drive curve.
Claim 13
Dependent Claim
49 words
An apparatus according to Claim 9, wherein said exposure amount control means includes a shutter unit which is movable relatively to said frame of said exposure apparatus, and wherein said positional reference controlling means includes shutter attitude controlling means operable to drive said shutter unit in said one-dimensional direction.
Claim 14
Dependent Claim
28 words
An exposure apparatus according to Claim 11, wherein said shutter attitude control means operates to rotationally move said shutter unit about an optical axis of the illumination light.
Claim 15
Dependent Claim
76 words
An exposure apparatus according to Claim 9, wherein said positional reference controlling means includes attitude change detecting means for detecting a relative change in attitude between an exposure apparatus main body including said frame and a floor on which an illumination system including a SOR device, to be used as an exposure light source, are placed, and wherein said positional reference controlling means adjusts said positional reference in accordance with detection of the relative attitude change.
Claim 16
Dependent Claim
20 words
An exposure apparatus, characterised in that the apparatus is responsive to the relative position of the article to be exposed.
Claim 17
Dependent Claim
20 words
An exposure apparatus, characterised in that the apparatus is responsive to the relative position of the article to be exposed.
Claim 18
Dependent Claim
19 words
An exposure apparatus, characterised in that the apparatus is responsive to the angle of incidence of the exposure radiation.
Claim 19
Dependent Claim
19 words
An exposure apparatus, characterised in that the apparatus is responsive to the angle of incidence of the exposure radiation.
Claim 20
Dependent Claim
25 words
Apparatus according to claim 14 or 15, in which relative changes in position or incidence angle are detected in real time or near real time.
Claim 21
Dependent Claim
21 words
Exposure apparatus characterised in that the exposure time is adjusted in accordance with the change in intensity of the exposure radiation.
Claim 22
Dependent Claim
21 words
Exposure apparatus characterised in that the exposure time is adjusted in accordance with the change in intensity of the exposure radiation.
Claim 23
Independent Claim
60 words
A method of exposing articles to radiation for printing thereon, comprising the steps of: exposing the article to a light source having a non-uniform intensity distribution; and detecting a change in intensity of the exposure light and a change in relative position of the exposure zone and the exposure light flux on the basis of detected illuminances at two points.
Claim 24
Independent Claim
60 words
A method of exposing articles to radiation for printing thereon, comprising the steps of: exposing the article to a light source having a non-uniform intensity distribution; and detecting a change in intensity of the exposure light and a change in relative position of the exposure zone and the exposure light flux on the basis of detected illuminances at two points.
References Cited (Backward Citations)
No citation records indexed.
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