EP0418890A3
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Solid state laser device for lithography light source and semiconductor lithography method
Assignee: Mitsui Chemicals Inc
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Filing: 1990-09-20
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Granted: —
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Expires: 2010-09-20
Abstract
No abstract record available.
Inventors
- 👤 Akira C/O Mitsui Petrochemical Ind. Ltd. Itani
- 👤 Kazuo C/O Mitsui Petrochem. Ind. Ltd. Shimazaki
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 14:00
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; G03F7/70025; H; H01; H01S; H01S3/00; H01S3/10; H01S3/101; G02; G02F; G02F1/00; G02F1/35; G02F1/37; G03F7/70483; G03F7/7055; G03F7/70575; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10P76/2042; G02F1/353; G02F1/354
Claims Analysis
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References Cited (Backward Citations)
JPS6489431A
Cited
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