Pattern transfer apparatus

Abstract

Abstract PURPOSE:To provide a safe, compact pattern transfer apparatus suitable for use in clean rooms and the like, by using a laser oscillator as a light generating source, passing the light, which is emitted from the laser oscillator, and generating higher harmonic waves. CONSTITUTION:Nonlinear optical elements 20 are inserted into resonators 11 and 12 in a laser 10. Thus, the wavelength of the light beam is made to be 257.25nm, which is a higher harmonic wave of twice. As the nonlinear optical element 20, a KDP is used. In this way, transducing efficiency is made to be 10% or more, and the sufficient output can be obtained. The light, which has the equivalent wavelength as that of a KrF excimer laser, can be obtained by generating the higher harmonic of the laser light. It is not required to use poisonous gas and a very high voltage source. The light source having the short wavelength can be made stable and sufficiently rigid. The constitution of the apparatus can be made compact.

Inventors

• 👤 Takashi Sato
• 👤 Makoto Nakase
• 👤 Shinichi Imai

Bibliographic Details