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Spatial light modulator and method

Assignee: Texas Instruments Inc
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Filing: 1990-08-23
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Granted: —
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Expires: 2010-08-23
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Abstract

Abstract An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes (40, 41) which gives uniform large-angle deflection plus high reliability.

Inventors

  • 👤 Larry J. Hornbeck
  • 👤 William E. Nelson

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-08 17:33
CPC Classifications
G; G09; G09G; G09G3/00; G09G3/20; G09G3/34; G09G3/3433; G09G3/346; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0841; G09G2310/00; G09G2310/06; G09G2310/061

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 40 words
A method of resetting pixels of a deflectable beam spatial light modulator, comprising the steps of: (a) applying a voltage to store energy in the hinges of deflectable beams; and then (b) removing said voltage to release said stored energy.
Claim 2
Independent Claim 40 words
A method of resetting pixels of a deflectable beam spatial light modulator, comprising the steps of: (a) applying a voltage to store energy in the hinges of deflectable beams; and then (b) removing said voltage to release said stored energy.
Claim 3
Dependent Claim 17 words
The method of claim 1, wherein: (a) said applying a voltage is a sequence of voltage pulses.
Claim 4
Dependent Claim 22 words
The method of claim 2, wherein: (a) said sequence of voltage pulses has a frequency about a resonant frequency of said hinges.
Claim 5
Dependent Claim 12 words
The method of claim 3, wherein: (a) said sequence has five pulses.
Claim 6
Dependent Claim 20 words
The method of claim 3, wherein: (a) each of said voltage pulses is a square wave with 50% duty cycle.
Claim 7
Dependent Claim 35 words
The method of claim 1, wherein: (a) each of said deflectable beams is supported by two torsion hinges, and said energy is stored by bending of said torsion hinges out of their axis of rotation.
Claim 8
Independent Claim 48 words
A method of resetting pixels of a deflectable beam spatial light modulator with opposed addressing electrodes for each pixel, comprising the steps of: (a) apply a voltage pulse to a first of said addressing electrodes, said pulse of duration less than the time constant of the deflectable beam.
Claim 9
Independent Claim 48 words
A method of resetting pixels of a deflectable beam spatial light modulator with opposed addressing electrodes for each pixel, comprising the steps of: (a) apply a voltage pulse to a first of said addressing electrodes, said pulse of duration less than the time constant of the deflectable beam.

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