Patent EP0410634A2 successfully refreshed from Google Patents.
EP0410634A2
Expired / Lapsed
EP
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Improved resolution confocal microscope, and device fabrication method using same
Assignee: AT&T Inc
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Filing: 1990-07-18
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Granted: —
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Expires: 2010-07-18
Abstract
Abstract A new confocal microscope and a new device fabrication method in which linewidth control is achieved using the new confocal microscope are disclosed. This new confocal microscope has a configuration which achieves multiple passes, e.g., three, four, five, six, seven or more passes, of the incident light through the objective lens of the microscope. As a consequence, the new confocal microscope exhibits a smaller effective depth of focus and a smaller effective resolution than a conventional confocal microscope.
Inventors
- 👤 Martin Feldmann
- 👤 Princess Elaine Simpson
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 08:29
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G02; G02B; G02B21/00; G02B21/0004; G02B21/002; G02B21/0024; G02B21/0052; G02B21/0072; G03F7/70641; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
173 words
An optical system, comprising: a first surface (90), containing at least one aperture (100), at least a portion of said first surface being substantially opaque to the light emitted from an optical source (60) and said aperture being positioned to receive at least a portion of the light from said source; and an objective lens (30), capable of optical communication with said source via said aperture, CHARACTERIZED IN THAT said system further comprises a second surface (110) which is at least partially reflective of the light emitted by said source, said second surface being either distinct from said first surface and capable of optical communication with said lens via said aperture, or included in said first surface and capable of optical communication with said lens, and means (160) for successively increasing the angular orientation of a light beam, relative to an axis (210) of said means, upon successive passes of said light beam through said means, said means being positioned between, and capable of optical communication with, said aperture and said objective lens.
Claim 2
Dependent Claim
173 words
An optical system, comprising: a first surface (90), containing at least one aperture (100), at least a portion of said first surface being substantially opaque to the light emitted from an optical source (60) and said aperture being positioned to receive at least a portion of the light from said source; and an objective lens (30), capable of optical communication with said source via said aperture, CHARACTERIZED IN THAT said system further comprises a second surface (110) which is at least partially reflective of the light emitted by said source, said second surface being either distinct from said first surface and capable of optical communication with said lens via said aperture, or included in said first surface and capable of optical communication with said lens, and means (160) for successively increasing the angular orientation of a light beam, relative to an axis (210) of said means, upon successive passes of said light beam through said means, said means being positioned between, and capable of optical communication with, said aperture and said objective lens.
Claim 3
Dependent Claim
26 words
The optical system of claim 1, wherein said means includes at least one birefringent optical element (180) positioned between first (170) and second (200) quarter-wave plates.
Claim 4
Dependent Claim
18 words
The optical system of claim 2, wherein said at least one birefringent optical element is a birefringent prism.
Claim 5
Dependent Claim
24 words
The optical system of claim 3, wherein said means further includes a second birefringent prism (190) positioned between said first and second quarter-wave plates.
Claim 6
Dependent Claim
23 words
The optical system of claim 4, wherein said first and second birefringent prisms are joined to one another to form a Wollaston prism.
Claim 7
Dependent Claim
25 words
The optical system of claim 1, further comprising a field lens (150) positioned between, and capable of optical communication with, said aperture and said means.
Claim 8
Dependent Claim
12 words
The optical system of claim 1, wherein said aperture is a slit.
Claim 9
Independent Claim
109 words
A method for fabricating a device, comprising the steps of: forming a patterned resist on a substrate; optically imaging at least a portion of at least one feature in said patterned resist via a lens; transferring the pattern in said patterned resist into said substrate provided the result of said imaging step conforms to a desired criterion; and if said transferring step takes place, completing the fabrication of said device in said substrate, Characterized In That said imaging step includes the step of passing the same light beam through said lens three or more times to impinge two or more different regions of said feature with said light beam.
Claim 10
Independent Claim
109 words
A method for fabricating a device, comprising the steps of: forming a patterned resist on a substrate; optically imaging at least a portion of at least one feature in said patterned resist via a lens; transferring the pattern in said patterned resist into said substrate provided the result of said imaging step conforms to a desired criterion; and if said transferring step takes place, completing the fabrication of said device in said substrate, Characterized In That said imaging step includes the step of passing the same light beam through said lens three or more times to impinge two or more different regions of said feature with said light beam.
Claim 11
Independent Claim
93 words
A method for fabricating a device, comprising the steps of: at least partially fabricating said device; optically imaging at least a portion of at least one feature of said at least partially fabricated device via a lens; and completing said at least partially fabricated device provided the result of said imaging step conforms to a desired criterion, Characterized In That said imaging step includes the step of passing the same light beam through said lens three or more times to impinge two or more different regions of said feature with said light beam.
Claim 12
Independent Claim
93 words
A method for fabricating a device, comprising the steps of: at least partially fabricating said device; optically imaging at least a portion of at least one feature of said at least partially fabricated device via a lens; and completing said at least partially fabricated device provided the result of said imaging step conforms to a desired criterion, Characterized In That said imaging step includes the step of passing the same light beam through said lens three or more times to impinge two or more different regions of said feature with said light beam.
Claim 13
Independent Claim
108 words
A method for fabricating a device, comprising the steps of: forming a pattern in a substrate, the resulting patterned substrate including a first portion to be incorporated into said device and a second portion to be discarded; optically imaging at least a portion of at least one feature of the pattern formed in said second portion; and completing said device provided the result of said imaging step conforms to a desired criterion, Characterized In That said imaging step includes the step of passing the same light beam through said lens three or more times to impinge two or more different regions of said feature with said light beam.
Claim 14
Independent Claim
108 words
A method for fabricating a device, comprising the steps of: forming a pattern in a substrate, the resulting patterned substrate including a first portion to be incorporated into said device and a second portion to be discarded; optically imaging at least a portion of at least one feature of the pattern formed in said second portion; and completing said device provided the result of said imaging step conforms to a desired criterion, Characterized In That said imaging step includes the step of passing the same light beam through said lens three or more times to impinge two or more different regions of said feature with said light beam.
References Cited (Backward Citations)
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