Patent EP0406413A1 successfully refreshed from Google Patents.
EP0406413A1
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Scanning type tunnel microscope
Assignee: Olympus Corp
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Filing: 1988-08-12
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Granted: —
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Expires: 2008-08-12
Abstract
Abstract A scanning type tunnel microscope comprises a combination of an optical microscope with a tunnel scanning unit. The tunnel scanning unit is equipped with a probe held with a predetermined spacing from a sample placed on a sample mount in an axial direction and an actuator which moves the sample mount and the probe in the axial direction to bring them close to a tunnel region, and drives them relatively and three-dimensionally. An objective lens and the probe are disposed in such a manner that the center axis of the probe of the scanning tunnel unit is in agreement with the optical axis of the objective lens of the optical microscope. STM observation of the surface of the sample is made by moving the sample and the probe in the axial direction to bring them into the tunnel region and effecting scanning in the surface direction while moving them little by little in the axial direction in such a manner as to keep a tunnel current constant. Focusing is made by moving the objective lens of the optical microscope in the axial direction and a field of vision on the STM observation surface is observed as an optical microscope image through an eyepiece.
Inventors
- 👤 Chiaki Sato
- 👤 Kiyozo Koshiishi
- 👤 Sadao Shigetomi
- 👤 Shuzo Mishima
- 👤 Tsugiko Takase
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-29 19:40
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; A; A61; A61P; A61P25/00; A61P25/02; A61P27/00; A61P27/02; C; C07; C07D; C07D285/00; C07D285/01; C07D285/02; C07D285/04; C07D285/10; C07D417/00; C07D417/02; C07D417/12; G01Q30/00; G01Q30/02; G01Q30/025; G02; G02B; G02B21/00; G02B21/0004; G02B21/002; H; H02; H02N; H02N2/00; H02N2/02; H02N2/021; H02N2/023; H02N2/028; H10; H10N; H10N30/00; H10N30/20; H10N30/202; H10N30/2027; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/868; Y10S977/869
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
105 words
1) A scanning tunnel microscope characterized by comprising a sample table for holding a sample, a probe held to be spaced apart from said sample by a predetermined interval in an axial direction, an actuator for three-dimensionally driving said sample and said probe relative to each other, and an observation optical system having an objective optical member axially movable with respect to a surface of said sample and an eyepiece optical member for receiving light reflected by said sample through said objective optical member, said observation optical system being able to allow an observation of said surface of said sample through said eyepiece optical member.
Claim 2
Dependent Claim
105 words
1) A scanning tunnel microscope characterized by comprising a sample table for holding a sample, a probe held to be spaced apart from said sample by a predetermined interval in an axial direction, an actuator for three-dimensionally driving said sample and said probe relative to each other, and an observation optical system having an objective optical member axially movable with respect to a surface of said sample and an eyepiece optical member for receiving light reflected by said sample through said objective optical member, said observation optical system being able to allow an observation of said surface of said sample through said eyepiece optical member.
Claim 3
Dependent Claim
37 words
2) A scanning tunnel microscope according to claim 1 , characterized in that said objective optical member comprises an objective lens having a through hole at a center thereof so as to movably receive said probe therein.
Claim 4
Dependent Claim
58 words
3) A scanning tunnel microscope according to claim 1, characterized in that said objective optical member comprises a concave mirror for receiving the light reflected by said sample and a convex mirror for guiding the reflected light from said concave mirror to said eyepiece optical member, said concave and convex mirrors being arranged substantially coaxial with said probe.
Claim 5
Dependent Claim
57 words
4) A scanning tunnel microscope according to claim 1, characterized in that said probe is located between said objective optical member and said sample to mechanically separate said objective optical member from said eyepiece optical member, thereby eliminating an influence of said probe on sample measurement which is caused by vibrations from an eyepiece optical member side.
Claim 6
Dependent Claim
128 words
5) A scanning tunnel microscope characterized by comprising a sample table for holding a sample, a probe held to to be spaced apart from said sample by a predetermined interval in an axial direction, actuator means for three-dimensionally driving said sample and said probe relative to each other, and an observation optical system having an objective optical member which is axially movable with respect to a surface of said sample and has an optical axis substantially aligned with an axis of said probe with respect to said surface of said sample and an eyepiece optical member for receiving light reflected by said sample through said objective optical member, said observation optical system being able to allow observation of said surface of said sample through said eyepiece optical member.
Claim 7
Dependent Claim
128 words
5) A scanning tunnel microscope characterized by comprising a sample table for holding a sample, a probe held to to be spaced apart from said sample by a predetermined interval in an axial direction, actuator means for three-dimensionally driving said sample and said probe relative to each other, and an observation optical system having an objective optical member which is axially movable with respect to a surface of said sample and has an optical axis substantially aligned with an axis of said probe with respect to said surface of said sample and an eyepiece optical member for receiving light reflected by said sample through said objective optical member, said observation optical system being able to allow observation of said surface of said sample through said eyepiece optical member.
Claim 8
Dependent Claim
46 words
6) A scanning tunnel microscope according to claim 5, characterized by further comprising a displacement measurement optical system arranged in an optical path of the light reflected by said sample through said objective optical absence, thereby measuring a geometry of an observation surface of said sample.
Claim 9
Dependent Claim
69 words
7) A scanning tunnel microscope according to claim 6, characterized in that said displacement measurement optical system and said observation optical system are arranged on an optical axis of the light reflected by said sample through said objective optical member, an objective optical member common, in said displacement measurement optical system and said observation optical system comprises a reflection objective lens having a concave mirror and a convex mirror.
Claim 10
Dependent Claim
62 words
8) A scanning tunnel microscope characterized by comprising a probe, support means for supporting said probe such that an optical axis of an objective optical member of an optical microscope is substantially aligned with an axis of said probe, and actuator means for relatively moving a sample and said probe to a tunnel region and three-dimensionally driving said sample and said probe.
Claim 11
Dependent Claim
62 words
8) A scanning tunnel microscope characterized by comprising a probe, support means for supporting said probe such that an optical axis of an objective optical member of an optical microscope is substantially aligned with an axis of said probe, and actuator means for relatively moving a sample and said probe to a tunnel region and three-dimensionally driving said sample and said probe.
Claim 12
Dependent Claim
40 words
9) A scanning tunnel microscope according to claim 8, wherein said support means comprises means for supporting said probe in an objective lens of an optical microscope so as to locate said probe between said objective lens and said sample.
Claim 13
Dependent Claim
25 words
10) A scanning tunnel microscope according to claim 8, wherein said actuator means comprises a three-dimensional actuator arranged between said support means and said probe.
Claim 14
Dependent Claim
85 words
11) A scanning tunnel microscope characterized by comprising a tunnel scanning unit consisting of an actuator arranged on an outer frame of an objective lens, fixing means for fixing said actuator on an objective lens, a transparent plate mounted at a distal end of said actuator, and a probe arranged at a portion of said transparent plate on an optical axis of said objective lens, and an observation optical system arranged on an optical path of light reflected by said sample through an objective lens.
Claim 15
Dependent Claim
85 words
11) A scanning tunnel microscope characterized by comprising a tunnel scanning unit consisting of an actuator arranged on an outer frame of an objective lens, fixing means for fixing said actuator on an objective lens, a transparent plate mounted at a distal end of said actuator, and a probe arranged at a portion of said transparent plate on an optical axis of said objective lens, and an observation optical system arranged on an optical path of light reflected by said sample through an objective lens.
Claim 16
Dependent Claim
104 words
12) A scanning tunnel microscope comprising: a probe scanning mechanism consisting of an STM probe aligned with an optical axis of an objective lens of a sample observation optical system, a three-dimensional actuator for three-dimensionally driving said probe, and a probe moving mechanism for offsetting said probe from an optical axis of said sample observation optical system; and a sample surface observation reflection optical system, wherein said mechanism for offsetting said STM probe from said optical axis of said objective lens is provided to cause said objective lens to come close a sample surface to allow an optical observation of an STM scanning range.
Claim 17
Dependent Claim
104 words
12) A scanning tunnel microscope comprising: a probe scanning mechanism consisting of an STM probe aligned with an optical axis of an objective lens of a sample observation optical system, a three-dimensional actuator for three-dimensionally driving said probe, and a probe moving mechanism for offsetting said probe from an optical axis of said sample observation optical system; and a sample surface observation reflection optical system, wherein said mechanism for offsetting said STM probe from said optical axis of said objective lens is provided to cause said objective lens to come close a sample surface to allow an optical observation of an STM scanning range.
References Cited (Backward Citations)
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