Membrane sensor with concentration of deformations

Abstract

Abstract The sensor consists of a membrane which is deformable under the action of the quantity to be measured, a beam connected to the membrane to detect the forces transmitted by the membrane, and strain gauges fixed to the beam so as to provide a signal representative of the stresses exerted on the beam. <??>The membrane (16) and the beam (14) are produced as a single component (10) in which the part forming the beam is considerably thicker than the part forming the membrane and extends between two opposite regions on the edge of the membrane. The beam has grooves or notches (22, 24, 26, 28) cut into it, the bottoms of which form regions of stress concentration: it is at these points that the strain gauges (32, 34, 36, 38) are fixed. <IMAGE>

Inventors

• 👤 Gérard Bellec
• 👤 René Goutti

Bibliographic Details