Patent EP0401669A2 successfully refreshed from Google Patents.
EP0401669A2
Expired / Lapsed
EP
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An acceleration sensor
Assignee: Mitsubishi Chemical Corp
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Filing: 1990-05-30
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Granted: —
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Expires: 2010-05-30
Abstract
Abstract This invention relates to an acceleration sensor having less output drift due to temperature change and noise due to external induction which includes a piezoelectric device formed of a piezoelectric member having one or more electrodes provided on each of sides thereof and a lining member of low linear expansion coefficient adhered to one side thereof. A low linear expansion coefficient circuit substrate is provided having the piezoelectric device adhered to one side thereof and having a signal processing electronic circuit formed on the other side thereof. A cabinet having three layers, including an internal conductive resin layer, an adiabatic resin layer, and an external conductive metal layer, completely enclose the piezoelectric device and the circuit substrate.
Inventors
- 👤 Tomonobu C/O Electronic Products Dev. Tomita
- 👤 Yoshinao C/O Electronic Products Dev. Mukasa
- 👤 Masahiro C/O Electronic Products Dev. Sasaki
- 👤 Fumio C/O Yokkaichi Div. Of Mitsubishi Ohta
- 👤 Kazuo C/O Yokkaichi Div. Of Mitsubishi Yorihiro
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 20:44
CPC Classifications
G; G01; G01P; G01P1/00; G01P1/006; G01P15/00; G01P15/02; G01P15/08; G01P15/09; G01N; G01N2291/00; G01N2291/02; G01N2291/028; G01N2291/02827
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
114 words
An acceleration sensor including, a piezoelectric device (6) which is formed of a piezoelectric member (1) having one or more electrodes provided on each of side thereof and a lining member (5) having a low linear expansion coefficient adhered to one side thereof, a circuit substrate (7) of low linear expansion coefficient having a piezoelectric device (6) adhered to one side thereof and having a signal processing electronic circuit (8) formed on the other side thereof, and a cabinet (31) having three layers, including an internal conductive resin layer (10), an adiabatic resin layer (9), and an external conductive metal layer (11), which entirely encloses the piezoelectric device (6) and the circuit substrate (7).
Claim 2
Dependent Claim
114 words
An acceleration sensor including, a piezoelectric device (6) which is formed of a piezoelectric member (1) having one or more electrodes provided on each of side thereof and a lining member (5) having a low linear expansion coefficient adhered to one side thereof, a circuit substrate (7) of low linear expansion coefficient having a piezoelectric device (6) adhered to one side thereof and having a signal processing electronic circuit (8) formed on the other side thereof, and a cabinet (31) having three layers, including an internal conductive resin layer (10), an adiabatic resin layer (9), and an external conductive metal layer (11), which entirely encloses the piezoelectric device (6) and the circuit substrate (7).
Claim 3
Dependent Claim
34 words
An acceleration sensor according to Claim 1, in which the lining member (5) has a supporting member (34) of linear expansion coefficient equal to or less than that thereof adhered to a circumference thereof.
Claim 4
Dependent Claim
77 words
An acceleration sensor of the character claimed in Claim 1, in which the piezoelectric member (1) of the piezoelectric device (6) has a pair of electrodes, including a positive electrode (2) and a negative electrode (3), provided on one side thereof, and a neutral electrode (4) provided on the other side thereof, the neutral electrode (4) having the lining member (5) adhered thereto, the lining member (5) having the supporting member (34) adhered to a circumference thereof.
Claim 5
Dependent Claim
102 words
An acceleration sensor according to Claim 1, in which an output of the piezoelectric device (6) is connected to an impedance converter (20), a by-pass filter (21), and an amplifier section (23) of the signal processing electronic circuit (8), the by-pass filter (21) and the amplifier section (23) having a muting section (Mc 22), a power circuit (30) provided to supply power to the circuits mentioned above, and an output of the amplifier section (23), an input of the power circuit (30), and a signal ground of the signal processing electronic circuit (8) having feed-through capacitors (26), (25), and (27) inserted respectively.
Claim 6
Dependent Claim
21 words
An acceleration sensor according to Claim 1, in which the piezoelectric member (1) is formed of a high polymer piezoelectric material.
Claim 7
Dependent Claim
34 words
An acceleration sensor according to Claim 1, in which the piezoelectric member (1) has a positive electrode (2) provided on one side thereof and a negative electrode (3) provided on the other side thereof.
Claim 8
Dependent Claim
42 words
An acceleration sensor according to Claim 1, in which the piezoelectric member (1) has the positive electrode (2) provided on a central portion of one side thereof and the negative electrode (3) provided on a circumferential portion of the other side thereof.
Claim 9
Dependent Claim
38 words
An acceleration sensor according to Claim 2, in which the lining member (5), the supporting member (34), and circuit substrate (7) have respective communication holes so that a space enclosed by them can communicate with an outside environment.
Claim 10
Dependent Claim
19 words
An acceleration sensor according to Claim 8, in which the circuit substrate (7) has feed-through holes (17) and (18).
Claim 11
Dependent Claim
106 words
An acceleration sensor comprising; a piezo electric device (6) comprised of a pieze electric member (1) having one or moreelectrodes formed on either side thereof, lining means (5) having a low linear coefficient of exapnsion lorded to one side of said piezoelectric member (1). circuit substrate means (7) having a low linear expansion coefficient. bonding means adhereing said piezoelectric oscillator device (6) to said circuit substrate means (7), enclosure means adhereing an internal conductive rersin layer (10), an adiabatic resin layer (9), and an outer metallic layer entirely enclosing said piezoelectric oscillator device (6) and circuit substdate means (7), whereby a stable ocillation sensor is formed.
Claim 12
Dependent Claim
106 words
An acceleration sensor comprising; a piezo electric device (6) comprised of a pieze electric member (1) having one or moreelectrodes formed on either side thereof, lining means (5) having a low linear coefficient of exapnsion lorded to one side of said piezoelectric member (1). circuit substrate means (7) having a low linear expansion coefficient. bonding means adhereing said piezoelectric oscillator device (6) to said circuit substrate means (7), enclosure means adhereing an internal conductive rersin layer (10), an adiabatic resin layer (9), and an outer metallic layer entirely enclosing said piezoelectric oscillator device (6) and circuit substdate means (7), whereby a stable ocillation sensor is formed.
Claim 13
Dependent Claim
34 words
The sendor according to claim 10 inwhich said lining means 5includes circumferential support means, said circumferential support means (34) having a linear coefficient of expansion equal to or less than the lining means (5).
Claim 14
Dependent Claim
77 words
The sendor according to claim 10 inwhich said piezoelectric m ember (1) has a pair of electrodes (2, 3) provided on one side thereof, o ne of said electrodes being a positive electrode (2) and the other being a negative electrode (3) and a neutral electrode (4) on the other side opposite said pair of electrodes (2, 3), said lining means (5) with said circumferential support (34) being adhered to the side with said neutral electrode (4).
Claim 15
Dependent Claim
85 words
The sendor according to claim 10 inwhich an output terminal of said piezoelectric oscillator is connected to a signal processing circuit (8) composed an impedance converter (20), a by-pass filter (21) and an amplifier (23), said amplifier (23) having muting means (Mc 22), power supply means (30) providing power to said signal processing circuit, and three feed through capacitors (25, 26, 27), connected to the output of said amplifier (23), the input of power supply means (30) and signal ground of signal processing circuit (8).
Claim 16
Dependent Claim
19 words
The sendor according to claim 10 inwhich said piezo electric member is comprised of a high polymer piezoelectric material.
Claim 17
Dependent Claim
28 words
The sendor according to claim 10 inwhich said electrodes comprise a positive electrode (2) on one side of said piezoelectric member and a negative electrode on the other.
Claim 18
Dependent Claim
35 words
The sendor according to claim 10 inwhich said electrodes comprise a centrally located positive electrode (2) on one side of said piezoelectric member and a circumferential negative electrode (3) around said centrally located electrode (2).
Claim 19
Dependent Claim
36 words
The sendor according to claim 11 inwhich said lining means (5), said supporting means (34) and said circuit substrate (7) have respective communication holes to allow the space between them to communicate with an outside environment.
Claim 20
Dependent Claim
17 words
The sendor according to claim 18 inwhich said circuit substrate (7) has feed through holes (17, 18).
References Cited (Backward Citations)
No citation records indexed.
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