Patent EP0388972A2 successfully refreshed from Google Patents.
EP0388972A2
Expired / Lapsed
EP
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Apparatus for grinding semiconductor wafer
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1990-03-23
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Granted: —
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Expires: 2010-03-23
Abstract
Abstract This invention relates to an apparatus for grinding a semiconductor wafer (W) which includes a table (2) having a work stage (10) on which a semiconductor wafer to be ground is placed, at least the work stage being rotated, and a grinding wheel (3) which is moved in a direction perpendicular to or parallel to the work stage while being rotated about an axis parallel to a rotational axis of the work stage (10). In this apparatus, a semiconductor wafer (W) is cooled during grinding. In order to perform cooling, the apparatus has an inlet flow path (21, 22) for guiding cooling liquid to a grinding surface (S) of the semiconductor wafer (W), and an outlet flow path (13, 23, 24) for collecting the cooling liquid flowed onto the work stage. The apparatus also includes temperature detector (32), arranged in the outlet flow path (13, 23, 24), for detecting a temperature of the recovered cooling liquid. The rotational speed of the grinding wheel (3) or the rotary table (2) is controlled based on the temperature of the cooling liquid detected by the temperature detector (32).
Inventors
- 👤 Masanori C/O Yokohama Works Of Nishiguchi
- 👤 Noboru C/O Yokohama Works Of Gotoh
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 13:22
CPC Classifications
B; B24; B24B; B24B7/00; B24B7/20; B24B7/22; B24B7/228; B24B37/00; B24B37/04; B24B55/00; B24B55/02
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
109 words
An apparatus for grinding a semiconductor wafer, comprising: a table having a work stage on which a semiconductor wafer to be ground is placed, at least said work stage being rotated; a grinding wheel which is moved in a predetermined direction to said work stage while being rotated about an axis parallel to a rotational axis of said work stage; an inlet flow path for guiding cooling liquid to a grinding stage of said semiconductor wafer; an outlet flow path for collecting the cooling liquid flowed onto said work stage; and temperature detection means, arranged in said outlet flow path, for detecting a temperature of the collected cooling liquid.
Claim 2
Independent Claim
109 words
An apparatus for grinding a semiconductor wafer, comprising: a table having a work stage on which a semiconductor wafer to be ground is placed, at least said work stage being rotated; a grinding wheel which is moved in a predetermined direction to said work stage while being rotated about an axis parallel to a rotational axis of said work stage; an inlet flow path for guiding cooling liquid to a grinding stage of said semiconductor wafer; an outlet flow path for collecting the cooling liquid flowed onto said work stage; and temperature detection means, arranged in said outlet flow path, for detecting a temperature of the collected cooling liquid.
Claim 3
Dependent Claim
26 words
An apparatus according to claim 1, further comprising another temperature detection means, arranged in said inlet flow path, for detecting a temperature of supplied cooling liquid.
Claim 4
Dependent Claim
34 words
An apparatus according to claim 1, further comprising a circulating flow path for causing an upstream side portion of said inlet flow path to communicate with a downstream portion of said outlet flow path.
Claim 5
Dependent Claim
17 words
An apparatus according to claim 3, wherein a liquid pump is arranged in said circulating flow path.
Claim 6
Dependent Claim
16 words
An apparatus according to claim 3, wherein a filter is arranged in said circulating flow path.
Claim 7
Dependent Claim
20 words
An apparatus according to claim 3, wherein a heat exchanger or a radiator is arranged in said circulating flow path.
Claim 8
Dependent Claim
18 words
An apparatus according to claim 3, wherein a cooling liquid tank is provided to said circulating flow path.
Claim 9
Dependent Claim
49 words
An apparatus according to claim 1, further comprising control means for determining a control amount of at least one of a flow rate of the cooling liquid, a rotational speed of said grinding wheel, a moving speed of said grinding wheel, and a rotational speed of said work stage.
Claim 10
Dependent Claim
39 words
An apparatus according to claim 8, wherein a flow control valve is arranged in said inlet flow path, and said control means comprises a microcomputer for controlling the flow rate of the cooling liquid using said flow control valve.
Claim 11
Dependent Claim
22 words
An apparatus according to claim 8, wherein said control means comprises a microcomputer for controlling the rotational speed of said grinding wheel.
Claim 12
Dependent Claim
22 words
An apparatus according to claim 8, wherein said control means comprises a microcomputer for controlling the moving speed of said grinding wheel.
Claim 13
Dependent Claim
22 words
An apparatus according to claim 8, wherein said control means comprises a microcomputer for controlling the rotational speed of said work stage.
Claim 14
Dependent Claim
17 words
An apparatus according to claim 1, further comprising cooling liquid collecting means arranged around said work stage.
Claim 15
Dependent Claim
68 words
An apparatus according to claim 13, wherein said cooling liquid collecting means comprises: a peripheral wall formed by projecting a peripheral edge portion of said work stage upward; a communication flow path for causing an inner stage of said peripheral wall to communicate with a discharge port formed in a side surface of said table; and a liquid gutter arranged along a rotational pipe of said discharge port.
Claim 16
Dependent Claim
37 words
An apparatus according to claim 13, wherein said cooling liquid collecting means comprises: a collar-like drip-proof cover surrounding said table; and a liquid gutter for collecting the cooling liquid guided outside said table by said drip-proof cover.
Claim 17
Dependent Claim
23 words
An apparatus according to claim 14 or 15, wherein said liquid gutter is mounted on a side table arranged to surround said table.
References Cited (Backward Citations)
No citation records indexed.
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