Patent EP0382984A1 successfully refreshed from Google Patents.
EP0382984A1
Expired / Lapsed
EP
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Thermal decomposition trap
Assignee: Air Liquide SA
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Filing: 1989-02-13
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Granted: —
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Expires: 2009-02-13
Abstract
Abstract A thermal decomposition trap includes a trap main body (21) having an inlet port (26) for supplying a gas to be thermally decomposed and an outlet port (27) for exhausting the gas, and a heater (23, 25) for heating the gas supplied in the trap main body (21). An oil trap (28) containing an oil and having an oil discharge port (29) and a valve (V3) connected thereto is formed on a bottom portion of the trap main body (21). Particles generated by thermal decomposition of the gas are precipitated in the oil in the oil trap (28). The oil containing the particles is easily discharged in a short time period by opening the valve (V3) mounted on the oil discharge port (29). An oil-free auxiliary pump is arranged between a reaction chamber and the thermal decomposition trap, whereby an exhaust rate in the reaction chamber is not reduced regardless of the arrangement of the thermal decomposition trap.
Inventors
- 👤 Ikuo Hirase
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-24 11:28
CPC Classifications
B; B01; B01D; B01D53/00; B01D53/34; B01D53/46; B01D53/68; B01D53/72
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
82 words
A thermal decomposition trap comprising a trap main body (21) having an inlet port (26) for supplying a gas to be thermally decomposed and an outlet port (27) for exhausting the gas, and heating means (23, 25) for heating the gas supplied in said trap main body (21), characterized in that an oil trap containing an oil and having an oil discharge port (29) and a valve (V3) connected thereto is formed on a bottom portion of said trap main body (21).
Claim 2
Dependent Claim
82 words
A thermal decomposition trap comprising a trap main body (21) having an inlet port (26) for supplying a gas to be thermally decomposed and an outlet port (27) for exhausting the gas, and heating means (23, 25) for heating the gas supplied in said trap main body (21), characterized in that an oil trap containing an oil and having an oil discharge port (29) and a valve (V3) connected thereto is formed on a bottom portion of said trap main body (21).
Claim 3
Dependent Claim
28 words
A trap according to claim 1, characterized in that said heating means (23, 25) are located at a central portion of and around said trap main body (21).
Claim 4
Dependent Claim
21 words
A trap according to claim 1, characterized in that metal mesh plates (24) are located in said trap main body (21).
Claim 5
Dependent Claim
21 words
A trap according to claim 1, characterized in that said thermal decomposition trap has an inert gas supply inlet port (34).
Claim 6
Dependent Claim
27 words
A trap according to claim 1, characterized in that cooling means (31) is located around said oil trap (28) to prevent evaporation and decomposition of the oil.
Claim 7
Dependent Claim
166 words
A thermal decomposition apparatus comprising a reaction chamber (42), a thermal decomposition trap (41) for thermally decomposing a gas from said reaction chamber (42), and an oil-free auxiliary pump (44) and a main pump (45) for exhausting said reaction chamber (42), characterized in that said thermal decomposition trap (41) comprises a trap main body (21) having an inlet port (26) for supplying a gas to be thermally decomposed and an outlet port (27) for exhausting the gas, heating means (23, 25) for heating the gas supplied in said trap main body (21), and an oil trap (28), mounted on a bottom portion of said trap main body (21), containing an oil, and having an oil discharge port (29) and a valve (V3) connected thereto, said auxiliary pump (44) is connected to an outlet port of said reaction chamber (42) and said inlet port of said thermal decomposition trap (41), and said main pump (45) is connected to said outlet port of said thermal decomposition trap (41).
Claim 8
Dependent Claim
166 words
A thermal decomposition apparatus comprising a reaction chamber (42), a thermal decomposition trap (41) for thermally decomposing a gas from said reaction chamber (42), and an oil-free auxiliary pump (44) and a main pump (45) for exhausting said reaction chamber (42), characterized in that said thermal decomposition trap (41) comprises a trap main body (21) having an inlet port (26) for supplying a gas to be thermally decomposed and an outlet port (27) for exhausting the gas, heating means (23, 25) for heating the gas supplied in said trap main body (21), and an oil trap (28), mounted on a bottom portion of said trap main body (21), containing an oil, and having an oil discharge port (29) and a valve (V3) connected thereto, said auxiliary pump (44) is connected to an outlet port of said reaction chamber (42) and said inlet port of said thermal decomposition trap (41), and said main pump (45) is connected to said outlet port of said thermal decomposition trap (41).
Claim 9
Dependent Claim
17 words
An apparatus according to claim 6, characterized in that said main pump (45) comprises a rotary pump.
Claim 10
Dependent Claim
23 words
An apparatus according to claim 6, characterized in that said auxiliary pump (44) comprises a mechanical booster pump or a turdo molecular pump.
Claim 11
Dependent Claim
26 words
An apparatus according to claim 6, characterized in that an oil trap (43) is located between said thermal decomposition trap (41) and said main pump (45).
References Cited (Backward Citations)
No citation records indexed.
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