Patent EP0380138A2 successfully refreshed from Google Patents.
EP0380138A2
Expired / Lapsed
EP
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Method of forming optical waveguide
Assignee: Nippon Sheet Glass Co Ltd
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Filing: 1990-01-26
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Granted: —
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Expires: 2010-01-26
Abstract
Abstract The present invention relates to an optical wave guide formed by implanting at least two ionic species capable of forming an oxide, a nitride or a halide into the surface of a substrate (1).
Inventors
- 👤 Keiji C/O Nippon Sheet Glass Co. Ltd. Oyoshi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 23:41
CPC Classifications
C; C03; C03C; C03C23/00; C03C23/0005; C03C23/0055; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/134; G02B6/1347
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
37 words
A method of forming an optical waveguide, comprising a step of implanting at least two ionic species into the surface of a substrate, said ionic species being capable of forming an oxide, a nitride or a halide.
Claim 2
Independent Claim
37 words
A method of forming an optical waveguide, comprising a step of implanting at least two ionic species into the surface of a substrate, said ionic species being capable of forming an oxide, a nitride or a halide.
Claim 3
Dependent Claim
15 words
A method according to claim 1, wherein said ionic species are silicon and nitrogen ions.
Claim 4
Dependent Claim
15 words
A method according to claim 1, wherein said ionic species are titanium and oxygen ions.
Claim 5
Dependent Claim
15 words
A method according to claim 1, wherein said ionic species are aluminum and nitrogen ions.
Claim 6
Dependent Claim
15 words
A method according to claim 1, wherein said ionic species are lithium and chlorine ions.
Claim 7
Dependent Claim
39 words
A method according to claim 1 further comprising steps of covering said substrate with a mask material and forming openings for a waveguide pattern in said mask material, said ionic species being implanted into said substrate through said openings.
Claim 8
Dependent Claim
63 words
A method according to claim 1 further comprising steps of covering said substrate with a mask material, forming openings for a waveguide pattern in said mask material, and removing said mask material, one of said ionic species being implanted into said substrate through said openings and the other being implanted into the entire surface of said substrate after said mask material is removed.
Claim 9
Dependent Claim
18 words
A method according to claim 1, wherein said ionic species are implanted by using a converging ion beam.
Claim 10
Dependent Claim
33 words
A method according to claim 1, wherein one of said ionic species is implanted by using a converging ion beam and then the other is implanted into the entire surface of said substrate.
References Cited (Backward Citations)
No citation records indexed.
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