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Semiconductor integrated circuit device of standard cell system

Assignee: Toshiba Corp
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Filing: 1989-12-19
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Granted: —
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Expires: 2009-12-19
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Abstract

Abstract A semiconductor integrated circuit device of a standard cell system of this invention includes a cell array (12₁, 12₂) constituted by linearly arranging a plurality of cells each having a predetermined unit logical function. A Vcc power supply line (14₁, 14₂) and a GND power supply line (16₁, 16₂) are formed of a first aluminum layer, to supply a power supply voltage to the cells in the cell arrays (12₁, 12₂). Power supply buses (28₁, 28₂, 30₁, 30₂) formed of a second aluminum layer are arranged on both the ends of the Vcc power supply line (14₁, 14₂) and the GND power supply line (16₁, 16₂) through a via hole (32, 34), in a direction perpendicular to the Vcc power supply line (14₁, 14₂) and the GND power supply line (16₁, 16₂). A Vcc power supply line (36₁, 36₂), and a GND power supply line (38₁, 38₂) formed of a third aluminum layer are arranged on the Vcc power supply line (14₁, 14₂) and the GND power supply line (16₁, 16₂) at a central portion of the cell array (12₁, 12₂), through a via hole (40, 42), and extend in the same direction as the Vcc power supply lines (14₁, 14₂) and the GND power supply line (16₁, 16₂), both mode of the first aluminum layer. Two systems of GND power supply lines (16₁, 16₂, 38₁, 38₂) allow a decrease in current density.

Inventors

  • 👤 Makoto C/O Intellectual Property Division Noda
  • 👤 Kazuhiro C/O Intellectual Property Division Suda

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-09 19:43
CPC Classifications
H; H10; H10D; H10D89/00; H10D89/10; H10W; H10W20/00; H10W20/01; H10W20/40; H10W20/41; H10W20/427

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 183 words
A semiconductor integrated circuit device of a standard cell system, comprising a cell array consti­tuted by linearly arranging a plurality of cells each having a predetermined unit logical function, a first power supply line which is connected to each of said cells to supply a power supply voltage to said each cell in said cell array, is formed of a first conductor layer, and elongates in a first direction, and a second power supply line which is electrically connected to said first power supply line, is formed of a second con­ductor layer on said first power supply line, and elongates in a second direction perpendicular to said first power supply line, characterized by comprising, a third power supply line (36₁, 36₂, 38₁, 38₂) which is electrically connected to said first power supply line (14₁, 14₂, 16₁, 16₂) to supply a power supply voltage to each of said cells in said cell array (12₁, 12₂), is formed of a third conductor layer on said second conductor layer, and elongates in a third direc­tion perpendicular to said second power supply line (28₁, 28₂, 30₁, 30₂).
Claim 2
Dependent Claim 183 words
A semiconductor integrated circuit device of a standard cell system, comprising a cell array consti­tuted by linearly arranging a plurality of cells each having a predetermined unit logical function, a first power supply line which is connected to each of said cells to supply a power supply voltage to said each cell in said cell array, is formed of a first conductor layer, and elongates in a first direction, and a second power supply line which is electrically connected to said first power supply line, is formed of a second con­ductor layer on said first power supply line, and elongates in a second direction perpendicular to said first power supply line, characterized by comprising, a third power supply line (36₁, 36₂, 38₁, 38₂) which is electrically connected to said first power supply line (14₁, 14₂, 16₁, 16₂) to supply a power supply voltage to each of said cells in said cell array (12₁, 12₂), is formed of a third conductor layer on said second conductor layer, and elongates in a third direc­tion perpendicular to said second power supply line (28₁, 28₂, 30₁, 30₂).
Claim 3
Dependent Claim 41 words
A device according to claim 1, characterized in that said first power supply line (14₁, 14₂, 16₁, 16₂) is directly connected to said second power supply lines (28₁, 28₂, 30₁, 30₂) and said third power supply lines (36₁, 36₂, 38₁, 38₂).
Claim 4
Dependent Claim 78 words
A device according to claim 2, characterized in that a via hole (32, 34) for connecting said first and second power supply lines (14₁, 14₂, 16₁, 16₂, 28₁, 28₂, 30₁, 30₂) is arranged at an end portion of said cell array (12₁, 12₂), and a via hole (40, 42) for connecting said first and third power supply lines (14₁, 14₂, 16₁, 16₂, 36₁, 36₂, 38₁, 38₂) is arranged at a central por­tion of said cell array (12₁, 12₂).
Claim 5
Dependent Claim 42 words
A device according to claim 2, characterized in that the first direction along which said first power supply line (14₁, 14₂, 16₁, 16₂) elongates is identical to the third direction along which said third power supply line (36₁, 36₂, 38₁, 38₂) elongates.
Claim 6
Dependent Claim 63 words
A device according to claim 3, characterized in that said cell array (12₁, 12₂) includes at least one dummy cell (52₁, 52₂) without a predetermined unit logi­cal function, and said via hole (40, 42) for connecting said first power supply line (14₁, 14₂, 16₁, 16₂) and said third power supply line (36₁, 36₂, 38₁, 38₂) is arranged on said dummy cell (52₁, 52₂).
Claim 7
Dependent Claim 88 words
A device according to claim 5, characterized in that said dummy cell (52₁, 52₂) is arranged at a central portion of said cell array (12₁, 12₂), hence said via hole (40, 42) for connecting said first and third power supply lines is arranged at a central portion of said cell array (12₁, 12₂), and said via hole (32, 34) for connecting said first and second power supply lines (14₁, 14₂, 16₁, 16₂, 28₁, 28₂, 30₁, 30₂) is arranged at an end portion of said cell array (12₁, 12₂).
Claim 8
Dependent Claim 50 words
A device according to claim 2, characterized in that each of said first, second, and third power supply lines (14₁, 14₂, 16₁, 16₂, 28₁, 28₂, 30₁, 30₂, 36₁, 36₂, 38₁, 38₂) includes a supply line for supplying a power supply voltage, and a feedback line for feeding back a current.
Claim 9
Dependent Claim 55 words
A device according to claim 1, characterized in that said second power supply line (28₁, 28₂, 30₁, 30₂) is directly connected to said first power supply line (14₁, 14₂, 16₁, 16₂), and said third power supply line (36₁, 36₂, 38₁, 38₂) is directly connected to only said second power supply line (28₁, 28₂, 30₁, 30₂).
Claim 10
Dependent Claim 94 words
A device according to claim 8, characterized in that each of said second and third power supply lines (28₁, 28₂, 30₁, 30₂, 36₁, 36₂, 38₁, 38₂) has a via hole (44, 46, 48, 50) for connecting power supply lines, and said first power supply line (14₁, 14₂, 16₁, 16₂), is connected to said second power supply line (28₁, 28₂, 30₁, 30₂) through said via hole (44, 46), said second power supply line (28₁, 28₂, 30₁, 30₂) is connected to said third power supply line (36₁, 36₂, 38₁, 38₂) through said via hole (48, 50).
Claim 11
Dependent Claim 72 words
A device according to claim 8, characterized in that the first direction along which said first power supply line (14₁, 14₂, 16₁, 16₂) elongates is identical to the third direction along which said third power supply line (36₁, 36₂, 38₁, 38₂) elongates, and each of said first, second, and third power supply lines includes a supply line for supplying a power supply voltage, and a feedback line for feeding back a current.

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