Patent EP0366259A2 successfully refreshed from Google Patents.
EP0366259A2
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A process for interconnecting thin-film electrical circuits
Assignee: International Business Machines Corp
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Filing: 1989-09-21
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Granted: —
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Expires: 2009-09-21
Abstract
Abstract Thin-film electrical circuits are interconnected by a process comprising the steps of partially ablating the existing thin-film conductor at the connection point(s) by means of a pulsed laser and then depositing a thin-film metal interconnection over the desired area, which includes the area(s) of the existing thin-film circuit that were exposed to the pulsed laser.
Inventors
- 👤 Thomas Hall Baum
- 👤 Paul Brian Comita
- 👤 Robert Lloyd Jackson
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 16:10
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/22; H05K3/225; H05K3/46; H05K3/4644; H05K3/467; H10; H10D; H10D84/00; H10D84/01; H10D86/00; H10D86/01; H05K2201/00; H05K2201/03; H05K2201/0302; H05K2201/0317; H05K2203/00; H05K2203/03; H05K2203/0361; H05K2203/10; H05K2203/107; H05K2203/13; H05K2203/1333; H05K2203/1338; H05K2203/17; H05K2203/173; H05K3/02; H05K3/027
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
39 words
A process for interconnecting thin-film electrical circuits, the process comprising the steps of partially ablating the metallurgy at the interconnection points by means of a pulsed laser, and then depositing metal to form an interconnection of the desired dimensions.
Claim 2
Dependent Claim
39 words
A process for interconnecting thin-film electrical circuits, the process comprising the steps of partially ablating the metallurgy at the interconnection points by means of a pulsed laser, and then depositing metal to form an interconnection of the desired dimensions.
Claim 3
Dependent Claim
20 words
A process as claimed in Claim 1, where the interconnection is made for the purpose of repairing an open defect.
Claim 4
Dependent Claim
18 words
A process as claimed in Claim 1 or Claim 2, where the pulsed laser is an excimer laser.
Claim 5
Dependent Claim
19 words
A process as claimed in Claim 3, where the pulsed laser is an excimer laser operating at 308 nm.
Claim 6
Dependent Claim
19 words
A process as claimed in any preceding Claim, where the interconnection metallurgy is deposited by laser chemical vapour deposition.
Claim 7
Dependent Claim
18 words
A process as claimed in Claim 5, where the metal is gold deposited from a dimethyl gold β-diketonate.
Claim 8
Dependent Claim
17 words
A process as claimed in Claim 5, where the metal is copper deposited from a copper β-diketonate.
References Cited (Backward Citations)
No citation records indexed.
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