Patent EP0362811B1 successfully refreshed from Google Patents.
EP0362811B1
Expired / Lapsed
EP
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Polishing apparatus
Assignee: Shin-Etsu Handotai Co Ltd
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Filing: 1989-10-04
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Granted: 1994-01-12
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Expires: 2009-10-04
Abstract
No abstract record available.
Inventors
- 👤 Kouichi Tanaka
- 👤 Isao Uchiyama
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 13:39
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/27; B24B37/30
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
267 words
A polishing apparatus for polishing a surface of an object (3) to be polished using a relative frictional movement between said object (3) and a polishing cloth (1), said apparatus comprising: a plate (11) adaptable to have at least one object (3) to be polished secured at an underside thereof; a head section (12) surrounding said plate with a predetermined gap (15) therebetween; pressure applying means, disposed in an inner space of said head section (12), for applying a pressing force to an upside of said plate (11); and holding means (14), disposed in said inner space and movable in a pressure applying direction, for holding the underside plane of said plate (11) in coincidence with the surface of the polishing cloth (1), characterized in that: said holding means (14) is attached in such a manner as to surround an entire periphery of said plate (11) or attached at proper intervals to radially symmetrical positions on a circumference of said plate (11), and an apex of an imaginary cone including said holding means (14) or an intersecting point formed by imaginary lines extending from said attaching positions (14a, 14b) of said holding means (14) on said head section (12) and said plate (11) substantially lies on or at a point lower than a polishing surface (1a) of said object (3) to be polished; and wherein an attaching position (14a) of said holding means (14) on an outer surface of said plate (11) is set at a point lower than an attaching position (14b) of said holding means (14) on said inner surface of said head section (12).
Claim 2
Dependent Claim
32 words
A polishing apparatus according to claim 1, wherein said holding means (14) is formed of an essentially non-shrinkable but still flexible member of a film shape, thread shape or a similar shape.
Claim 3
Dependent Claim
32 words
A polishing apparatus according to claim 1, wherein said attaching position (14a) of said holding means (14) on said outer surface of said plate (11) is on said upside of said plate.
Claim 4
Dependent Claim
74 words
A polishing apparatus according to claim 1, wherein said pressure applying means is constituted by either one or a combination of means for applying a load or pressure uniformly over the entire upside surface of said plate (11) or at a load center of said plate (11) and pressure applying means with a pressure adjusting mechanism (17) or pressure applying means formed with that space above said upside of said plate being sealed airtight.
Claim 5
Dependent Claim
28 words
A polishing apparatus according to claim 1, wherein said pressure applying means and said holding means are constituted as one means by one or a plurality of members.
Claim 6
Dependent Claim
48 words
A polishing apparatus according to claim 1, said apparatus comprising: a plurality of plates (51) each adaptable to have at least one object (3) to be polished secured to an underside thereof; a support member (52) surrounding said plurality of plates by way of respective predetermined gaps therebetween.
Claim 7
Dependent Claim
84 words
A polishing apparatus according to claim 6, wherein pressure applying means for applying a pressing force toward said object (3) to be polished from the upside of said plurality of plates (51) is provided as static pressure in a gas-tight space, and an attaching position of each of said flexible members on an outer surface of said associated plate (51) is set at a position lower than an attaching position of that flexible member (54) on an inner surface of said support member (52).
References Cited (Backward Citations)
No citation records indexed.
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