Light-sensitive composition

Claim 2

A positive working light-sensitive composition comprising (a) a compound capable of generating an acid through irradiation with actinic rays or radiant rays and (b) an organic polysiloxane compound having linear one-dimensional, branched or ladder type two-dimensional and/or three-dimensional network structures.

Claim 3

The positive working light-sensitive composition of claim 1 wherein the organopolysiloxane compound (b) is selected from those obtained by hydrolyzing or alkoxylating a compound represented by the following general formula (I), (II), (III), (IV) or (V) or a combination thereof and then condensing the resultant product: wherein R₁ to R₇, R₉ to R₁₁, R₁₃ and R₁₄ may be the same or different and each represents a hydrogen atom or an alkyl, substituted alkyl, substituted aryl, alkenyl, substituted alkenyl, silyl, substituted silyl, siloxy or substituted siloxy group; R₈, R₁₂ and R₁₅ may be the same or different and each represents a single bond or a bivalent alkylene, substituted alkylene, arylene or substituted arylene group; and X represents a hydrolyzable group.

Claim 4

The positive working light-sensitive composition of claim 2 wherein R₁ to R₇, R₉ to R₁₁, R₁₃ and R₁₄ each represents a hydrogen atom; an alkyl group having 1 to 10 carbon atoms which may be substituted with halogen atoms, alkoxy groups having 1 to 6 carbon atoms, aryl groups and/or aryloxy groups; a monocyclic or bicyclic aryl group which may be substituted with alkyl groups having 1 to 6 carbon atoms, alkoxy groups having 1 to 6 carbon atoms, halogen atoms, nitro group, phenyl group, carboxyl group, hydroxyl group, amido group, imido group and/or cyano group; a vinyl group which may be substituted with an aryl group; a silyl group which may be substituted with alkyl groups and/or aryl groups; or a substituted or unsubstituted siloxy group; R₈, R₁₂ and R₁₅ each represents a single bond, a linear, branched or cyclic alkylene group having 1 to 10 carbon atoms which may be substituted with halogen atoms, alkoxy groups having 1 to 6 carbon atoms and/or aryloxy groups having 6 to 10 carbon atoms; or a monocyclic or bicyclic arylene group which may be substituted with alkyl groups having 1 to 6 carbon atoms, alkoxy groups having 1 to 6 carbon atoms and/or halogen atoms; and X represents a halogen atom, an alkoxy group having 1 to 10 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, an acyloxy group having 1 to 10 carbon atoms, an oxime group having 1 to 6 carbon atoms or an amido, ureido or amino group.

Claim 5

The positive working light-sensitive composition of claim 2 wherein the organopolysiloxane compound (b) is selected from the group consisting of those having a structure composed of one or more repeating units represented by the following general formulas (VI) to wherein R₁₆ to R₁₉ , R₂₁ to R₂₆ , R₂₈ and R₂₉ may be the same or different and each has the same meanings as defined above in connection with R₁ to R₇, R₉ to R₁₁, R₁₃ and R₁₄; and R₂₀, R₂₇ and R₃₀ may be the same or different and each has the same meanings as defined above in connection with R₈, R₁₂ and R₁₅.

Claim 6

The positive working light-sensitive composition of claim 1 wherein the weight-average molecular weight of the organopolysiloxane compound is not less than 500.

Claim 7

The positive working light-sensitive composition of claim 5 wherein the weight-average molecular weight of the organopolysiloxane compound ranges from 1,000 to 500,000.

Claim 8

The positive working light-sensitive composition of claim 1 wherein the compound capable of generating an acid through irradiation with actinic rays or radiant rays is selected from the group consisting of: (1) oxadiazole derivatives and s-triazine derivatives represented by the following general formulas (XXI) and (XXII) respectively which are substituted with a trihalomethyl group: wherein Y represents a halogen atom, provided that three Y's may be the same or different; R₃₁ represents a substituted or unsubstituted aryl or alkenyl group; and R₃₂ represents R₃₁, -CY₃ or a substituted or unsubstituted alkyl group; (2) iodonium and sulfonium salts represented by the following gerneral formulas (XXIII) and (XXIV) respectively: wherein Ar₁ and Ar₂ may be the same or different and each represents an aromatic group which may be substituted with alkyl, haloalkyl, cycloalkyl, aryl, alkoxy, nitro, carbonyl, alkoxycarbonyl, hydroxyl and/or mercapto groups and/or halogen atoms; R₃₃, R₃₄ and R₃₅ may be the same or different and each represents an alkyl group having 1 to 8 carbon atoms which may be substituted with alkoxy groups having 1 to 8 carbon atoms, carbonyl group and/or alkoxycarbonyl groups or an aryl group having 6 to 14 carbon atoms which may be substituted with alkoxy groups having 1 to 8 carbon-atoms, alkyl groups having 1 to 8 carbon atoms, nitro group, carbonyl group, hydroxyl group and/or halogen atoms; and Z ⁻ represents BF₄⁻ , PF₆ ⁻ , AsF₆ ⁻ , SbF₆⁻ , C ℓ O₄⁻ or CF₃SO₃⁻ , provided that two of R₃₃, R₃₄ and R₃₅, and Ar₁ and Ar₂ may be bonded through a single bond or a substituent; (3) disulfone derivatives and imidosulfonate derivatives represented by the following general formulas (XXV) and (XXVI) respectively: Ar₃ - SO₂ - SO₂ - Ar₄      (XXV) wherein Ar₃ and Ar₄ may be the same or different and each represents a substituted or unsubstituted aryl group; R₃₆ represents a substituted or unsubstituted alkyl or aryl group and A represents a substituted or unsubstituted alkylene, alkenylene or arylene group; and (4) diazonium salts represented by the following general formula (XXVII): Ar₅ - N₂⁺ Z ⁻      (XXVII) wherein Ar₅ represents a substituted or unsubstituted aromatic group; and Z ⁻ represents an organic sulfonate anion, an organic sulfate anion, an organic carboxylate anion, BF₄⁻ , PF₆ ⁻ , AsF₆ ⁻ , SbF₆ ⁻ or Cℓ O₄⁻ .

Claim 9

The positive working light-sensitive composition of claim 1 wherein the amount of the compound capable of generating an acid ranges from 0.001 to 40% by weight on the basis of the total weight of the solid contents of the composition.

Claim 10

The positive working light-sensitive composition of claim 8 wherein the amount of the compound capable of generating an acid ranges from 0.1 to 20% by weight on the basis of the total weight of the solid contents of the composition.

Claim 11

The positive working light-sensitive composition of claim 1 wherein it further comprises an alkali-soluble polymer.

Claim 12

The positive working light-sensitive composition of claim 10 wherein the alkali-soluble polymer is selected from the group consisting of those carrying active hydrogen atoms having a pKa value of not more than 11.

Claim 13

The positive working light-sensitive composition of claim 11 wherein the alkali-soluble polymer is selected from the group consisting of those carrying phenolic hydroxide, carboxyl, imido, sulfonamido, N-sulfonylamido, N-sulfonylurethane and/or active methylene groups.

Claim 14

The positive working light-sensitive composition of claim 10 wherein the alkali-soluble polymer is an alkali-soluble novolak type phenol resin.

Claim 15

The positive working light-sensitive composition of claim 10 wherein the amount of the alkali-soluble polymer ranges from 10 to 90% by weight based on the total weight of the solid contents of the light-sensitive composition.

Claim 16

The positive working light-sensitive composition of claim 10 wherein the amount of the alkali-soluble polymer ranges from 30 to 80% by weight based on the total weight of the solid contents of the light-sensitive composition.

Claim 17

The positive working light-sensitive composition of claim 1 wherein it comprises dyes, pigments, plasticizers and/or compounds capable of enhancing the acid generating efficiency of the compound capable of generating an acid.

Claim 18

The positive working light-sensitive composition of claim 16 wherein the acid generating efficiency enhancing compound is selected from anthracene, phenanthrene, perylene, pyrene, chrycene, 1,2-­benzanthracene, coronene, 1,6-diphenyl-1,3,5-hexatriene, 1,1,4,4-­ tetraphenyl-1,3-butadiene, 2,3,4,5-tetraphenyl furan, 2,5-­diphenylthiophene, thioxanthone, 2-chlorothioxanthone, phenothiazine, 1,3-diphenyl pyrazoline, 1,3-diphenyl isobenzofuran, xanthone, benzophenone, 4-hydroxybenzophenone, anthrone, ninhydrin, 9-fluorenone, 2,4,7-trinitrofluorenone, indanone, phenanthraquinone, tetralone, 7-­methoxy-4-methylcoumalin, 3-keto-bis(7-diethylaminocoumalin), Michler's ketone and ethyl Michler's ketone.

Claim 19

The positive working light-sensitive composition of claim 17 wherein the molar ratio of the acid generating efficiency enhancing compound to the compound capable of generating an acid ranges from 0.01/1 to 20/1.

Claim 20

The positive working light-sensitive composition of claim 1 wherein it comprises a cyclic anhydride and/or a filler.

Claim 21

The positive working light-sensitive composition of claim 19 wherein the amount of the cyclic anhydride ranges from 1 to 15% by weight on the basis of the total weight of the composition.