Patent EP0358513A2 successfully refreshed from Google Patents.
EP0358513A2
Expired / Lapsed
EP
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Position detecting method and apparatus
Assignee: Canon Inc
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Filing: 1989-09-07
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Granted: —
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Expires: 2009-09-07
Abstract
Abstract A device for detecting a positional relationship between opposed first and second objects, with respect to a first direction perpendicular to the opposing direction. The device includes a light source (ℓ1) for projecting light to the first (1) and second (2) objects, a photodetecting (4) portion for receiving light from one of the first and second objects irradiated with the light from the light source, the photodetecting portion being operable to detect a predetermined parameter related to the light which parameter is changeable with the positional relationship between the first and second objects with respect to the first direction, a first position detecting system for detecting a positional relationship between the first and second objects, with respect to a second direction perpendicular to the opposing direction of the first and second objects and having an angle with respect to the first direction, and a second position detecting system for detecting the positional relationship between the first and second objects with respect to the first direction, on the basis of the detection by the photodetecting system and the first position detecting system.
Inventors
- 👤 Jun Hattori
- 👤 Shigeyuki Suda
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 11:29
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7049
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
175 words
A device for detecting a positional relationship between opposed first and second objects, with respect to a first direction perpendicular to the opposing direction, said device comprising: light source means for projecting light to the first and second objects; photodetecting means for receiving light from one of the first and second objects irradiated with the light from said light source means, said photodetecting means being operable to detect a predetermined parameter related to the light which parameter is changeable with the positional relationship between the first and second objects with respect to said first direction; first position detecting means for detecting a positional relationship between the first and second objects, with respect to a second direction perpendicular to the opposing direction of the first and second objects and having an angle with respect to said first direction; and second position detecting means for detecting the positional relationship between the first and second objects with respect to said first direction, on the basis of the detection by said photodetecting means and said first position detecting means.
Claim 2
Independent Claim
175 words
A device for detecting a positional relationship between opposed first and second objects, with respect to a first direction perpendicular to the opposing direction, said device comprising: light source means for projecting light to the first and second objects; photodetecting means for receiving light from one of the first and second objects irradiated with the light from said light source means, said photodetecting means being operable to detect a predetermined parameter related to the light which parameter is changeable with the positional relationship between the first and second objects with respect to said first direction; first position detecting means for detecting a positional relationship between the first and second objects, with respect to a second direction perpendicular to the opposing direction of the first and second objects and having an angle with respect to said first direction; and second position detecting means for detecting the positional relationship between the first and second objects with respect to said first direction, on the basis of the detection by said photodetecting means and said first position detecting means.
Claim 3
Dependent Claim
32 words
A device according to Claim 1, wherein said photodetecting means detects the position of incidence of the light upon a predetermined plane and wherein said predetermined parameter is the position of incidence.
Claim 4
Independent Claim
217 words
A device for detecting a positional relationship between opposed first and second objects, with respect to a first direction perpendicular to the opposing direction, said device comprising: light source means for projecting light to the first and second objects; first photodetecting means for receiving light from one of the first and second objects irradiated with the light from said light source means, said photodetecting means being operable to detect the position of incidence of the light upon a predetermined plane, which position is changeable with the positional relationship between the first and second objects with respect to said first direction; second photodetecting means for receiving light from one of the first and second objects irradiated with the light from said light source means, said second photodetecting means being operable to detect the position of incidence of the light upon a predetermined plane, which position is changeable with a positional relationship between the first and second objects, with respect to a second direction perpendicular to the opposing direction of the first and second objects and having an angle with respect to said first direction; and position detecting means for detecting the positional relationship between the first and second objects with respect to said first direction, on the basis of the detection by said first and second photodetecting means.
Claim 5
Independent Claim
217 words
A device for detecting a positional relationship between opposed first and second objects, with respect to a first direction perpendicular to the opposing direction, said device comprising: light source means for projecting light to the first and second objects; first photodetecting means for receiving light from one of the first and second objects irradiated with the light from said light source means, said photodetecting means being operable to detect the position of incidence of the light upon a predetermined plane, which position is changeable with the positional relationship between the first and second objects with respect to said first direction; second photodetecting means for receiving light from one of the first and second objects irradiated with the light from said light source means, said second photodetecting means being operable to detect the position of incidence of the light upon a predetermined plane, which position is changeable with a positional relationship between the first and second objects, with respect to a second direction perpendicular to the opposing direction of the first and second objects and having an angle with respect to said first direction; and position detecting means for detecting the positional relationship between the first and second objects with respect to said first direction, on the basis of the detection by said first and second photodetecting means.
Claim 6
Dependent Claim
42 words
A device according to Claim 3, further comprising second position detecting means for detecting the positional relationship between the first and second objects with respect to said second direction, on the basis of the detection by said first and second photodetecting means.
Claim 7
Independent Claim
144 words
A method of detecting a positional relationship between opposed first and second objects, with respect to a first direction perpendicular to the opposing direction, said method comprising the steps of: projecting light to the first and second objects; receiving light from one of the first and second objects irradiated with the light and detecting a predetermined parameter related to the light which parameter is changeable with the positional relationship between the first and second objects with respect to said first direction; detecting a positional relationship between the first and second objects, with respect to a second direction perpendicular to the opposing direction of the first and second objects and having an angle with respect to said first direction; and detecting the positional relationship between the first and second objects with respect to said first direction, on the basis of the first and second detections.
Claim 8
Independent Claim
144 words
A method of detecting a positional relationship between opposed first and second objects, with respect to a first direction perpendicular to the opposing direction, said method comprising the steps of: projecting light to the first and second objects; receiving light from one of the first and second objects irradiated with the light and detecting a predetermined parameter related to the light which parameter is changeable with the positional relationship between the first and second objects with respect to said first direction; detecting a positional relationship between the first and second objects, with respect to a second direction perpendicular to the opposing direction of the first and second objects and having an angle with respect to said first direction; and detecting the positional relationship between the first and second objects with respect to said first direction, on the basis of the first and second detections.
Claim 9
Dependent Claim
197 words
Apparatus for the manufacture of semiconductor devices the kind which includes optical means for correctly positioning a mask and a wafer in relation to one another prior to the exposure of the wafer to a pattern on the mask said opticai means including a light source and means for forming at Ieast two beams of light one of which is reflected off the mask and the other of which is reflected off the wafer the two reflected beams being integrated to produce an error signal indicative of any misalignment of the mask and wafer with respect to one another in a plane substantially normal to the separation between the mask and the wafer, characterised in that the optical means inciudes a first detector for detecting the positional relationship between the mask and the wafer with respect to a first direction in the said plane and a second detector for detecting the positional relationship between the mask and the wafer in a second direction in the said plane the final error signal in respect of any misalignment in said first direction being produced on the basis of both the signals from the first detector and the second detector.
Claim 10
Dependent Claim
197 words
Apparatus for the manufacture of semiconductor devices the kind which includes optical means for correctly positioning a mask and a wafer in relation to one another prior to the exposure of the wafer to a pattern on the mask said opticai means including a light source and means for forming at Ieast two beams of light one of which is reflected off the mask and the other of which is reflected off the wafer the two reflected beams being integrated to produce an error signal indicative of any misalignment of the mask and wafer with respect to one another in a plane substantially normal to the separation between the mask and the wafer, characterised in that the optical means inciudes a first detector for detecting the positional relationship between the mask and the wafer with respect to a first direction in the said plane and a second detector for detecting the positional relationship between the mask and the wafer in a second direction in the said plane the final error signal in respect of any misalignment in said first direction being produced on the basis of both the signals from the first detector and the second detector.
References Cited (Backward Citations)
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