Patent EP0354769A2 successfully refreshed from Google Patents.
EP0354769A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Zinc oxide sintered body and preparation process thereof
Assignee: Tosoh Corp
•
Filing: 1989-08-09
•
Granted: —
•
Expires: 2009-08-09
Abstract
Abstract A zinc oxide sintered body contains an element having a valency of at least three positive valences, which has a sintered density of at least 5 g/cm<3> and a specific resistance lower than 1 OMEGA .cm. The zinc oxide sintered body is prepared by sintering zinc oxide containing the element having a valency of at least three positive valences at a temperature higher than 1,300 DEG C. When a mixture of a spinel structure oxide of the formula ZnX2O4 wherein X is an element having a valency of at least three positive valences, with zinc oxide, is sintered a sintered body having specific resistance lower than 10 m OMEGA .cm may be obtained. The zinc oxide sintered body is useful as the sputtering target for formation of a transparent electroconductive film.
Inventors
- 👤 Nobuhiro Ogawa
- 👤 Ichiro Harada
- 👤 Takashi Mori
- 👤 Hironori Baba
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 02:42
CPC Classifications
C; C04; C04B; C04B35/00; H; H05; H05B; H05B33/00; H05B33/12; H05B33/26; H05B33/28; C04B35/01; C04B35/453; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; H01; H01B; H01B1/00; H01B1/06; H01B1/08
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
37 words
A zinc oxide sintered body containing an element capable of having a valency of at least three positive valences which has a sintered density of at least 5 g/cm³ and a specific resistance lower than 1 Ω.cm.
Claim 2
Dependent Claim
37 words
A zinc oxide sintered body containing an element capable of having a valency of at least three positive valences which has a sintered density of at least 5 g/cm³ and a specific resistance lower than 1 Ω.cm.
Claim 3
Dependent Claim
88 words
A zinc oxide sintered body doped with an element other than zinc or oxygen, which has a sintered density of at least 5 g/cm³ and a specific resistance lower than 10 mΩ.cm, wherein the total amount of the spinel structure contained in the sintered body is equal to or smaller than the amount of a spinel structure (expressed by the formula ZnX₂O₄ in which X represents the element added as a dopant) as obtained if the entire amount of the element as the dopant takes the spinel structure.
Claim 4
Dependent Claim
88 words
A zinc oxide sintered body doped with an element other than zinc or oxygen, which has a sintered density of at least 5 g/cm³ and a specific resistance lower than 10 mΩ.cm, wherein the total amount of the spinel structure contained in the sintered body is equal to or smaller than the amount of a spinel structure (expressed by the formula ZnX₂O₄ in which X represents the element added as a dopant) as obtained if the entire amount of the element as the dopant takes the spinel structure.
Claim 5
Dependent Claim
34 words
A zinc oxide sintered body as claimed in Claims 1 or 2, wherein the element is present in an amount of from 0.1 to 20% by atomic weight based on the amount of zinc.
Claim 6
Dependent Claim
52 words
A process for the preparation of a zinc oxide sintered body having a sinter density of at least 5 g/cm³ and a specific resistance lower than 1Ω.cm, which comprises sintering zinc oxide containing an element capable of having a valency of at least three positive valences at a temperature higher than 1,300°C.
Claim 7
Dependent Claim
52 words
A process for the preparation of a zinc oxide sintered body having a sinter density of at least 5 g/cm³ and a specific resistance lower than 1Ω.cm, which comprises sintering zinc oxide containing an element capable of having a valency of at least three positive valences at a temperature higher than 1,300°C.
Claim 8
Dependent Claim
52 words
A process for the preparation of a low-resistance zinc oxide sintered body, comprising mixing a spinel structure oxide represented by the formula ZnX₂O₄ wherein X represents an element capable of having a valency of at least three positive valences with zinc oxide, and sintering the mixture at a temperature higher than 1,300°C.
Claim 9
Dependent Claim
52 words
A process for the preparation of a low-resistance zinc oxide sintered body, comprising mixing a spinel structure oxide represented by the formula ZnX₂O₄ wherein X represents an element capable of having a valency of at least three positive valences with zinc oxide, and sintering the mixture at a temperature higher than 1,300°C.
Claim 10
Dependent Claim
44 words
A process as claimed in Claims 4 or 5, wherein the zinc oxide containing the element is in the form of a highly dispersible powder having a primary particle diameter not larger than 1 µm and a specific surface area of at least 2m²/g.
Claim 11
Dependent Claim
32 words
A process as claimed in any of Claims 4 to 6, wherein the amount of the element present from 0.1 to 20 % by atomic weight based on the amount of zinc.
Claim 12
Dependent Claim
29 words
A process as claimed in Claim 5, wherein the spinel structure oxide of the formula ZnX₂O₄ is prepared by a heat treatment at a temperature of 500 to 1,000°C.
Claim 13
Dependent Claim
25 words
A process as claimed in any of Claims 4 to 8, wherein the sintering is carried out at a temperature of from 1,300°C and 1,700°C.
Claim 14
Dependent Claim
25 words
A process as claimed in any of Claims 4 to 9, wherein the sintering is carried out at a temperature of from 1,400°C to 1,600°C.
Claim 15
Dependent Claim
30 words
A sputtering target comprising a sintered body as claimed in any of Claims 1 to 3, and/or prepared by a process as claimed in any of Claims 4 to 10.
Claim 16
Dependent Claim
40 words
A process for the preparation of a zinc oxide sintered body, the process comprising sintering a mixture of zinc oxide and a compound of a metallic element, the element capable of having a valency of at least three positive valences.
Claim 17
Dependent Claim
40 words
A process for the preparation of a zinc oxide sintered body, the process comprising sintering a mixture of zinc oxide and a compound of a metallic element, the element capable of having a valency of at least three positive valences.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.