Patent EP0668329A2 successfully refreshed from Google Patents.
Patent EP0349187A2 successfully refreshed from Google Patents.
EP0349187A2
Expired / Lapsed
EP
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The production of oxide coatings by sputtering techniques
Assignee: Messer LLC
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Filing: 1989-06-20
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Granted: —
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Expires: 2009-06-20
Abstract
Abstract A method of depositing an oxide coating on to a substrate (14) by sputtering from a target (18) which includes one or more of silicon, titanium, aluminium or tin, wherein the target (18) is exposed to a plasma containing oxygen and chlorine (29) while being maintained at an electric potential (42) with respect to the plasma so that metal is dislodged from the target (18) and deposited on the substrate (14).
Inventors
- 👤 Randall C. Ross
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 02:51
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/081; C23C14/0021; C23C14/0036; C23C14/0057; C23C14/083; C23C14/086; C23C14/10
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
78 words
A method of depositing an oxide coating which comprises providing a target including a metal or metalloid element selected from the group consisting of silicon, titanium, aluminium and tin and combinations thereof, providing a substrate in proximity to the target, exposing the target to a plasma containing oxygen and chlorine while maintaining the target at an electric potential with respect to the plasma so that material is dislodged from the exposed target surface and deposited on the substrate.
Claim 2
Independent Claim
78 words
A method of depositing an oxide coating which comprises providing a target including a metal or metalloid element selected from the group consisting of silicon, titanium, aluminium and tin and combinations thereof, providing a substrate in proximity to the target, exposing the target to a plasma containing oxygen and chlorine while maintaining the target at an electric potential with respect to the plasma so that material is dislodged from the exposed target surface and deposited on the substrate.
Claim 3
Independent Claim
18 words
A method according to Claim in which the target comprises only the metal or metalloid element or elements.
Claim 4
Dependent Claim
19 words
A method according to Claim 2 in which the target comprises only one of the metal or metalloid elements.
Claim 5
Independent Claim
32 words
A method according to any preceding claim in which the exposure of the target to a plasma includes the step of providing a plasma-forming gas and converting the gas to the plasma.
Claim 6
Dependent Claim
56 words
A method according to Claim 4 in which the plasma-forming gas includes a first gaseous species containing oxygen and a second gaseous species containing chlorine, the method further comprising the step of controlling the proportion of chlorine to oxygen in the plasma by controlling the proportion of the first and second species in the plasma-forming gas.
Claim 7
Dependent Claim
19 words
A method according to Claim 5 in which the chlorine-containing species includes a compound containing both carbon and chlorine.
Claim 8
Dependent Claim
21 words
A method according to Claim 6 in which the chlorine-containing species is a chlorinated hydrocarbon having fewer than four carbon atoms.
Claim 9
Dependent Claim
14 words
A method according to Claim 7 in which the chlorinated hydrocarbon is carbon tetrachloride.
Claim 10
Independent Claim
18 words
A method according to any one of Claims 5 to 8 in which the oxygen-containing species is oxygen.
Claim 11
Independent Claim
20 words
A method according to any one of Claims 5 to 9 in which the plasma-forming gas includes a noble gas.
Claim 12
Dependent Claim
13 words
A method according to Claim 10 in which the noble gas is argon.
Claim 13
Independent Claim
21 words
A method according to any one of Claims 4 to 11 in which the plasma-forming gas is substantially free of fluorine.
Claim 14
Independent Claim
21 words
A method according to any one of Claims 4 to 12 in which the plasma-forming gas is substantially free of hydrogen.
Claim 15
Independent Claim
18 words
A method according to any preceding claim which includes the substantially isolation of the substrate from the plasma.
Claim 16
Independent Claim
32 words
A method according to any preceding claim which further comprises the step of maintaining a film of an oxide of the metal or metalloid element on an exposed surface of the target.
References Cited (Backward Citations)
No citation records indexed.
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