Patent AT229225B successfully refreshed from Google Patents.
Patent EP0346815A2 successfully refreshed from Google Patents.
EP0346815A2
Expired / Lapsed
EP
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Vacuum processing apparatus and transportation system thereof
Assignee: AGC Inc
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Filing: 1989-06-12
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Granted: —
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Expires: 2009-06-12
Abstract
Abstract A vacuum processing apparatus comprises a carrying body for holding a glass plate thereon, a pair of elongated stationary members extended in a vacuum chamber in which processing stages for forming films on the glass plate by a vapor deposition method are provided, linear motor transportation device provided at one of the stationary members, a pair of movable members provided at both sides of the carrying body so that the movable members are moved along the stationary members in a non-contacting state by the action of the linear motor device.
Inventors
- 👤 Yoshitaka Katagiri
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 03:51
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/32; H10P72/3202; B; B29; B29C; B29C51/00; B29C51/26; B29C51/261; B65; B65G; B65G54/00; B65G54/02; H10P72/3204
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
64 words
A transportation system for a vacuum processing apparatus which comprises a supporting means for supporting a material to be processed and a transportation means for transporting said supporting means in a vacuum processing apparatus wherein said transportation means comprises a magnetically floating type linear motor transportation means comprising a stationary member and a movable member movable to said stationary member in a non-contacting state.
Claim 2
Dependent Claim
64 words
A transportation system for a vacuum processing apparatus which comprises a supporting means for supporting a material to be processed and a transportation means for transporting said supporting means in a vacuum processing apparatus wherein said transportation means comprises a magnetically floating type linear motor transportation means comprising a stationary member and a movable member movable to said stationary member in a non-contacting state.
Claim 3
Dependent Claim
37 words
The transportation system for a vacuum processing apparatus according to Claim 1, wherein said transportation means comprises a pair of magnetically floating type linear motor transportation means either one of which has a driving force generating section.
Claim 4
Dependent Claim
40 words
The transportation system for a vacuum processing apparatus according to Claim 1, wherein said magnetically floating type linear motor transportation means is provided with a rising position controlling unit for controlling gaps between said stationary member and said movable member.
Claim 5
Dependent Claim
29 words
The transportation system for a vacuum processing apparatus according to Claim 1, wherein said stationary member is provided with magnetically exciting parts for driving and position-controlling said movable member.
Claim 6
Dependent Claim
42 words
The transportation system for a vacuum processing apparatus according to Claim 1, wherein said movable member of the magnetically floating type linear motor transportation means is provided with auxiliary rollers for assisting the movement of said movable member in a non-rising state.
Claim 7
Dependent Claim
34 words
The transportation system for a vacuum processing apparatus according to Claim 1, wherein a thermal deformation absorbing means is provided in either of said transportation means to absorb the deformation of said supporting means.
Claim 8
Dependent Claim
31 words
The transportation system for a vacuum processing apparatus according to Claim 1, wherein said supporting means has supporting members at its both side surfaces to support said material to be processed.
Claim 9
Dependent Claim
44 words
The transportation system for a vacuum processing apparatus according to Claim 1, wherein supporting-means-position detecting members are provided in said vacuum processing apparatus so as to regulate the movement of said transportation means on the basis of information detected by said supporting-means-position detecting members.
Claim 10
Dependent Claim
95 words
A vacuum processing apparatus which comprises: a supporting means for supporting a substrate to be processed, a transportation means for transporting said supporting means said transportation means comprising a magnetically floating type linear motor transportation means which comprises a stationary member and a movable member movable to said stationary member in a non-contacting state, a vacuum processing means for vacuum-processing said substrate being transported at a processing stage in said vacuum processing apparatus, and a shielding member for shielding said transportation means from said vacuum processing means at a position corresponding to said processing stage.
Claim 11
Dependent Claim
95 words
A vacuum processing apparatus which comprises: a supporting means for supporting a substrate to be processed, a transportation means for transporting said supporting means said transportation means comprising a magnetically floating type linear motor transportation means which comprises a stationary member and a movable member movable to said stationary member in a non-contacting state, a vacuum processing means for vacuum-processing said substrate being transported at a processing stage in said vacuum processing apparatus, and a shielding member for shielding said transportation means from said vacuum processing means at a position corresponding to said processing stage.
Claim 12
Dependent Claim
33 words
The vacuum processing apparatus according to Claim 9, wherein said transportation means comprises a pair of magnetically floating type linear motor transportation means either one of which has a driving force generating section.
Claim 13
Dependent Claim
36 words
The vacuum processing apparatus according to Claim 9, wherein said magnetically floating type linear motor transportation means is provided with a rising position controlling unit for controlling gaps between said stationary member and said movable member.
Claim 14
Dependent Claim
25 words
The vacuum processing apparatus according to Claim 9, wherein said stationary member is provided with magnetically exciting parts for driving and position-controlling said movable member.
Claim 15
Dependent Claim
38 words
The vacuum processing apparatus according to Claim 9, wherein said movable member of the magnetically floating type linear motor transportation means is provided with auxiliary rollers for assisting the movement of said movable member in a non-rising state.
Claim 16
Dependent Claim
40 words
The vacuum processing apparatus according to Claim 9, wherein said supporting means has a horizontal base portion, and a deformation absorbing means is provided in either of said transportation means to absorb a thermally deformed portion of said supporting means.
Claim 17
Dependent Claim
27 words
The vacuum processing apparatus according to Claim 9, wherein said supporting means has supporting members at its both side surfaces to support said substrate to be processed.
Claim 18
Dependent Claim
41 words
The vacuum processing apparatus according to Claim 9, wherein said transportation means is provided with a speed controlling member for transporting said supporting means in correspondence to a distribution of processing speed of said vacuum processing means at said processing stage.
Claim 19
Independent Claim
91 words
A method for forming a film on a substrate wherein a substrate is supported and transported by a transportation system which comprises a supporting means for supporting said substrate and a transportation means for transporting said supporting means wherein said transportation means comprises magnetically floating type linear motor transportation means comprising a stationary member and a movable member movable to said stationary member in a non-contacting state, and a film is formed on said substrate while said substrate is supported and transported by said transportation system in a magnetically floating state.
Claim 20
Independent Claim
91 words
A method for forming a film on a substrate wherein a substrate is supported and transported by a transportation system which comprises a supporting means for supporting said substrate and a transportation means for transporting said supporting means wherein said transportation means comprises magnetically floating type linear motor transportation means comprising a stationary member and a movable member movable to said stationary member in a non-contacting state, and a film is formed on said substrate while said substrate is supported and transported by said transportation system in a magnetically floating state.
Claim 21
Dependent Claim
52 words
The method according to Claim 17, wherein said transportation means is provided with a speed controlling member for transporting said supporting means and the thickness of the film to be formed on said substrate is regulated by employing said speed controlling member in consideraton of the distribution of the film forming speed.
References Cited (Backward Citations)
No citation records indexed.
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