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EP0343645A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Electron-emitting device and electron-beam generator making use of it

Assignee: Canon Inc
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Filing: 1989-05-24
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Granted: —
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Expires: 2009-05-24
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Abstract

Abstract An electron-emitting device comprises electrodes mutually opposingly provided on the surface of a substrate, and an electron-emitting area provided between the electrodes, wherein a conductive film having an electrical resistance greater than that of said electron-emitting area and not more than 10¹⁰ Ω/square is provided on the surface of the substrate at least at the peripheral area of the electron-­emitting area in the state that it is electrically connected to said electrodes.

Inventors

  • 👤 Hidetoshi Suzuki
  • 👤 Ichiro Nomura

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-30 16:56
CPC Classifications
H; H01; H01J; H01J1/00; H01J1/02; H01J1/30; H01J1/316

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 72 words
An electron-emitting device, comprising electrodes mutually opposingly provided on the surface of a substrate, and an electron-emitting area provided between said electrodes, wherein a conductive film having an electrical resistance greater than that of said electron-emitting area and not more than 10¹⁰ Ω/square is provided on the surface of the substrate at least at the peripheral area of said electron-­emitting area in the state that it is electrically connected to said electrodes.
Claim 2
Dependent Claim 72 words
An electron-emitting device, comprising electrodes mutually opposingly provided on the surface of a substrate, and an electron-emitting area provided between said electrodes, wherein a conductive film having an electrical resistance greater than that of said electron-emitting area and not more than 10¹⁰ Ω/square is provided on the surface of the substrate at least at the peripheral area of said electron-­emitting area in the state that it is electrically connected to said electrodes.
Claim 3
Dependent Claim 43 words
The electron-emitting device according to Claim 1, wherein said conductive film comprises a deposited film comprising a boride, a carbide, a nitride, a metal, a metal oxide, a semiconductor, or carbon, and having a specific resistance of ρ < 1 x 10⁴ Ω·cm.
Claim 4
Dependent Claim 56 words
The electron-emitting device according to Claim 2, wherein said conductive film has a film thickness t (cm) represented by the following relationship (1): ρ/R d > t > ρ·10⁻¹⁰      (1) wherein ρ represents specific resistance (Ω·cm) of the material used in said conductive film, and R d represents a sheet resistance (Ω/square) of said electron-emitting area.
Claim 5
Dependent Claim 41 words
The electron-emitting device according to Claim 1, wherein said conductive film comprises a coated film comprising a boride, a carbide, a nitride, a metal oxide, a semiconductor, or carbon, and having a specific resistance of ρ ≧ 1 x 10⁴ Ω·cm.
Claim 6
Dependent Claim 43 words
The electron-emitting device according to Claim 1, wherein said electron-emitting area has an electrical resistance of from 1 x 10⁴ to 1 x 10⁷ Ω/square and said conductive film has an electrical resistance of from 1 x 10⁸ to 1 x 10¹⁰ Ω/square.
Claim 7
Dependent Claim 13 words
The electron-emitting device according to Claim 1, wherein said substrate comprises an insulator.
Claim 8
Dependent Claim 80 words
An electron-beam generator, comprising electrodes mutually opposingly provided on the surface of a substrate; an electron-emitting area provided between said electrodes; a conductive film having an electrical resistance greater than that of said electron-emitting area and not more than 10¹⁰ Ω/square, provided on the surface of the substrate at least at the peripheral area of said electron-emitting area in the state that it is electrically connected to said electrodes; and an electric source for applying a voltage between said electrode.
Claim 9
Dependent Claim 80 words
An electron-beam generator, comprising electrodes mutually opposingly provided on the surface of a substrate; an electron-emitting area provided between said electrodes; a conductive film having an electrical resistance greater than that of said electron-emitting area and not more than 10¹⁰ Ω/square, provided on the surface of the substrate at least at the peripheral area of said electron-emitting area in the state that it is electrically connected to said electrodes; and an electric source for applying a voltage between said electrode.
Claim 10
Dependent Claim 43 words
The electron-beam generator according to Claim 7, wherein said conductive film comprises a deposited film comprising a boride, a carbide, a nitride, a metal, a metal oxide, a semiconductor, or carbon, and having a specific resistance of ρ < 1 x 10⁴ Ω·cm.
Claim 11
Dependent Claim 56 words
The electron-beam generator according to Claim 8, wherein said conductive film has a film thickness t (cm) represented by the following relationship (1): ρ/R d > t > ρ·10⁻¹⁰      (1) wherein ρ represents specific resistance (Ω·cm) of the material used in said conductive film, and R d represents a sheet resistance (Ω/square) of said electron-emitting area.
Claim 12
Dependent Claim 41 words
The electron-beam generator according to Claim 7, wherein said conductive film comprises a coated film comprising a boride, a carbide, a nitride, a metal oxide, a semiconductor, or carbon, and having a specific resistance of ρ ≧ 1 x 10⁴ Ω·cm.
Claim 13
Dependent Claim 43 words
The electron-beam generator according to Claim 7, wherein said electron-emitting area has an 27ectrical resistance of from 1 x 10⁴ to 1 x 10⁷ Ω/square and said conductive film has an electrical resistance of from 1 x 10⁸ to 1 x 10¹⁰ Ω/square.
Claim 14
Dependent Claim 13 words
The electron-beam generator according to Claim 7, wherein said substrate comprises an insulator.

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