EP0343355A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method of creating a high flux of activated species for reaction with a remotely located substrate
Assignee: Energy Conversion Devices Inc
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Filing: 1989-04-11
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Granted: —
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Expires: 2009-04-11
Abstract
Abstract A method of forming a high flux of activated species (34), such as ions, of an energy transferring gas (A) by employing a substantial pressure differential between the pressure adjacent the aperture (26) in a first conduit (24) through which the energy transferring gas is introduced into a vacuumized enclosure (12) and the background pressure which exists in said enclosure. In one embodiment, the flow rate of the energy transferring gas flowing through said first conduit, when taken in conjunction with said pressure differential, causes the high flux of activated species of the energy transferring gas to collide with a precursor deposition/etchant gas, remotely introduced into the enclosure through a second conduit (60), for forming deposition/etchant species (65) therefrom. In an alternate embodiment, the pressure differential causes those activated species, themselves, to be either deposited upon or etched away from the surface of a remotely positioned substrate (50).
Inventors
- 👤 Joachim Doehler
- 👤 Stephen Hudgens
- 👤 Stanford Ovshinsky
- 👤 Buddy Dotter Ii
- 👤 Lester Peedin
- 👤 Jeffrey Krisko
- 👤 Annette Krisko
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-28 06:25
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45502; C23C16/4551; C23C16/448; C23C16/452; C23C16/45514; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/739; Y10S505/741
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
171 words
A method of fabricating high quality thin films at a relatively high rate of deposition, said method including the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas (A) into the interior of said enclosure through at least one aperture (26; 226; 326) formed in a first conduit (24; 224; 324); activating said energy transferring gas in an activation region (36) so as to form a high density plume (34; 231; 331) of activated species from said energy transferring gas; operatively disposing substrate means (50) interiorly of said enclosure; said substrate means spacedly positioned from said activation region a distance sufficient to substantially prevent electron damage; said method characterized by: creating a choke condition adjacent the aperture in said first conduit so as to provide a localized high pressure of energy transferring gas flowing therethrough, whereby a substantial pressure differential is maintained between the pressure said aperture in said first conduit and the background pressure in said enclosure.
Claim 2
Independent Claim
171 words
A method of fabricating high quality thin films at a relatively high rate of deposition, said method including the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas (A) into the interior of said enclosure through at least one aperture (26; 226; 326) formed in a first conduit (24; 224; 324); activating said energy transferring gas in an activation region (36) so as to form a high density plume (34; 231; 331) of activated species from said energy transferring gas; operatively disposing substrate means (50) interiorly of said enclosure; said substrate means spacedly positioned from said activation region a distance sufficient to substantially prevent electron damage; said method characterized by: creating a choke condition adjacent the aperture in said first conduit so as to provide a localized high pressure of energy transferring gas flowing therethrough, whereby a substantial pressure differential is maintained between the pressure said aperture in said first conduit and the background pressure in said enclosure.
Claim 3
Independent Claim
249 words
A method of fabricating high quality thin films at a relatively high rate of deposition, said method including the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas (A) into the interior of said enclosure through at least one aperture (26; 226; 326) formed in a first conduit (24; 224; 324) ; activating said energy transferring gas in an activation region (36) so as to form a high density plume (34; 231; 331) of activated species from said energy transferring gas; introducing a precursor deposition gas into the interior of said enclosure through a second conduit (60); the point of introduction (62) of said precursor deposition gas from said second conduit into said enclosure being spacedly disposed relative to said activation region, whereby collisions of said high density of activated species with said precursor deposition gas define a collision region (65) in which a high density of energized deposition species of said precursor deposition gas are generated; operatively disposing substrate means (50) interiorly of said enclosure; said substrate means spacedly positioned from said activation region a distance sufficient to substantially prevent electron damage; said method characterized by: creating a choke condition adjacent the aperture in said first conduit so as to provide a localized high pressure of energy transferring gas flowing therethrough, whereby a substantial pressure is maintained differential between the pressure adjacent the aperture in said first conduit and the background pressure in said enclosure.
Claim 4
Independent Claim
249 words
A method of fabricating high quality thin films at a relatively high rate of deposition, said method including the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas (A) into the interior of said enclosure through at least one aperture (26; 226; 326) formed in a first conduit (24; 224; 324) ; activating said energy transferring gas in an activation region (36) so as to form a high density plume (34; 231; 331) of activated species from said energy transferring gas; introducing a precursor deposition gas into the interior of said enclosure through a second conduit (60); the point of introduction (62) of said precursor deposition gas from said second conduit into said enclosure being spacedly disposed relative to said activation region, whereby collisions of said high density of activated species with said precursor deposition gas define a collision region (65) in which a high density of energized deposition species of said precursor deposition gas are generated; operatively disposing substrate means (50) interiorly of said enclosure; said substrate means spacedly positioned from said activation region a distance sufficient to substantially prevent electron damage; said method characterized by: creating a choke condition adjacent the aperture in said first conduit so as to provide a localized high pressure of energy transferring gas flowing therethrough, whereby a substantial pressure is maintained differential between the pressure adjacent the aperture in said first conduit and the background pressure in said enclosure.
Claim 5
Dependent Claim
66 words
A method as in Claim 2, including the further step of selecting the flow rate of energy transferring gas in said first conduit so as to provide a sufficient pressure of said energy transferring gas adjacent said aperture for initiating a plasma from said energy transferring gas at a prower-pressure-aperture size regime which is at the substantial minimum of the Paschen curve (1, 2, 3, 4).
Claim 6
Dependent Claim
34 words
A method as in Claim 2, including the further step of increasing the time of residency of electrons adjacent said aperture, whereby the density of said activated species adjacent said aperture is also increased.
Claim 7
Dependent Claim
27 words
A method as in Claim 4, including the further step of providing a magnetic field to increase the time of residency of said electrons adjacent said aperture.
Claim 8
Dependent Claim
20 words
A method as in Claim 2, including the further step of providing means for cooling (228; 328) said first conduit.
Claim 9
Dependent Claim
30 words
A method as in Claim 2, including the further step of selecting said energy transferring gas from the group consisting essentially of hydrogen, the noble gases, CH₄ and combinations thereof.
Claim 10
Dependent Claim
34 words
A method as in Claim 2, including the further step of selecting the precursor deposition gas from the group consisting essentially of a silicon-containing gas, a carbon-containing gas, a germanium-containing gas, and combinations thereof.
Claim 11
Dependent Claim
70 words
A method as in Claim 2, including the further step of maintaining the background pressure in said enclosure at least a factor of five less than the pressure adjacent the aperture in said first conduit, whereby a plume of pressure isobars (231 a , 231 b ; 231 c ; 331 a ; 331 b ; 331 c ) is formed by the activated species of said energy transferring gas.
Claim 12
Dependent Claim
38 words
A method as in Claim 2, including the further step of controlling the volume of said activated species plume by controlling the pressure differential between the background pressure and the pressure adjacent the aperture in said first conduit.
Claim 13
Dependent Claim
43 words
A method as in Claim 1 including the further step of maintaining pressure isobars of about one-half the pressure at which the substantial minimum of the Paschen curve for a given energy transferring gas occurs adjacent the aperture portion of said first conduit.
Claim 14
Dependent Claim
23 words
A method as in Claim 2, including the further step of imparting a velocity to said activated species which is initially substantially transonic.
Claim 15
Independent Claim
240 words
A method of fabricating high quality thin films at a relatively high rate of deposition, said method including the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas (A) into the interior of said enclosure through at least one aperture (26; 226; 326) formed in a first conduit (24; 224; 334); activating said energy transferring gas in an activation region (36) so as to form a high density plume (34; 231; 331) of activated species from said energy transferring gas; introducing a precursor deposition gas into the interior of said enclosure through a second conduit (60); the point of introduction (62) of said precursor deposition gas from said second conduit into said enclosure being spacedly disposed relative to said activation region, whereby collisions of said high density of activated species with said precursor deposition gas define a collision region (65) in which a high density of energized deposition species of said precursor deposition gas are generated; operatively disposing substrate means interiorly of said enclosure; said substrate means (50) spacedly positioned from said activation region a distance sufficient to substantially prevent electron damage; said method characterized by: maintaining the background pressure in said enclosure at least a factor of five less than the pressure adjacent the aperture in said first conduit, whereby a plume of pressure isobars is formed by the activated species of said energy transferring gas.
Claim 16
Independent Claim
240 words
A method of fabricating high quality thin films at a relatively high rate of deposition, said method including the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas (A) into the interior of said enclosure through at least one aperture (26; 226; 326) formed in a first conduit (24; 224; 334); activating said energy transferring gas in an activation region (36) so as to form a high density plume (34; 231; 331) of activated species from said energy transferring gas; introducing a precursor deposition gas into the interior of said enclosure through a second conduit (60); the point of introduction (62) of said precursor deposition gas from said second conduit into said enclosure being spacedly disposed relative to said activation region, whereby collisions of said high density of activated species with said precursor deposition gas define a collision region (65) in which a high density of energized deposition species of said precursor deposition gas are generated; operatively disposing substrate means interiorly of said enclosure; said substrate means (50) spacedly positioned from said activation region a distance sufficient to substantially prevent electron damage; said method characterized by: maintaining the background pressure in said enclosure at least a factor of five less than the pressure adjacent the aperture in said first conduit, whereby a plume of pressure isobars is formed by the activated species of said energy transferring gas.
Claim 17
Independent Claim
181 words
A method of fabricating high quality thin films at a relatively high rate of deposition, said method including the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas (A) into the interior of said enclosure through at least one aperture (26; 226; 326) formed in a first conduit (24; 224; 334); applying an electromagnetic field to said energy transferring gas in an activation region (36) so as to form a plume (34; 231; 331) of activated species; introducing a precursor deposition gas into said enclosure through a second conduit (60) spaced from said activation region, whereby collisions of said activated species with said precursor deposition gas define a collision region (65) in which a high density of energized deposition species of said precursor deposition gas are generated; and operatively disposing substrate means (50) adjacent said collision region for depositing said energized deposition species thereupon; the method characterized by: limiting, without structural or magnetic confinement, the volume occupied by said plume of activated species of said energy transferring gas.
Claim 18
Independent Claim
181 words
A method of fabricating high quality thin films at a relatively high rate of deposition, said method including the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas (A) into the interior of said enclosure through at least one aperture (26; 226; 326) formed in a first conduit (24; 224; 334); applying an electromagnetic field to said energy transferring gas in an activation region (36) so as to form a plume (34; 231; 331) of activated species; introducing a precursor deposition gas into said enclosure through a second conduit (60) spaced from said activation region, whereby collisions of said activated species with said precursor deposition gas define a collision region (65) in which a high density of energized deposition species of said precursor deposition gas are generated; and operatively disposing substrate means (50) adjacent said collision region for depositing said energized deposition species thereupon; the method characterized by: limiting, without structural or magnetic confinement, the volume occupied by said plume of activated species of said energy transferring gas.
Claim 19
Dependent Claim
39 words
A method as in Claim 14, including the further step of controlling the volume occupied by said activated species plume by controlling the pressure differential between the background pressure and the pressure adjacent the aperture in said first conduit.
Claim 20
Independent Claim
139 words
A method of generating a high flux of activated species from an energy transferring gas, said method comprising the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas into the interior of said enclosure through at least one aperture (26, 226; 326) formed in a first conduit (24; 224; 334); activating said energy transferring gas (A) in an activation region (36) so as to form a flux of activated species from said energy transferring gas; operatively disposing substrate means (50) interiorly of said enclosure, said substrate means spacedly located relative to said activation region; said method characterized by: establishing a pressure differential of a least a factor of 5 between the pressure adjacent the aperture in said first conduit and the background pressure in said enclosure.
Claim 21
Independent Claim
139 words
A method of generating a high flux of activated species from an energy transferring gas, said method comprising the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas into the interior of said enclosure through at least one aperture (26, 226; 326) formed in a first conduit (24; 224; 334); activating said energy transferring gas (A) in an activation region (36) so as to form a flux of activated species from said energy transferring gas; operatively disposing substrate means (50) interiorly of said enclosure, said substrate means spacedly located relative to said activation region; said method characterized by: establishing a pressure differential of a least a factor of 5 between the pressure adjacent the aperture in said first conduit and the background pressure in said enclosure.
Claim 22
Dependent Claim
66 words
A method as in Claim 16, including the further step of selecting the flow rate of energy transferring gas in said first conduit so as to provide a sufficient pressure of said energy transferring gas adjacent said aperture for initiating a plasma from said energy transferring gas at a power-pressure-aperture size regime which is at the substantial minimum of the Paschen curve (1, 2, 3, 4).
Claim 23
Dependent Claim
46 words
A method as in Claim 17, including the further step of reducing the size of said aperture relative to the size of the first conduit so as to form a choke (226; 336) adjacent said aperture for providing a high pressure of said energy transferring gas.
Claim 24
Dependent Claim
34 words
A method as in Claim 18, including the further step of increasing the time of residency of electrons adjacent said aperture, whereby the density of said activated species adjacent said aperture is also increased.
Claim 25
Dependent Claim
31 words
A method as in Claim 16, including the further step of selecting said energy transferring gas from the group consisting essentially of hydrogen, the noble gases, CH₄, CF₄, and combinations thereof.
Claim 26
Independent Claim
130 words
A method of generating a flux of activated species from an energy transferring gas, said method comprising the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas (A) into the interior of said enclosure through at least one aperture (26; 226; 326) formed in a first conduit; activating said energy transferring gas in an activation region (36) so as to form a plume (34; 231; 331) of activated species from said energy transferring gas; operatively disposing substrate means (50) interiorly of said enclosure, said substrate means spacedly located relative to said activation region; said method characterized by: limiting, without structural or magnetic confinement, the volume occupied by said plume of activated species of said energy transferring gas.
Claim 27
Independent Claim
130 words
A method of generating a flux of activated species from an energy transferring gas, said method comprising the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas (A) into the interior of said enclosure through at least one aperture (26; 226; 326) formed in a first conduit; activating said energy transferring gas in an activation region (36) so as to form a plume (34; 231; 331) of activated species from said energy transferring gas; operatively disposing substrate means (50) interiorly of said enclosure, said substrate means spacedly located relative to said activation region; said method characterized by: limiting, without structural or magnetic confinement, the volume occupied by said plume of activated species of said energy transferring gas.
Claim 28
Dependent Claim
34 words
A method as in Claim 21, including the further step of forming a choke (226; 326) adjacent said aperture in said first conduit for providing a high pressure plume of said energy transferring gas.
Claim 29
Dependent Claim
40 words
A method as in Claim 21, including the further step of controlling the volume of said plume of activated species by controlling the pressure differential existing between the background pressure and the pressure adjacent the aperture in said first conduit.
Claim 30
Dependent Claim
23 words
A method as in Claim 21, including the further step of imparting a velocity to said activated species which is initially substantially transonic.
Claim 31
Independent Claim
126 words
A method of generating a flux of activated species from an energy transferring gas, said method comprising the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas (A) into the interior of said enclosure through at least one aperture (26; 226; 326) formed in a first conduit; activating said energy transferring gas in an activation region (36) so as to form a plume (34; 231; 331) of activated species from said energy transferring gas; said method characterized by: establishing a flow of said energy transferring gas through said first conduit at substantially transonic velocity so as to define a substantially clear boundary of said activation region without the structural or magnetic confinement thereof.
Claim 32
Independent Claim
126 words
A method of generating a flux of activated species from an energy transferring gas, said method comprising the steps of: providing an enclosure (12); maintaining the interior of said enclosure at a sub-atmospheric background pressure; introducing an energy transferring gas (A) into the interior of said enclosure through at least one aperture (26; 226; 326) formed in a first conduit; activating said energy transferring gas in an activation region (36) so as to form a plume (34; 231; 331) of activated species from said energy transferring gas; said method characterized by: establishing a flow of said energy transferring gas through said first conduit at substantially transonic velocity so as to define a substantially clear boundary of said activation region without the structural or magnetic confinement thereof.
Claim 33
Dependent Claim
47 words
A method as in Claim 25, including the further step of reducing the size of said aperture relative to the size of the first conduit so as to form a choke (226, 326) adjacent said aperture for providing a high density plume of said energy transferring gas.
Claim 34
Dependent Claim
23 words
A method as in Claim 25, including the further step of utilizing microwave energy (32; 232; 332) to activate said energy transferring gas.
Claim 35
Dependent Claim
71 words
A method as in Claim 25, including the further step of maintaining the background pressure in said enclosure at least about a factor of five less than the pressure adjacent the aperture in said first conduit, whereby a plume of pressure isobars (231 a ; 231 b ; 231 c ; 331 a ; 331 b ; 331 c ) is formed by the activated species of said energy transferring gas.
Claim 36
Dependent Claim
68 words
A method as in Claim 25, including the further steps of operatively disposing substrate means (50) interiorly of said enclosure and providing a flow rate of said energy transferring gas through said first conduit relative to the background pressure in said enclosure which imparts directional momentum to said activated species of said energy transferring gas for direct or indirect reaction thereof with a surface of the substrate means.
References Cited (Backward Citations)
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