Patent EP0328410A2 successfully refreshed from Google Patents.
EP0328410A2
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EP
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Method for fabricating a solid state imaging device
Assignee: Teledyne UK Ltd
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Filing: 1989-02-10
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Granted: —
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Expires: 2009-02-10
Abstract
Abstract In a method for fabricating imaging apparatus, adjoining regions, each forming only part of the active area of the complete device, are laid down separately, enabling larger active areas to be produced than would otherwise be possible using conventional wafer stepper equipment. In the complete device, imaging may be arranged over the boundary between the regions and/or charge may be transferred across the boundary.
Inventors
- 👤 Peter James Pool
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 15:39
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70425; G03F7/70475; H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
42 words
A method for fabricating a solid state imaging device comprising the steps of: producing a first region on a substrate and separately producing a second region adjoining the first, each region forming only part of the active area of the complete device.
Claim 2
Independent Claim
42 words
A method for fabricating a solid state imaging device comprising the steps of: producing a first region on a substrate and separately producing a second region adjoining the first, each region forming only part of the active area of the complete device.
Claim 3
Dependent Claim
17 words
A method as claimed in claim 1 wherein the first and second regions are formed using photolithography.
Claim 4
Dependent Claim
100 words
A method as claimed in claim 2 including the steps of: producing a registration pattern including an alignment mark on the substrate prior to production of the regions; producing the first and second regions by exposing first and second fields respectively on the substrate, the first field comprising the first region and an alignment mark and the second field comprising the second region and an alignment mark; and positioning the regions on the substrate by an alignment process which includes bringing the alignment mark of the first or second field into registration with the alignment mark of the registration pattern.
Claim 5
Dependent Claim
56 words
A method as claimed in claim 3 wherein two registration patterns, each including an alignment mark, are produced on the substrate and the alignment mark of the first field is aligned with the alignment mark of one of the registration patterns and that of the other field with the alignment mark of the other registration pattern.
Claim 6
Dependent Claim
35 words
A method as claimed in claim 3 or 4 wherein the or each registration pattern is produced using photolithography and alignment is made to the latent image of the alignment mark of the registration pattern.
Claim 7
Dependent Claim
35 words
A method as claimed in claim 3, 4 or 5 wherein the first and/or second field is moved relative to the substrate by a predetermined distance after alignment and then exposed to produce the region.
Claim 8
Dependent Claim
67 words
A method as claimed in claim 2 including the steps of: producing the first region by exposing a first field on the substrate, the first field comprising the first region and an alignment mark; bringing an alignment mark of a second field into registration with the first alignment mark formed on the substrate; and exposing the second field to produce the second region adjoining the first region.
Claim 9
Dependent Claim
29 words
A method as claimed in claim 7 wherein the second field is moved relative to the substrate by a predetermined distance after alignment before the second field is exposed.
Claim 10
Dependent Claim
19 words
A method as claimed in claim 6 or 8 wherein the substrate is moved to produce the relative movement.
Claim 11
Independent Claim
39 words
A method as claimed in any preceding claim wherein the regions are substantially rectangular in shape having long and short sides and are produced such that a short side of one region adjoins a short side of the other.
Claim 12
Independent Claim
41 words
A method as claimed in any of claims 1 to 9 wherein the regions are substantially rectangular in shape having long and short sides and are produced such that a long side of one adjoins a long side of the other.
Claim 13
Dependent Claim
35 words
A method as claimed in claim 10 or 11 wherein each region has an alignment mark which is located to a side of the region which is substantially orthogonal to the boundary between the regions.
Claim 14
Independent Claim
41 words
A method as claimed in any preceding claim wherein two alignment marks are included in a field to determine rotational alignment of the substrate and wherein the boundary between the regions is orthogonal to the line joining said two alignment marks.
Claim 15
Independent Claim
44 words
A method as claimed in any of claims 1 to 12 wherein two alignment marks are included in a field to determine rotational alignment of the substrate and wherein the boundary betwen the regions is parallel to the line joining said two alignment marks.
Claim 16
Independent Claim
13 words
A method as claimed in any preceding claim wherein the adjoining regions overlap.
Claim 17
Independent Claim
24 words
A method as claimed in any preceding claim wherein a plurality of first regions are initially fabricated and then a plurality of second regions.
Claim 18
Independent Claim
32 words
A method as claimed in any preceding claim and including the step of exposing a field on the substrate to produce a region which includes an end portion of the active area.
Claim 19
Dependent Claim
22 words
A method as claimed in claim 17 wherein the field includes two end portions of active areas and a gap between them.
Claim 20
Dependent Claim
33 words
A method as claimed in claim 17 or 18 including the step of exposing a second field on the substrate to form another region which forms a middle portion of the active area.
Claim 21
Dependent Claim
27 words
A method as claimed in claim 17, 18 or 19 wherein the active area includes two end portions and one or more middle portions located between them.
Claim 22
Independent Claim
46 words
A method as claimed in any preceding claim wherein the active area comprises a plurality of layers, each layer comprising at least two adjoining regions which are separately fabricated and wherein the boundary between regions in one layer is substantially offset from that in another layer.
Claim 23
Independent Claim
31 words
A method as claimed in any preceding claim wherein the boundary between the adjoining region is parallel to the direction of charge transfer through the active area in the complete device.
Claim 24
Dependent Claim
17 words
Image apparatus having an active area which comprises at least two adjoining regions which are separately fabricated.
Claim 25
Dependent Claim
17 words
Image apparatus having an active area which comprises at least two adjoining regions which are separately fabricated.
Claim 26
Dependent Claim
19 words
Imaging apparatus as claimed in claim 23 wherein the boundary between the regions is included in the active area.
Claim 27
Dependent Claim
48 words
Imaging apparatus as claimed in claim 23 or 24 wherein the active area is such as to accumulate a charge distribution representative of radiation incident thereon and means are included for conducting charge from the active area in a direction substantially orthogonal to the boundary between the regions.
Claim 28
Dependent Claim
47 words
Imaging apparatus as claimed in claim 23 or 24 wherein the active area is such as to accumulate a charge distribution representative of radiation incident thereon and means are included for conducting charge from the active area in a direction parallel to the boundary between the regions.
Claim 29
Dependent Claim
39 words
Imaging apparatus as claimed in any of claims 23 to 26 wherein the active area is such as to accumulate a charge distribution representative of radiation incident thereon and wherein the distribution is read out as an analogue signal.
Claim 30
Dependent Claim
17 words
Imaging apparatus as claimed in any of claims 23 to 27 wherein the two adjoining regions overlap.
Claim 31
Dependent Claim
35 words
Imaging apparatus as claimed in any of claims 23 to 28 wherein the active area comprises a plurality of adjoining regions which are separately fabricated, at least some of the plurality having the same configuration.
Claim 32
Dependent Claim
24 words
Imaging apparatus as claimed in any of claims 23 to 29 wherein the imaging apparatus is constructed and arranged for use in astronomical observations.
Claim 33
Dependent Claim
48 words
Imaging apparatus as claimed in any of claims 23 to 30 wherein the active area comprises a plurality of layers, each layer comprising at least two adjoining regions which are separately fabricated and wherein the boundary between regions in one layer is offset from that in another layer.
References Cited (Backward Citations)
No citation records indexed.
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