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EP0328333A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Process for producing ceramic superconductors

Assignee: Westinghouse Electric Corp
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Filing: 1989-02-06
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Granted: —
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Expires: 2009-02-06
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Abstract

Abstract Vapor deposition process for making barium and/or strontium containing ceramic superconductors utilizing vaporization of chelates of the metallic constituents of the superconductor at 150-350C to produce a composite vapor which can be mixed with an oxygen-containing gas for depositing a very homogeneous ceramic film on a heated substrate. This process attempts to solve the barium and/or strontium source material volatility problem which has generally prevented the chemical vapor deposition of such materials.

Inventors

  • 👤 Robert George Charles
  • 👤 Robert Mazelsky
  • 👤 Dennis Norbert Schmidt
  • 👤 William Sam Cifone
  • 👤 John Robert Szedon

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-31 15:52
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0436; H10N60/0464

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 68 words
A process for producing ceramic superconduc­tor containing barium and/or strontium characterized by: vaporizing chelates of metallic constituents of the super­conductor at 150-350C, thereby producing a chelate compos­ite vapor; mixing said chelate composite vapor with oxygen-containing gas to produce a gaseous chemical vapor deposition mixture; heating a substrate to from 350 to 650C; and contacting said gaseous chemical vapor deposi­tion mixture to said substrate to produce a ceramic film.
Claim 2
Dependent Claim 68 words
A process for producing ceramic superconduc­tor containing barium and/or strontium characterized by: vaporizing chelates of metallic constituents of the super­conductor at 150-350C, thereby producing a chelate compos­ite vapor; mixing said chelate composite vapor with oxygen-containing gas to produce a gaseous chemical vapor deposition mixture; heating a substrate to from 350 to 650C; and contacting said gaseous chemical vapor deposi­tion mixture to said substrate to produce a ceramic film.
Claim 3
Dependent Claim 17 words
A process according to claim 1, characterized in that the substrate is a single crystal perovskite substrate.
Claim 4
Dependent Claim 22 words
A process according to claim 2, characterized in that the substrate is formed from or composed of a single crystal strontium titanate.
Claim 5
Dependent Claim 26 words
A process according to claim 1, 2 or 3, characterized in that the metallic constituents consist essentially of yttrium and copper plus and barium and/or strontium.
Claim 6
Dependent Claim 43 words
A process according to claim 1, 2, 3 or 4 characterized in that the chelates are vaporized in an inert carrier gas which transports said chelates to a position adjacent to the substrate where said chelates to a mixed with the oxygen-containing gas.
Claim 7
Dependent Claim 31 words
A process according to any of claims 1 to 5, characterized in that barium is one of the metallic con­stituents, and Bis [1,1,1,2,2,3,3,-heptafluoro-7,7-­ dimethyl-4,6-octanedionato] barium(II) is used as a barium chelate.
Claim 8
Dependent Claim 31 words
A process according to any of claims 1 to 6, characterized in that yttrium is one of the metallic constituents, and Tris [1,1,1,2,2,3 3,-heptafluoro-7,­7-dimethyl-4,6-octanedionato] yttrium(III) is used as a yttrium chelate.
Claim 9
Dependent Claim 30 words
A process according to any of claims 1 to 7, characterized in that copper is one of the metallic con­stituents, and Bis [acetyl-acetoneimide] copper(II) is used as a copper chelate.
Claim 10
Dependent Claim 30 words
A process according to any of claims 1 to 8, characterized in that strontium is one of the metallic constituents, and Bis [1,1,1,2,2,3,3,-heptafluoro-7,­7-dimethyl-4,6-octanedionato] strontium(II) is used as a strontium chelate.
Claim 11
Dependent Claim 32 words
A process according to any of claims 1 to 8, characterized in that the metallic components consist of yttrium, barium and copper, and fluorine is partially substituted for oxygen in the ceramic.
Claim 12
Dependent Claim 21 words
A process according to any of the preceding claims, characterized in that the substrate is heated to from 400 to 500C.
Claim 13
Dependent Claim 23 words
A process according to any of the preceding claims, characterized in that the ceramic film is post-baked at 400-650C in an oxygen atmosphere.
Claim 14
Dependent Claim 15 words
A process according to claim 1, character­ized in that the substrate is an oriented-crystal substrate.

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